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Response modeling and failure analysis of MEMS ring gyroscopes under high overload
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Wenqiang WEI1, Jin WANG1, Qi CAI1, Huimin TIAN1, Hongqiao HUANG1, Huiliang CAO2
Journal of Chinese Inertial Technology | 2025, 33(10) : 1034 - 1042
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Journal of Chinese Inertial Technology | 2025, 33(10): 1034-1042
• Inertial Instrument Research and Design •
Response modeling and failure analysis of MEMS ring gyroscopes under high overload
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Wenqiang WEI1, Jin WANG1, Qi CAI1, Huimin TIAN1, Hongqiao HUANG1, Huiliang CAO2
Affiliations
  • 1.School of Instrument and Electronics, North University of China, Taiyuan 030051, China
  • 2.School of Integrated Circuits and Electronics, Beijing Institute of Technology, Beijing 100081, China
Published: 2025-10-30 doi: 10.13695/j.cnki.12-1222/o3.2025.10.010
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Regarding the shock failure of a micro-electro-mechanical system (MEMS) vibrating ring gyroscope (VRG) under high overload, structural dynamic response modeling and failure mechanism analysis are conducted. Based on vibration and elastic wave theories, a dynamic response model of gyroscopic structures to high-g shocks is established. Based on the established dynamic impact response model of the MEMS ring gyroscope, the adhesion and fracture failure mechanisms of the MEMS ring gyroscope are analyzed. The equilibrium displacement for adhesion failure and the sensitive location for fracture failure are derived, and the impact expression at the point of failure is obtained. Through high overload experiments, the impact amplitude and pulse width at the critical failure of the MEMS ring gyroscope a re determined. Raman spectroscopy is used to test the surface stress of the MEMS ring gyroscope after high overload application, and the stress-sensitive locations are found to be consistent with theoretical derivations.

MEMS VRG  /  high overload  /  dynamic response  /  failure mechanism  /  shock experiment
Wenqiang WEI, Jin WANG, Qi CAI, Huimin TIAN, Hongqiao HUANG, Huiliang CAO. Response modeling and failure analysis of MEMS ring gyroscopes under high overload[J]. Journal of Chinese Inertial Technology, 2025 , 33 (10) : 1034 -1042 . DOI: 10.13695/j.cnki.12-1222/o3.2025.10.010
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Year 2025 volume 33 Issue 10
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Article Info
doi: 10.13695/j.cnki.12-1222/o3.2025.10.010
  • Receive Date：2024-05-30
  • Online Date：2026-03-27
  • Published：2025-10-30
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  • Received：2024-05-30
  • Accepted：2025-07-04
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Affiliations
    1.School of Instrument and Electronics, North University of China, Taiyuan 030051, China
    2.School of Integrated Circuits and Electronics, Beijing Institute of Technology, Beijing 100081, China
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表12种不同金属材料的力学参数
科
Family		 属数
Number of
genus		 种数
Number of
species		 占总种数比例
Percentage of
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Genus		 种数
Number of
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Percentage of total
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鹅膏菌科Amanitaceae 2 11 5.26 鹅膏菌属 Amanita 10 4.78
小菇科 Mycenaceae 2 12 5.74 丝盖伞属 Inocybe 5 2.39
多孔菌科 Polyporaceae 8 14 6.70 蜡蘑属 Laccaria 5 2.39
红菇科 Russulaceae 3 23 11.00 小皮伞属 Marasmius 6 2.87
小菇属 Mycena 11 5.26
光柄菇属 Pluteus 5 2.39
红菇属 Russula 17 8.13
栓菌属 Trametes 5 2.39
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