Full
PENG Qiang (1997-), male, Undergraduate. E-mail: 1017846617@qq.com
Outline
The threading dislocation density (TDD) in Si-based Ge films prepared via the epitaxial growth is rather high due to 4.2% lattice mismatch between Si and Ge, leading to a large dark current of the device. However, the low-temperature Ge/Si wafer bonding can lower the TDD in Ge film by restraining the propagation of the misfit dislocations, exhibiting an enormous potential in the fabrication of high-quality large-misfit film. The oxide layer at Ge/Si bonded interface produced via hydrophilic reaction could affect the performance of Ge/Si heterojunction. In this work, a carrier non-local quantum tunneling model was proposed at Ge/Si bonded interface based on the carrier basic equation. The effect of the oxide layer thickness (dO) at Ge/Si bonded interface on the dark current, total current, spectrum response, and bandwidth was investigated and the influencing mechanism of heterojunction performance was clarified by the introduction of the semi-classical approximate solution. It is indicated that the carrier blocking effect of the oxide layer becomes serious as the dO increases, leading to the decrease of the dark current, total current, and spectrum response. In addition, the dO in Ge layer decreases due to the increase of the electric field in the oxide layer, leading to the decrease of the carrier velocity and the high-frequency characteristic. In order to ensure the excellent photoelectric property of Ge/Si heterojunction, the dO should be limited to be <0.50 nm.
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| 科 Family | 属数 Number of genus | 种数 Number of species | 占总种数比例 Percentage of total species (%) | 属 Genus | 种数 Number of species | 占总种数比例 Percentage of total species (%) |
|---|---|---|---|---|---|---|
| 鹅膏菌科Amanitaceae | 2 | 11 | 5.26 | 鹅膏菌属 Amanita | 10 | 4.78 |
| 小菇科 Mycenaceae | 2 | 12 | 5.74 | 丝盖伞属 Inocybe | 5 | 2.39 |
| 多孔菌科 Polyporaceae | 8 | 14 | 6.70 | 蜡蘑属 Laccaria | 5 | 2.39 |
| 红菇科 Russulaceae | 3 | 23 | 11.00 | 小皮伞属 Marasmius | 6 | 2.87 |
| 小菇属 Mycena | 11 | 5.26 | ||||
| 光柄菇属 Pluteus | 5 | 2.39 | ||||
| 红菇属 Russula | 17 | 8.13 | ||||
| 栓菌属 Trametes | 5 | 2.39 |
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