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Research on Piezoresistance Sensitivity of Yb Film Sensor
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Lin TENG, Bang-Chao YANG, Xiao-Song DU, Hong-Ren ZHOU, Hong-Ling CUI, Qing-Guo XIAO
Chinese Journal of High Pressure Physics | 2004, 18(1) : 90 - 93
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Chinese Journal of High Pressure Physics | 2004, 18(1): 90-93
• Research Note •
Research on Piezoresistance Sensitivity of Yb Film Sensor
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Lin TENG, Bang-Chao YANG, Xiao-Song DU, Hong-Ren ZHOU, Hong-Ling CUI, Qing-Guo XIAO
Affiliations
  • College of Microelectronics and Solid-State Electronics, UESTC, Chengdu 610054, China
Published: 2004-03-05
Outline
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Yb film sensor was fabricated by vacuum evaporation technique, and its performance has been studied under the longitudinal quasi-static loading in the range of 1 GPa. The comparison of two group Yb film sensors, one is unheated treatment and the other is heat treatment at 300 ℃ for 1 h in vacuum, indicates that the piezoresistance coefficient of the heated film is larger than not only the unheated, but also the Yb foils. With the analyses of SEM and electric performance, it is discovered that heat treatment helps to grow crystal, decrease the film resistivity and improve the piezoresistance coefficient. XRD analysis reveals that pressure may promote the growth of Yb crystals. Also, after treatment by pressure (≈1 GPa) Yb film sensors are easy to fabricate and have stable performance, which may have extensive usage in industry.

Yb film  /  sensor  /  quasi-static loading  /  piezoresistance coefficient  /  heat treatment  /  XRD spectra
滕林, 杨邦朝, 杜晓松, 周鸿仁, 崔红玲, 肖庆国. 镱薄膜传感器压阻灵敏度的研究. 高压物理学报, 2004 , 18 (1) : 90 -93 .
Lin TENG, Bang-Chao YANG, Xiao-Song DU, Hong-Ren ZHOU, Hong-Ling CUI, Qing-Guo XIAO. Research on Piezoresistance Sensitivity of Yb Film Sensor[J]. Chinese Journal of High Pressure Physics, 2004 , 18 (1) : 90 -93 .
Year 2004 volume 18 Issue 1
19
4
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Article Info
  • Receive Date:2003-07-01
  • Online Date:2026-10-31
  • Published:2004-03-05
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  • Received:2003-07-01
  • Revised:2003-10-17
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    College of Microelectronics and Solid-State Electronics, UESTC, Chengdu 610054, China
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表12种不同金属材料的力学参数
科
Family
属数
Number of
genus
种数
Number of
species
占总种数比例
Percentage of
total species (%)
属
Genus
种数
Number of
species
占总种数比例
Percentage of total
species (%)
鹅膏菌科Amanitaceae 2 11 5.26 鹅膏菌属 Amanita 10 4.78
小菇科 Mycenaceae 2 12 5.74 丝盖伞属 Inocybe 5 2.39
多孔菌科 Polyporaceae 8 14 6.70 蜡蘑属 Laccaria 5 2.39
红菇科 Russulaceae 3 23 11.00 小皮伞属 Marasmius 6 2.87
小菇属 Mycena 11 5.26
光柄菇属 Pluteus 5 2.39
红菇属 Russula 17 8.13
栓菌属 Trametes 5 2.39
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