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Recent Development on High Thermal Conductivity Diamond Synthesized by Microwave Plasma Chemical Vapor Deposition and Its Devices Applications
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Jiwen ZHAO1, Xiaobin HAO1, Kechen ZHAO1, Yicun LI1, Sen ZHANG1, Kang LIU1, Bing DAI1, Huaixin GUO2, Jiecai HAN1, Jiaqi ZHU1, 3
Journal of the Chinese Ceramic Society | 2022, 50(7) : 1852 - 1864
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Journal of the Chinese Ceramic Society | 2022, 50(7): 1852-1864
• Review •
Recent Development on High Thermal Conductivity Diamond Synthesized by Microwave Plasma Chemical Vapor Deposition and Its Devices Applications
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Jiwen ZHAO1, Xiaobin HAO1, Kechen ZHAO1, Yicun LI1, Sen ZHANG1, Kang LIU1, Bing DAI1, Huaixin GUO2, Jiecai HAN1, Jiaqi ZHU1, 3
Affiliations
  • 1.National Key Laboratory of Science and Technology on Advanced Composites in Special Environments, Harbin Institute of Technology, Harbin 150080, China
  • 2.Science and Technology on Monolithic Integrated Circuits and Modules Laboratory, Nanjing Electronic Devices Institute, Nanjing 210016, China
  • 3.Key Laboratory of Micro-Systems and Micro-Structures Manufacturing Ministry of Education, Harbin Institute of Technology, Harbin 150080, China

    • ZHAO Jiwen (1994-), male, Doctoral candidate. E-mail:

About Author:

ZHAO Jiwen (1994-), male, Doctoral candidate. E-mail:

Published: 2022-07-20 doi: 10.14062/j.issn.0454-5648.20220073
Outline
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In the application of the third-generation semiconductors, the power density of electronic devices increases and the size is miniaturization. A problem of high temperature becomes more prominent. Diamond is one of the optimum heat dissipation materials because of its ultra-high thermal conductivity and stable properties. In this review, the design principle and development process of different microwave plasma chemical vapor deposition equipment were introduced. Recent developments on different thermal applications of single crystal, polycrystalline and nanocrystal diamond were represented. Some challenges in the industrialization process combined with the 3rd-generation-semiconductors and the development direction of "larger, purer and faster" were summarized. In addition, the future research direction of diamond heat dissipation application was also prospected.

diamond  /  microwave plasma chemical vapor deposition  /  heat dissipation  /  gallium nitride devices
赵继文, 郝晓斌, 赵柯臣, 李一村, 张森, 刘康, 代兵, 郭怀新, 韩杰才, 朱嘉琦. 微波等离子体化学气相沉积法合成高导热金刚石材料及器件应用进展. 硅酸盐学报, 2022 , 50 (7) : 1852 -1864 . DOI: 10.14062/j.issn.0454-5648.20220073
Jiwen ZHAO, Xiaobin HAO, Kechen ZHAO, Yicun LI, Sen ZHANG, Kang LIU, Bing DAI, Huaixin GUO, Jiecai HAN, Jiaqi ZHU. Recent Development on High Thermal Conductivity Diamond Synthesized by Microwave Plasma Chemical Vapor Deposition and Its Devices Applications[J]. Journal of the Chinese Ceramic Society, 2022 , 50 (7) : 1852 -1864 . DOI: 10.14062/j.issn.0454-5648.20220073
Appendix
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Year 2022 volume 50 Issue 7
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Article Info
doi: 10.14062/j.issn.0454-5648.20220073
  • Receive Date：2022-01-25
  • Online Date：2026-10-20
  • Published：2022-07-20
Article Data
Affiliations
History
  • Received：2022-01-25
  • Revised：2022-03-03
Funding
Affiliations
    1.National Key Laboratory of Science and Technology on Advanced Composites in Special Environments, Harbin Institute of Technology, Harbin 150080, China
    2.Science and Technology on Monolithic Integrated Circuits and Modules Laboratory, Nanjing Electronic Devices Institute, Nanjing 210016, China
    3.Key Laboratory of Micro-Systems and Micro-Structures Manufacturing Ministry of Education, Harbin Institute of Technology, Harbin 150080, China

Corresponding:

ZHU Jiaqi (1974-), male, Professor. E-mail:
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表12种不同金属材料的力学参数
科
Family		 属数
Number of
genus		 种数
Number of
species		 占总种数比例
Percentage of
total species (%)		 属
Genus		 种数
Number of
species		 占总种数比例
Percentage of total
species (%)
鹅膏菌科Amanitaceae 2 11 5.26 鹅膏菌属 Amanita 10 4.78
小菇科 Mycenaceae 2 12 5.74 丝盖伞属 Inocybe 5 2.39
多孔菌科 Polyporaceae 8 14 6.70 蜡蘑属 Laccaria 5 2.39
红菇科 Russulaceae 3 23 11.00 小皮伞属 Marasmius 6 2.87
小菇属 Mycena 11 5.26
光柄菇属 Pluteus 5 2.39
红菇属 Russula 17 8.13
栓菌属 Trametes 5 2.39
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