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Effects of Deposition Temperature and Pressure on Grain Size and Properties of CVDZnS
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Naiguang WEI, Li GUO, Hai YANG, Xiaohua LIU, Zhirui TIAN, Jiangming LI, Dongxu LI, Lipeng JIANG, Wenjiang LI, Yongtian ZHAO, Jianchun YANG
Journal of the Chinese Ceramic Society | 2020, 48(6) : 925 - 930
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Journal of the Chinese Ceramic Society | 2020, 48(6): 925-930
• Research Paper •
Effects of Deposition Temperature and Pressure on Grain Size and Properties of CVDZnS
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Naiguang WEI, Li GUO, Hai YANG, Xiaohua LIU, Zhirui TIAN, Jiangming LI, Dongxu LI, Lipeng JIANG, Wenjiang LI, Yongtian ZHAO, Jianchun YANG
Affiliations
  • GRIRNM Guojing Advanbced Material Co., Ltd., Sanhe 065201, Hebei, China

    • WEI Naiguang (1980-), male, Professor-level senior Engineer. E-mail:

About Author:

WEI Naiguang (1980-), male, Professor-level senior Engineer. E-mail:

Published: 2020-06-20 doi: 10.14062/j.issn.0454-5648.2020.06.20190594
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CVDZnS samples were prepared by a chemical vapor deposition method at different deposition temperatures (i.e., (650±10), (670±10), (700±10) ℃ and pressures (i.e., (5 000±200), (7 000±200), (9 000±200) Pa as well as a H2S flowrate of (2±1) L/min and an argon flowrate of (35±2) L/min. The CVDZnS samples were analyzed by X-ray diffraction, metallographic microscopy and Fourier transform infrared spectroscopy, microscopic grain morphology and infrared transmittance measurement at 2-15 μm. Based on the XRD characterization, CVDZnS mainly exists in the form of cubic phase with a small amount of hexagonal phase and the preferential orientation of deposition growth is s(111). The metallographic analysis indicates that the average grain size increases with the increase of temperature when the deposition pressure is (5 000±200) and (7 000±200) Pa, and the maximum average longitudinal grain size is 15.5 μm. The bending strength test data show that the ratio of average longitudinal grain size to average transverse grain size is closer to "1", which is more advantageous to increase the bending strength of materials. In addition, the CVDZnS prepared at (670±10) ℃ and (7 000±200) Pa can effectively improve the average transmittance of 2-5 and 7-10 μm (i.e., 72.15%) and reduce the absorption at 6.0 μm.

chemical vapor deposition of zinc sulfide  /  deposition temperature  /  depositional pressure  /  optical properties  /  mechanical properties
魏乃光, 郭立, 杨海, 刘晓华, 田智瑞, 黎建明, 李冬旭, 蒋立朋, 李文江, 赵永田, 杨建纯. 沉积温度、压力对CVDZnS晶粒尺寸及性能的影响. 硅酸盐学报, 2020 , 48 (6) : 925 -930 . DOI: 10.14062/j.issn.0454-5648.2020.06.20190594
Naiguang WEI, Li GUO, Hai YANG, Xiaohua LIU, Zhirui TIAN, Jiangming LI, Dongxu LI, Lipeng JIANG, Wenjiang LI, Yongtian ZHAO, Jianchun YANG. Effects of Deposition Temperature and Pressure on Grain Size and Properties of CVDZnS[J]. Journal of the Chinese Ceramic Society, 2020 , 48 (6) : 925 -930 . DOI: 10.14062/j.issn.0454-5648.2020.06.20190594
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Year 2020 volume 48 Issue 6
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Article Info
doi: 10.14062/j.issn.0454-5648.2020.06.20190594
  • Receive Date：2019-08-29
  • Online Date：2026-10-29
  • Published：2020-06-20
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History
  • Received：2019-08-29
  • Revised：2019-12-09
Funding
Affiliations
    GRIRNM Guojing Advanbced Material Co., Ltd., Sanhe 065201, Hebei, China

Corresponding:

GUO Li (1991-), male, Engineer. E-mail:
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表12种不同金属材料的力学参数
科
Family		 属数
Number of
genus		 种数
Number of
species		 占总种数比例
Percentage of
total species (%)		 属
Genus		 种数
Number of
species		 占总种数比例
Percentage of total
species (%)
鹅膏菌科Amanitaceae 2 11 5.26 鹅膏菌属 Amanita 10 4.78
小菇科 Mycenaceae 2 12 5.74 丝盖伞属 Inocybe 5 2.39
多孔菌科 Polyporaceae 8 14 6.70 蜡蘑属 Laccaria 5 2.39
红菇科 Russulaceae 3 23 11.00 小皮伞属 Marasmius 6 2.87
小菇属 Mycena 11 5.26
光柄菇属 Pluteus 5 2.39
红菇属 Russula 17 8.13
栓菌属 Trametes 5 2.39
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