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Preparation of ITO Targets with Different Sn Contents and Characteristics of Second Phase
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Shuo YANG, Linpu SHI, Bin XIE, Yanfei ZHAO, Haitao ZHOU
Journal of the Chinese Ceramic Society | 2020, 48(6) : 863 - 869
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Journal of the Chinese Ceramic Society | 2020, 48(6): 863-869
• Research Paper •
Preparation of ITO Targets with Different Sn Contents and Characteristics of Second Phase
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Shuo YANG, Linpu SHI, Bin XIE, Yanfei ZHAO, Haitao ZHOU
Affiliations
  • Luoyang Ship Material Research Institue, Luoyang 471023, Henan, China

    • YANG Shuo (1982—), male, Master, Senior Engineer. E-mail:

About Author:

YANG Shuo (1982—), male, Master, Senior Engineer. E-mail:

Published: 2020-06-20 doi: 10.14062/j.issn.0454-5648.20190542
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An ITO green body was prepared via molding-assisted cold isostatic pressing with gasified In2O3 and SnO2 powder (n(In2O3)/n(SnO2)=9∶1). The ITO targets with different Sn contents were sintered in oxygen atmosphere at 1 550 ℃. The target samples were ground and then corrosion products were extracted after sieving and being corroded. The microstructure, phase composition, density and resistivity of the target surface and corrosion products at different Sn contents were analyzed. The results show that the corrosion product is the second phase-In4Sn3O12 of the ITO target. The grain size of the ITO target decreases with the increase of SnO2 content, and the second phase of the grain boundary gradually increases and stabilizes at below 3 μm. The size of small particles in the ITO target increases with the increase of SnO2 content and is stable below 100 nm. The second phase of the target has a trace amount of oxygen loss at the loss rate of 1.1%. The actual and theoretical densities of the target increase with the increase of SnO2 content. The measured density increases from 7.110 to 7.145 g/cm3 and the resistivity of the target increases from 1.3×10-4 to 1.9×10-4 Ω·cm with the increase of SnO2 content.

indium-tin oxide  /  target  /  corrosion product  /  the second phase  /  small particles in grain
杨硕, 师琳璞, 谢斌, 赵延飞, 周海涛. 不同Sn含量氧化铟锡靶材的制备及其第二相特征. 硅酸盐学报, 2020 , 48 (6) : 863 -869 . DOI: 10.14062/j.issn.0454-5648.20190542
Shuo YANG, Linpu SHI, Bin XIE, Yanfei ZHAO, Haitao ZHOU. Preparation of ITO Targets with Different Sn Contents and Characteristics of Second Phase[J]. Journal of the Chinese Ceramic Society, 2020 , 48 (6) : 863 -869 . DOI: 10.14062/j.issn.0454-5648.20190542
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Year 2020 volume 48 Issue 6
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Article Info
doi: 10.14062/j.issn.0454-5648.20190542
  • Receive Date：2019-07-29
  • Online Date：2026-10-29
  • Published：2020-06-20
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History
  • Received：2019-07-29
  • Revised：2019-10-17
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    Luoyang Ship Material Research Institue, Luoyang 471023, Henan, China
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表12种不同金属材料的力学参数
科
Family		 属数
Number of
genus		 种数
Number of
species		 占总种数比例
Percentage of
total species (%)		 属
Genus		 种数
Number of
species		 占总种数比例
Percentage of total
species (%)
鹅膏菌科Amanitaceae 2 11 5.26 鹅膏菌属 Amanita 10 4.78
小菇科 Mycenaceae 2 12 5.74 丝盖伞属 Inocybe 5 2.39
多孔菌科 Polyporaceae 8 14 6.70 蜡蘑属 Laccaria 5 2.39
红菇科 Russulaceae 3 23 11.00 小皮伞属 Marasmius 6 2.87
小菇属 Mycena 11 5.26
光柄菇属 Pluteus 5 2.39
红菇属 Russula 17 8.13
栓菌属 Trametes 5 2.39
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