The research and application of varieties of smart sensors attract considerableattention as the smart life is coming. Smart sensors have powerful data processing capabilities beyond traditional sensors,providingmore comprehensive functions. This paper introduced the research status and the leading products of several common smart sensors, such as temperature sensors, pressure sensors, inertial sensors, bio-sensors and RFID. The key roleof smart sensors in the promising applications has been demonstrated, i.e., internet of things, virtual reality, robots, healthcare. Finally, the future developments of the smart sensors have been discussed.

smart sensor  /  MEMS  /  internet of things  /  industrialization