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Dynamic Piezoresistance Response of Array MnCu Film Gauges
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Lin TENG, Bang-Chao YANG, Xiao-Song DU, Hong-Ren ZHOU, Hong-Ling CUI
Chinese Journal of High Pressure Physics | 2004, 18(3) : 279 - 282
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Chinese Journal of High Pressure Physics | 2004, 18(3): 279-282
• Research Note •
Dynamic Piezoresistance Response of Array MnCu Film Gauges
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Lin TENG, Bang-Chao YANG, Xiao-Song DU, Hong-Ren ZHOU, Hong-Ling CUI
Affiliations
  • College of Microelectronics and Solid-State Electronics, UESTC, Chengdu 610054, China
Published: 2004-09-05
Outline
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Array MnCu film piezoresistance gauges were fabricated by D. C. magnetism sputtering with 99% Al2O3 taken as substrate and insulator. Four MnCu gauges with the same resistance were deposited on one Al2O3 substrate symmetrically. Through dynamic loading experiments at the pressure of 51.72 GPa, it is indicated that four piezoresistance gauges have good consistency, and keep insulating trait under high pressure, which verifies the reliability of dynamic testing of MnCu film piezoresistance gauges.

MnCu film  /  piezoresistance coefficient  /  array  /  heat treatment
滕林, 杨邦朝, 杜晓松, 周鸿仁, 崔红玲. 阵列式薄膜锰铜计的动态压阻响应研究. 高压物理学报, 2004 , 18 (3) : 279 -282 .
Lin TENG, Bang-Chao YANG, Xiao-Song DU, Hong-Ren ZHOU, Hong-Ling CUI. Dynamic Piezoresistance Response of Array MnCu Film Gauges[J]. Chinese Journal of High Pressure Physics, 2004 , 18 (3) : 279 -282 .
Year 2004 volume 18 Issue 3
29
5
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  • Receive Date:2003-09-15
  • Online Date:2026-10-31
  • Published:2004-09-05
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  • Received:2003-09-15
  • Revised:2003-12-22
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    College of Microelectronics and Solid-State Electronics, UESTC, Chengdu 610054, China
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表12种不同金属材料的力学参数
科
Family
属数
Number of
genus
种数
Number of
species
占总种数比例
Percentage of
total species (%)
属
Genus
种数
Number of
species
占总种数比例
Percentage of total
species (%)
鹅膏菌科Amanitaceae 2 11 5.26 鹅膏菌属 Amanita 10 4.78
小菇科 Mycenaceae 2 12 5.74 丝盖伞属 Inocybe 5 2.39
多孔菌科 Polyporaceae 8 14 6.70 蜡蘑属 Laccaria 5 2.39
红菇科 Russulaceae 3 23 11.00 小皮伞属 Marasmius 6 2.87
小菇属 Mycena 11 5.26
光柄菇属 Pluteus 5 2.39
红菇属 Russula 17 8.13
栓菌属 Trametes 5 2.39
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