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Development of Diamond Semiconductor Materials
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Weiguo DONG1, Jiaqi LIU1, Zhaobin ZHANG1, Xin KONG2, 3, Xihui CUI2, 3, Duanwei HE1
Chinese Journal of High Pressure Physics | 2026, 40(9) : 090107-1 - 090107-18
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Chinese Journal of High Pressure Physics | 2026, 40(9): 090107-1-090107-18
• Carbon under High Pressure •
Development of Diamond Semiconductor Materials
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Weiguo DONG1, Jiaqi LIU1, Zhaobin ZHANG1, Xin KONG2, 3, Xihui CUI2, 3, Duanwei HE1
Affiliations
  • 1Institute of Atomic and Molecular Physics, Sichuan University, Chengdu 610065, Sichuan, China
  • 2The 29th Research Institute, China Electronics Technology Group Corporation, Chengdu 610036, Sichuan, China
  • 3Sichuan Engineering Research Center for High-Density Integration of Broadband Microwave Circuits, Chengdu 610036, Sichuan, China
Published: 2026-09-05 doi: 10.11858/gywlxb.20261113
Outline
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Diamond has emerged as a quintessential representative of next-generation semiconductor materials, owing to its ultra-wide bandgap, exceptional thermal conductivity, high breakdown field strength, and outstanding carrier mobility. It has thus attracted extensive attention from fields such as power electronics, radio-frequency communications, and quantum information technologies. Intrinsic single-crystal diamond serves as the foundational substrate for diamond semiconductor development, requiring impurity concentrations at the parts per billion (ppb) level and extremely low dislocation densities. While the high-pressure high-temperature (HPHT) method yields material of higher purity and superior crystal quality, its utility is limited by small crystal dimensions. Consequently, HPHT-grown diamond is frequently employed as a substrate for chemical vapour deposition (CVD) homoepitaxy, enabling the preparation of large-area, high-quality single crystals. Regarding doping, the boron (B) atom, with a size difference of merely 6.5% compared to carbon (C), readily incorporates into the diamond lattice, facilitating the production of high-performance p-type diamond. Related devices, such as Schottky barrier diodes, have been successfully demonstrated. In contrast, n-type doping presents a fundamental challenge: potential dopants like phosphorus (P) and sulphur (S) possess atomic radii 35%–57% larger than carbon, making their incorporation and activation within the lattice exceedingly difficult. The ultra-high pressure and high-temperature diffusion method, which modulates this atomic size disparity under extreme pressures (e.g., about 15 GPa), emerges as a promising new pathway towards achieving shallow-level n-type doping. Concerning surface terminations, hydrogen termination induces a high-mobility two-dimensional hole gas (2DHG), whilst oxygen termination enhances interface stability and provides chemical passivation. However, their thermal stability windows (approximately 400 and 600 ℃, respectively) remain inferior to those of substitutionally doped diamond, limiting their application in high-temperature and high-frequency devices. Therefore, breakthroughs in n-type doping, enhanced thermal stability of surface terminations, and the development of large-area, cost-effective fabrication processes are critical to advancing diamond semiconductor technology towards commercialisation in power electronics, quantum technologies, and high-performance sensing. This review aims to analyse and discuss these pivotal issues, exploring both the prospects and the persistent challenges facing diamond semiconductor development.

diamond semiconductors  /  chemical vapor deposition  /  high temperature and high pressure  /  n-type doping
董卫国, 刘嘉琪, 张钊斌, 孔欣, 崔西会, 贺端威. 金刚石半导体材料的发展. 高压物理学报, 2026 , 40 (9) : 090107-1 -090107-18 . DOI: 10.11858/gywlxb.20261113
Weiguo DONG, Jiaqi LIU, Zhaobin ZHANG, Xin KONG, Xihui CUI, Duanwei HE. Development of Diamond Semiconductor Materials[J]. Chinese Journal of High Pressure Physics, 2026 , 40 (9) : 090107-1 -090107-18 . DOI: 10.11858/gywlxb.20261113
Year 2026 volume 40 Issue 9
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4
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doi: 10.11858/gywlxb.20261113
  • Receive Date:2026-06-11
  • Online Date:2026-11-05
  • Published:2026-09-05
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  • Received:2026-06-11
  • Revised:2026-08-11
  • Accepted:2026-08-24
Affiliations
    1Institute of Atomic and Molecular Physics, Sichuan University, Chengdu 610065, Sichuan, China
    2The 29th Research Institute, China Electronics Technology Group Corporation, Chengdu 610036, Sichuan, China
    3Sichuan Engineering Research Center for High-Density Integration of Broadband Microwave Circuits, Chengdu 610036, Sichuan, China
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表12种不同金属材料的力学参数
科
Family
属数
Number of
genus
种数
Number of
species
占总种数比例
Percentage of
total species (%)
属
Genus
种数
Number of
species
占总种数比例
Percentage of total
species (%)
鹅膏菌科Amanitaceae 2 11 5.26 鹅膏菌属 Amanita 10 4.78
小菇科 Mycenaceae 2 12 5.74 丝盖伞属 Inocybe 5 2.39
多孔菌科 Polyporaceae 8 14 6.70 蜡蘑属 Laccaria 5 2.39
红菇科 Russulaceae 3 23 11.00 小皮伞属 Marasmius 6 2.87
小菇属 Mycena 11 5.26
光柄菇属 Pluteus 5 2.39
红菇属 Russula 17 8.13
栓菌属 Trametes 5 2.39
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