Along with the miniaturization of MEMS (micro-electro-mechanical system) components, the influence of adhesion failure in micro/nano systems caused by Casimir attraction becomes more and more important. An effective method to solve this problem is to reduce the attraction and achieve repulsion. In this paper the resource of Casimir force, its theoretical calculation, and the influence of electromagnetic parameters are studied, especially the application of electromagnetic metamaterials in Casimir force adjustment. The development of electromagnetic materials brings both opportunity and challenge to design and adjustment of Casimir force, along with controversial comments. More researches on general and systematical theoretical calculation, new construction of metamaterial models and experimental measurement with extra precision are desperately needed. The application of Casimir force will be universalized with these improvements.

repulsive Casimir force  /  MEMS  /  electromagnetic metamaterials  /  actively tunable