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With the rapid development of 5G communication and millimeter-wave technology, the performance requirements for high-frequency passive interconnect structures in radio frequency (RF) microsystems have become increasingly critical. To address the efficiency bottlenecks caused by fragmented process data and isolated models in traditional design workflows, this paper proposed an independently developed 1~40 GHz silicon-based passive interconnect Process Design Kit (PDK). By integrating equivalent circuit models with HFSS full-wave electromagnetic simulation data, parameterized models for core structures such as grounded coplanar waveguide (GCPW) and micro-bump interconnects are established, and high-precision model matching is achieved through gradient optimization algorithms. The PDK development is completed on the Keysight ADS platform, including symbol libraries, parameterized cells, design rules, and verification workflows. Experimental results demonstrate that the developed PDK achieves a root mean square error (RMSE) of S-parameters below 10% across the 1~40 GHz frequency band. Based on this PDK, the simulation design of an X-band RF micro system was completed. The microsystem meets the specified performance requirements, verities the validity of the PDK. This PDK provides for reliable support for efficient design-process co-optimization in high-frequency RF systems.
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| 科 Family | 属数 Number of genus | 种数 Number of species | 占总种数比例 Percentage of total species (%) | 属 Genus | 种数 Number of species | 占总种数比例 Percentage of total species (%) |
|---|---|---|---|---|---|---|
| 鹅膏菌科Amanitaceae | 2 | 11 | 5.26 | 鹅膏菌属 Amanita | 10 | 4.78 |
| 小菇科 Mycenaceae | 2 | 12 | 5.74 | 丝盖伞属 Inocybe | 5 | 2.39 |
| 多孔菌科 Polyporaceae | 8 | 14 | 6.70 | 蜡蘑属 Laccaria | 5 | 2.39 |
| 红菇科 Russulaceae | 3 | 23 | 11.00 | 小皮伞属 Marasmius | 6 | 2.87 |
| 小菇属 Mycena | 11 | 5.26 | ||||
| 光柄菇属 Pluteus | 5 | 2.39 | ||||
| 红菇属 Russula | 17 | 8.13 | ||||
| 栓菌属 Trametes | 5 | 2.39 |
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