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Dynamic Evolution Behavior and Kinematic Characteristics of Each Pits on (111) Crystal Face of CaF2 Crystals
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Gang TANG1, 2, 3, Bo Zhang3, Mengjun LI3, 4, Yongzhe WANG3, Huamin KOU3, Jingya WANG3, Zhonghan ZHANG3, Dapeng JIANG3, Liangbi SU1, 2, 3
Journal of the Chinese Ceramic Society | 2023, 51(6) : 1381 - 1389
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Journal of the Chinese Ceramic Society | 2023, 51(6): 1381-1389
• Research Articles •
Dynamic Evolution Behavior and Kinematic Characteristics of Each Pits on (111) Crystal Face of CaF2 Crystals
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Gang TANG1, 2, 3, Bo Zhang3, Mengjun LI3, 4, Yongzhe WANG3, Huamin KOU3, Jingya WANG3, Zhonghan ZHANG3, Dapeng JIANG3, Liangbi SU1, 2, 3
Affiliations
  • 1.School of Physics and Materials, Nanchang University, Nanchang 330031, China
  • 2.Ganjiang Innovation Academy, Chinese Academy of Sciences, Ganzhou 341001, Jiangxi, China
  • 3.Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 201899, China
  • 4.Shanghai University of Electric Power, Shanghai 200090, China

    • TANG Gang (1997-), male, Master candidate. E-mail:

About Author:

TANG Gang (1997-), male, Master candidate. E-mail:

Published: 2023-06-20 doi: 10.14062/j.issn.0454-5648.20230015
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The application of CaF2 crystal in photolithographic machine becomes a hot research topic. However, differentdefects in the crystal seriously restrict its actual performance. In this paper, the morphological and spatial extension characteristics of etch pits formed by the crystal face (111) of CaF2 crystal were observed, and the corresponding defect characteristics of various etch pits were analyzed, which is aprerequisite for the accurate characterization and control of crystal defects. The results show that the etch pits on the crystal face (111) of CaF2 have three types, i.e., triangular conical pit, cone-flat bottom pit and flat bottom pit. Triangular conical pits and cone-flat bottom pits have directional movement characteristics, indicating that the corresponding defects of these pits are related to the dislocations of the materials. However, there is no spatial extension in the flat bottom pit, which is formed after the defects are completely corroded, and the corresponding defects may be the remains of local defects such as impurities, vacancies and small dislocation rings. The physical parameters of the formation process of the etch pit are obtained, and the kinematic model of the etch pit is establishedby tracking the evolution process of the etch pit in real time. This work provides a basis for further studiesonthe corrosion theory of crystal materials.

calcium fluoride crystal  /  (111) surface  /  defects  /  dislocation  /  etch pit
汤港, 张博, 李梦君, 王墉哲, 寇华敏, 王静雅, 张中晗, 姜大朋, 苏良碧. CaF2晶体(111)晶面腐蚀坑的动态演变行为与运动学特性. 硅酸盐学报, 2023 , 51 (6) : 1381 -1389 . DOI: 10.14062/j.issn.0454-5648.20230015
Gang TANG, Bo Zhang, Mengjun LI, Yongzhe WANG, Huamin KOU, Jingya WANG, Zhonghan ZHANG, Dapeng JIANG, Liangbi SU. Dynamic Evolution Behavior and Kinematic Characteristics of Each Pits on (111) Crystal Face of CaF2 Crystals[J]. Journal of the Chinese Ceramic Society, 2023 , 51 (6) : 1381 -1389 . DOI: 10.14062/j.issn.0454-5648.20230015
Appendix
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Year 2023 volume 51 Issue 6
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Article Info
doi: 10.14062/j.issn.0454-5648.20230015
  • Receive Date：2023-01-11
  • Online Date：2026-10-20
  • Published：2023-06-20
Article Data
Affiliations
History
  • Received：2023-01-11
  • Revised：2023-02-09
Funding
Affiliations
    1.School of Physics and Materials, Nanchang University, Nanchang 330031, China
    2.Ganjiang Innovation Academy, Chinese Academy of Sciences, Ganzhou 341001, Jiangxi, China
    3.Shanghai Institute of Ceramics, Chinese Academy of Sciences, Shanghai 201899, China
    4.Shanghai University of Electric Power, Shanghai 200090, China

Corresponding:

SU Liangbi (1979-), male, Professor. E-mail:
ZHANG Bo (1986-), female, Assistant Research fellow.
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表12种不同金属材料的力学参数
科
Family		 属数
Number of
genus		 种数
Number of
species		 占总种数比例
Percentage of
total species (%)		 属
Genus		 种数
Number of
species		 占总种数比例
Percentage of total
species (%)
鹅膏菌科Amanitaceae 2 11 5.26 鹅膏菌属 Amanita 10 4.78
小菇科 Mycenaceae 2 12 5.74 丝盖伞属 Inocybe 5 2.39
多孔菌科 Polyporaceae 8 14 6.70 蜡蘑属 Laccaria 5 2.39
红菇科 Russulaceae 3 23 11.00 小皮伞属 Marasmius 6 2.87
小菇属 Mycena 11 5.26
光柄菇属 Pluteus 5 2.39
红菇属 Russula 17 8.13
栓菌属 Trametes 5 2.39
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