Full
ZHU Bailin (1977-), male, Professor. E-mail: blzhu@wust.edu.cn
Outline
F-doped SnO2 (FTO) thin films with the thickness of 20-400 nm were prepared via reactive magnetron sputtering at 150-300 ℃ using Sn+SnF2 as a target, and the prepared FTO films were further treated by ultraviolet (UV) irradiation. The effects of film thickness and UV irradiation time on the structural, optical and electrical properties of FTO films were investigated. The results show that the crystallinity of FTO films improves and the preferred orientation remains (211) plane with the increase of film thickness or substrate temperature. Meanwhile, the compressive stress existed in the films increases and the conductive properties of films degrade. The transmittance of the films firstly decreases and then increases, and their energy gap (Eg) firstly increases and then becomes stable when the film thickness increases. Increasing substrate temperature can increase the transmittance and Eg of the films. UV irradiation can increase the carrier concentration of the films, thus enhancing the conductive properties of the film, but it has little effect on the transmittance of the film. In addition, the influence of film thickness on the structural, optical and electrical properties of FTO films was discussed, and the mechanism of improving the optical and electrical properties of FTO film by UV irradiation was analyzed. This study could provide a reference for the preparation of FTO thin films by magnetron sputtering technology and the improvement of their properties.
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| 科 Family | 属数 Number of genus | 种数 Number of species | 占总种数比例 Percentage of total species (%) | 属 Genus | 种数 Number of species | 占总种数比例 Percentage of total species (%) |
|---|---|---|---|---|---|---|
| 鹅膏菌科Amanitaceae | 2 | 11 | 5.26 | 鹅膏菌属 Amanita | 10 | 4.78 |
| 小菇科 Mycenaceae | 2 | 12 | 5.74 | 丝盖伞属 Inocybe | 5 | 2.39 |
| 多孔菌科 Polyporaceae | 8 | 14 | 6.70 | 蜡蘑属 Laccaria | 5 | 2.39 |
| 红菇科 Russulaceae | 3 | 23 | 11.00 | 小皮伞属 Marasmius | 6 | 2.87 |
| 小菇属 Mycena | 11 | 5.26 | ||||
| 光柄菇属 Pluteus | 5 | 2.39 | ||||
| 红菇属 Russula | 17 | 8.13 | ||||
| 栓菌属 Trametes | 5 | 2.39 |
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