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Growth and Optical Properties of In-rich Al1-xInxN Films by Radio-Frequency Magnetron Sputtering
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Jianjin CHEN, Dongli QI, Jun LIU, Xiang LI, Jianyu SONG, Longhai SHEN
Journal of the Chinese Ceramic Society | 2021, 49(9) : 1970 - 1975
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Journal of the Chinese Ceramic Society | 2021, 49(9): 1970-1975
• Research Article •
Growth and Optical Properties of In-rich Al1-xInxN Films by Radio-Frequency Magnetron Sputtering
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Jianjin CHEN, Dongli QI, Jun LIU, Xiang LI, Jianyu SONG, Longhai SHEN
Affiliations
  • School of Science, Shenyang Ligong University, Shenyang 110159, China

    • CHEN Jianjin(1996-), male, Master candidate. E-mail:

About Author:

CHEN Jianjin(1996-), male, Master candidate. E-mail:

Published: 2021-09-20 doi: 10.14062/j.issn.0454-5648.20200837
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The In-rich Al1-xInxN films were grown on Si and quartz substrates by radio-frequency magnetron sputtering. The structures, morphologies, and optical bandgap of as-grown Al1-xInxN films were characterized by X-ray diffraction, scanning electron microscopy, and ultra-violate-visible-near infrared spectroscopy. The photoluminescence (PL) spectra of Al1-xInxN films were measured at room temperature. The Al1-xInxN films have single-phase wurtzite structures with (002) preferred orientation. The In content x was tuned in the range of 0.64-0.76. With increasing the In content x, the Al1-xInxN films exhibit smoother surface morphology and the optical bandgap shows a red-shifted from 1.93 eV to 1.87 eV. The PL emission is dominated by the band edge emission at x = 0.64. The additional emission could be explained by the Burstein-Moss effect when the In content x was increased.

aluminum indium nitrogen films  /  preferred orientation  /  photoluminescence  /  Moss-Burstein effect
陈建金, 齐东丽, 刘俊, 李想, 宋健宇, 沈龙海. 射频磁控溅射制备高In组分Al1-xInxN薄膜及其光学性能. 硅酸盐学报, 2021 , 49 (9) : 1970 -1975 . DOI: 10.14062/j.issn.0454-5648.20200837
Jianjin CHEN, Dongli QI, Jun LIU, Xiang LI, Jianyu SONG, Longhai SHEN. Growth and Optical Properties of In-rich Al1-xInxN Films by Radio-Frequency Magnetron Sputtering[J]. Journal of the Chinese Ceramic Society, 2021 , 49 (9) : 1970 -1975 . DOI: 10.14062/j.issn.0454-5648.20200837
Appendix
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Year 2021 volume 49 Issue 9
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Article Info
doi: 10.14062/j.issn.0454-5648.20200837
  • Receive Date：2020-11-16
  • Online Date：2026-10-30
  • Published：2021-09-20
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History
  • Received：2020-11-16
  • Revised：2021-03-17
Funding
Affiliations
    School of Science, Shenyang Ligong University, Shenyang 110159, China

Corresponding:

SHEN Longhai (1977-), male, Ph.D., Professor. E-mail:
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表12种不同金属材料的力学参数
科
Family		 属数
Number of
genus		 种数
Number of
species		 占总种数比例
Percentage of
total species (%)		 属
Genus		 种数
Number of
species		 占总种数比例
Percentage of total
species (%)
鹅膏菌科Amanitaceae 2 11 5.26 鹅膏菌属 Amanita 10 4.78
小菇科 Mycenaceae 2 12 5.74 丝盖伞属 Inocybe 5 2.39
多孔菌科 Polyporaceae 8 14 6.70 蜡蘑属 Laccaria 5 2.39
红菇科 Russulaceae 3 23 11.00 小皮伞属 Marasmius 6 2.87
小菇属 Mycena 11 5.26
光柄菇属 Pluteus 5 2.39
红菇属 Russula 17 8.13
栓菌属 Trametes 5 2.39
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