Home Journals Articles Updates About
CN
image
收藏切换
Preparation and Tribological Properties of Diamond-Like-Carbon/CNx Multilayer Films With Symmetrical Nitrogen-Content Gradient
收藏切换
Fanger YANG1, Manbin GAO1, Ji ZHANG2, Xiaohua ZHENG1
Journal of the Chinese Ceramic Society | 2021, 49(10) : 2154 - 2163
Less
收藏切换
Journal of the Chinese Ceramic Society | 2021, 49(10): 2154-2163
Preparation and Tribological Properties of Diamond-Like-Carbon/CNx Multilayer Films With Symmetrical Nitrogen-Content Gradient
Full
Fanger YANG1, Manbin GAO1, Ji ZHANG2, Xiaohua ZHENG1
Affiliations
  • 1.College of Materials Science and Engineering, Zhejiang University of Technology, Hangzhou 310014, China
  • 2.Zhejiang-California International Nanosystems Institute, Zhejiang University, Hangzhou 310058, China

    • YANG Fanger (1962-), female, Professor. E-mail:

About Author:

YANG Fanger (1962-), female, Professor. E-mail:

Published: 2021-10-20 doi: 10.14062/j.issn.0454-5648.20210220
Outline
收藏切换

Diamond-like-carbon (DLC)/N-gradient CNx nano-multilayer films with different thicknesses of nitrogen-content gradient CNx layers were prepared on silicon substrate via direct-current magnetron sputtering, in which the nitrogen-content gradient appears in an inverted "U" shape. The microstructure, surface morphology, mechanical and tribological properties in vacuum and air were characterized by X-ray diffraction, scanning electron microscopy, atomic force microscopy, Raman spectroscopy, X-ray photoelectron spectroscopy, scratch testing and ball-on-disk wear tests. The results show that the surface of the multilayer films is smooth and all of them are amorphous. The hardness, elastic modulus, and adhesion of the multilayer films gradually decrease, and the surface roughness and wear rate increase with the increase of N-content gradient CNx layer thickness. The wear resistance of the multilayer films is better in vacuum rather than in air. The multilayer film with a CNx layer thickness of less than 30 nm exhibits a hardness in the range of 21.9-23.1 GPa, an interface adhesion in the range of 54.2-54.3 N, a friction coefficient of approximately 0.19 in air and 0.18 in vacuum, and a wear rate in the range of (0.98-1.16)×10-16 m3/(N·m) in air and (0.83-0.88)×10-16 m3/(N·m) in vacuum.

diamond-like-carbon  /  carbon nitride  /  multilayer film  /  gradient  /  magnetron sputtering
杨芳儿, 高蔓斌, 张继, 郑晓华. 类金刚石/对称N-梯度CNx多层膜的制备及摩擦性能. 硅酸盐学报, 2021 , 49 (10) : 2154 -2163 . DOI: 10.14062/j.issn.0454-5648.20210220
Fanger YANG, Manbin GAO, Ji ZHANG, Xiaohua ZHENG. Preparation and Tribological Properties of Diamond-Like-Carbon/CNx Multilayer Films With Symmetrical Nitrogen-Content Gradient[J]. Journal of the Chinese Ceramic Society, 2021 , 49 (10) : 2154 -2163 . DOI: 10.14062/j.issn.0454-5648.20210220
Appendix
Less
Year 2021 volume 49 Issue 10
24
6
Cite this Article
BibTeX
Article Info
doi: 10.14062/j.issn.0454-5648.20210220
  • Receive Date：2021-04-01
  • Online Date：2026-10-30
  • Published：2021-10-20
Article Data
Affiliations
History
  • Received：2021-04-01
  • Revised：2021-06-13
Funding
Affiliations
    1.College of Materials Science and Engineering, Zhejiang University of Technology, Hangzhou 310014, China
    2.Zhejiang-California International Nanosystems Institute, Zhejiang University, Hangzhou 310058, China

Corresponding:

ZHENG Xiaohua (1971-), male, Ph.D., Associate Professor. E-mail:
References
Share
https://castjournals.cast.org.cn/joweb/gsyxb/EN/10.14062/j.issn.0454-5648.20210220
Share to
QR

Scan QR to access full text

Cite this article
BibTeX
Citations
表12种不同金属材料的力学参数
科
Family		 属数
Number of
genus		 种数
Number of
species		 占总种数比例
Percentage of
total species (%)		 属
Genus		 种数
Number of
species		 占总种数比例
Percentage of total
species (%)
鹅膏菌科Amanitaceae 2 11 5.26 鹅膏菌属 Amanita 10 4.78
小菇科 Mycenaceae 2 12 5.74 丝盖伞属 Inocybe 5 2.39
多孔菌科 Polyporaceae 8 14 6.70 蜡蘑属 Laccaria 5 2.39
红菇科 Russulaceae 3 23 11.00 小皮伞属 Marasmius 6 2.87
小菇属 Mycena 11 5.26
光柄菇属 Pluteus 5 2.39
红菇属 Russula 17 8.13
栓菌属 Trametes 5 2.39
关闭全屏
  • BibTeX
  • EndNote
  • RefWorks
  • TxT
Links
Articles
Latest Articles
Most Read
Collections
Updates
Events
News
Multimedia
About
About Us
Contact
No. 86 Xueyuan South Road, Haidian District, Beijing
100081
010-62662699(Operation and Technical Support)
qkjq@cast.org.cn

Copyright © 2025 China Association for Science and Technology. All rights reserved. For all open access content, the relevant licensing terms apply.
Sponsored by the Office of the Leading Group for Cybersecurity and Informatization of CAST, and supported by Science and Technology Review Publishing House