1State Key Laboratory of Quantum Optics and Quantum Optics Devices, Institute of Laser Spectroscopy, Shanxi University, Taiyuan 030006, Shanxi, China.
2Collaborative Innovation Center of Extreme Optics, Shanxi University, Taiyuan 030006, Shanxi, China.
3School of Electrical and Electronic Engineering, Nanyang Technological University, Singapore 639798, Singapore.
4Center of Nano Energy and Devices, College of Information and Computer, Taiyuan University of Technology, Taiyuan 030024, Shanxi, China.
5Department of Microsystems, University of South-Eastern Norway, BorreN-3184, Norway.
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