Home Journals Articles Updates About
CN
image
收藏切换
Effect of Carbon Source Incident Angle on Structure and Properties of Ultrathin Tetrahedral Amorphous Carbon Films
收藏切换
Kun DANG2, Hua WANG2, Weiqian CHEN1, 2, Yuhong LI2, Shipeng XU1, 2
Journal of the Chinese Ceramic Society | 2022, 50(5) : 1385 - 1390
Less
收藏切换
Journal of the Chinese Ceramic Society | 2022, 50(5): 1385-1390
• Research Articles •
Effect of Carbon Source Incident Angle on Structure and Properties of Ultrathin Tetrahedral Amorphous Carbon Films
Full
Kun DANG2, Hua WANG2, Weiqian CHEN1, 2, Yuhong LI2, Shipeng XU1, 2
Affiliations
  • 1.State Key Laboratory of Advanced Processing and Recycling of Nonferrous Metals, Lanzhou University of Technology, Lanzhou 730050, China
  • 2.Key Laboratory of Solar Power System Engineering, Gansu Province, Jiuquan Vocational and Technical College, Jiuquan 735000, Gansu, China

    • DANG Kun (1987-), male, Lecturer. E-mail:

About Author:

DANG Kun (1987-), male, Lecturer. E-mail:

Published: 2022-05-20 doi: 10.14062/j.issn.0454-5648.20210403
Outline
收藏切换

The tetrahedral amorphous carbon (ta-C) films were fabricated by 45° double-bent filtered cathodic vacuum arc technique, and the wettability, surface energy, roughness, surface topography, friction coefficient and microstructure evolution of ultrathin ta-C film as functions of incident angles of carbon ions were investigated. The results reveal that as the incident angle of carbon ions increases from 0° to 60°, the water contact angle of films slightly increases from 77.6° to 82.4° and the glycerin contact angle of films slightly increases from 64.7° to 71.2°, indicating that all the films are hydrophilic. The total surface energy decreases from 33.9 mJ/m2 to 28.0 mJ/m2. The slight increase of observed contact angle is attributed to the decrease of surface energy and increase of surface roughness. Also, the average friction coefficient increases from 0.140 to 0.217. According to the near edge X-ray absorption fine structure data, little change for the hybridized sp3 bond content in the deposited ta-C films appears, regardless of the change of incident angle in a range of 0°-60°.

tetrahedral amorphous carbon films  /  incident angles of carbon ions  /  microstructure  /  wettability  /  surface topography
党坤, 王华, 陈维铅, 李玉宏, 许世鹏. 碳源入射角对超薄四面体非晶碳膜结构和性能的影响. 硅酸盐学报, 2022 , 50 (5) : 1385 -1390 . DOI: 10.14062/j.issn.0454-5648.20210403
Kun DANG, Hua WANG, Weiqian CHEN, Yuhong LI, Shipeng XU. Effect of Carbon Source Incident Angle on Structure and Properties of Ultrathin Tetrahedral Amorphous Carbon Films[J]. Journal of the Chinese Ceramic Society, 2022 , 50 (5) : 1385 -1390 . DOI: 10.14062/j.issn.0454-5648.20210403
Appendix
Less
Year 2022 volume 50 Issue 5
17
0
Cite this Article
BibTeX
Article Info
doi: 10.14062/j.issn.0454-5648.20210403
  • Receive Date：2021-05-21
  • Online Date：2026-10-22
  • Published：2022-05-20
Article Data
Affiliations
History
  • Received：2021-05-21
  • Revised：2021-08-11
Funding
Affiliations
    1.State Key Laboratory of Advanced Processing and Recycling of Nonferrous Metals, Lanzhou University of Technology, Lanzhou 730050, China
    2.Key Laboratory of Solar Power System Engineering, Gansu Province, Jiuquan Vocational and Technical College, Jiuquan 735000, Gansu, China

Corresponding:

XU Shipeng (1987-), male, Ph.D., Associate Professor. E-mail:
References
Share
https://castjournals.cast.org.cn/joweb/gsyxb/EN/10.14062/j.issn.0454-5648.20210403
Share to
QR

Scan QR to access full text

Cite this article
BibTeX
Citations
表12种不同金属材料的力学参数
科
Family		 属数
Number of
genus		 种数
Number of
species		 占总种数比例
Percentage of
total species (%)		 属
Genus		 种数
Number of
species		 占总种数比例
Percentage of total
species (%)
鹅膏菌科Amanitaceae 2 11 5.26 鹅膏菌属 Amanita 10 4.78
小菇科 Mycenaceae 2 12 5.74 丝盖伞属 Inocybe 5 2.39
多孔菌科 Polyporaceae 8 14 6.70 蜡蘑属 Laccaria 5 2.39
红菇科 Russulaceae 3 23 11.00 小皮伞属 Marasmius 6 2.87
小菇属 Mycena 11 5.26
光柄菇属 Pluteus 5 2.39
红菇属 Russula 17 8.13
栓菌属 Trametes 5 2.39
关闭全屏
  • BibTeX
  • EndNote
  • RefWorks
  • TxT
Links
Articles
Latest Articles
Most Read
Collections
Updates
Events
News
Multimedia
About
About Us
Contact
No. 86 Xueyuan South Road, Haidian District, Beijing
100081
010-62662699(Operation and Technical Support)
qkjq@cast.org.cn

Copyright © 2025 China Association for Science and Technology. All rights reserved. For all open access content, the relevant licensing terms apply.
Sponsored by the Office of the Leading Group for Cybersecurity and Informatization of CAST, and supported by Science and Technology Review Publishing House