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YAG Crystal Lapping Process and Subsurface Damage After Lapping
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Rongguo MA1, 2, 3, Qingli ZHANG1, 3, Jinyun GAO1, 3, Guihua SUN1, 3, Renqin DOU1, 3, Song HAN1, 3, Rui ZHANG1, 3, Zhao CHEN1, 2, 3, Xiaofei WANG1, 3, Deming ZHANG1, 3, Yu SUN1, 3, Wenpeng LIU1, 3
Journal of the Chinese Ceramic Society | 2023, 51(3) : 767 - 774
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Journal of the Chinese Ceramic Society | 2023, 51(3): 767-774
• Research Articles •
YAG Crystal Lapping Process and Subsurface Damage After Lapping
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Rongguo MA1, 2, 3, Qingli ZHANG1, 3, Jinyun GAO1, 3, Guihua SUN1, 3, Renqin DOU1, 3, Song HAN1, 3, Rui ZHANG1, 3, Zhao CHEN1, 2, 3, Xiaofei WANG1, 3, Deming ZHANG1, 3, Yu SUN1, 3, Wenpeng LIU1, 3
Affiliations
  • 1.The Key Laboratory of Photonic Devices and Materials of Anhui Province, Anhui Institute of Optics and Fine Mechanics, Hefei Institutes of Physical Science, Chinese Academy of Sciences, Hefei 230031, China
  • 2.University of Science and Technology of China, Hefei 230026, China
  • 3.Advanced Laser Technology Laboratory of Anhui Province, Hefei 230037, China
  • MA Rongguo (1997-), male, Doctoral candidate. E-mail:

About Author:

MA Rongguo (1997-), male, Doctoral candidate. E-mail:

Published: 2023-03-20 doi: 10.14062/j.issn.0454-5648.20220932
Outline
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YAG crystal is a typical hard and brittle material with Mohs hardness of 8.5 and insoluble in any acid or base at room temperature, so it is difficult to process. A step-by-step lapping process is proposed in order to explore lapping processing of YAG crystals in this paper. Based on the method of free abrasive lapping, the particle size of boron carbide (B4C) abrasive was reduced step by step during the lapping process, and abrasive W40, abrasive W28, abrasive W14 and abrasive W7 abrasives were selected for lapping in steps, and the particle size ranges of the four abrasive abrasives were: 40-28 μm, 28-20 μm, 14-10 μm, and 7-5 μm in order. The effect of the lapping pressure, the rotational speed of the lapping disc and pendulum, and the B4C mass fraction in the lapping solution on the lapping effect in each lapping step was investigated, and the optimal lapping parameters were derived; the depth of subsurface damage after lapping of YAG crystals was measured by cross-section microscopy method to determine the amount of subsequent polishing removal, and the relationship between the depth of subsurface damage hSSD and the surface roughness Ra after lapping was investigated. The study showed that the best lapping results were obtained for each lapping step when the lapping pressure was 44.54 kPa, the rotational speed of the lapping disc and pendulum was 60 r/min, and the B4C mass fraction in the lapping solution was 15%. The material removal rates of abrasive W40, abrasive W28, abrasive W14 and abrasive W7 lapping were 83.12, 57.32, 27.54 and 9.53 μm/min, respectively, and the surface roughness after lapping was 0.763, 0.489, 0.264, and 0.142 μm, respectively. The subsurface damage of the step-by-step lapping was 3.041 μm, which were measured by cross-section microscopy method, and needed to be removed by the subsequent polishing; The relationship between subsurface damage depth and surface roughness of YAG crystals after lapping with this lapping parameter is hSSD=41.46×Ra4/3. The study can provide guidance for the actual processing and production of YAG crystal components.

yttrium aluminum garnet crystal  /  lapping  /  subsurface damage  /  material removal rate  /  surface roughness
马荣国, 张庆礼, 高进云, 孙贵花, 窦仁勤, 韩松, 张瑞, 陈照, 王小飞, 张德明, 孙彧, 刘文鹏. YAG晶体研磨工艺与研磨后亚表面损伤研究. 硅酸盐学报, 2023 , 51 (3) : 767 -774 . DOI: 10.14062/j.issn.0454-5648.20220932
Rongguo MA, Qingli ZHANG, Jinyun GAO, Guihua SUN, Renqin DOU, Song HAN, Rui ZHANG, Zhao CHEN, Xiaofei WANG, Deming ZHANG, Yu SUN, Wenpeng LIU. YAG Crystal Lapping Process and Subsurface Damage After Lapping[J]. Journal of the Chinese Ceramic Society, 2023 , 51 (3) : 767 -774 . DOI: 10.14062/j.issn.0454-5648.20220932
Year 2023 volume 51 Issue 3
32
6
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Article Info
doi: 10.14062/j.issn.0454-5648.20220932
  • Receive Date:2022-10-30
  • Online Date:2026-10-20
  • Published:2023-03-20
Article Data
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History
  • Received:2022-10-30
  • Revised:2022-11-27
Funding
Affiliations
    1.The Key Laboratory of Photonic Devices and Materials of Anhui Province, Anhui Institute of Optics and Fine Mechanics, Hefei Institutes of Physical Science, Chinese Academy of Sciences, Hefei 230031, China
    2.University of Science and Technology of China, Hefei 230026, China
    3.Advanced Laser Technology Laboratory of Anhui Province, Hefei 230037, China

Corresponding:

ZHANG Qingli (1973-), male, Ph.D., Professor. E-mail:
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表12种不同金属材料的力学参数
科
Family
属数
Number of
genus
种数
Number of
species
占总种数比例
Percentage of
total species (%)
属
Genus
种数
Number of
species
占总种数比例
Percentage of total
species (%)
鹅膏菌科Amanitaceae 2 11 5.26 鹅膏菌属 Amanita 10 4.78
小菇科 Mycenaceae 2 12 5.74 丝盖伞属 Inocybe 5 2.39
多孔菌科 Polyporaceae 8 14 6.70 蜡蘑属 Laccaria 5 2.39
红菇科 Russulaceae 3 23 11.00 小皮伞属 Marasmius 6 2.87
小菇属 Mycena 11 5.26
光柄菇属 Pluteus 5 2.39
红菇属 Russula 17 8.13
栓菌属 Trametes 5 2.39
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