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Analysis of subharmonic vibrations under parametric excitation of electrostatically driven micromirrors
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Xu LI1, 2, Jingjing FENG1, 2, Shuying HAO1, 2, Wenhua HU1, 2
Journal of Vibration Engineering | 2025, 38(2) : 242 - 248
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Journal of Vibration Engineering | 2025, 38(2): 242-248
Analysis of subharmonic vibrations under parametric excitation of electrostatically driven micromirrors
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Xu LI1, 2, Jingjing FENG1, 2, Shuying HAO1, 2, Wenhua HU1, 2
Affiliations
  • 1.Tianjin Key Laboratory for Advanced Mechatronic System Design and Intelligent Control, Tianjin University of Technology, Tianjin 300384, China
  • 2.National Demonstration Center for Experimental Mechanical and Electrical Engineering Education, Tianjin University of Technology, Tianjin 300384, China
Published: 2025-02-10 doi: 10.16385/j.cnki.issn.1004-4523.2025.02.003
Outline
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Parametric vibrations are commonly observed in microelectromechanical systems(MEMS) coupled with multi-physical fields. To study the parametric resonance nonlinear dynamics problems in electrostatically driven micromirror systems, a class of electrostatic comb-driven micromirrors is used as an example to study the parametric resonance response variation of the system under different factors by fitting a seventh-order polynomial to the comb capacitance variation and establishing a micromirror dynamics model. The influence of changes in the micromirror’s structural parameters on the torsion angle under static conditions is investigated. The multi-scale method is applied to analyze how system parameters affect the variation in resonance amplitude during the resonance state, and numerical verification of system parameter resonance is performed. Finally, the stability of subharmonic parametric resonance in the system is analyzed and verified using the Runge-Kutta method. The results show that subharmonic parametric resonance exists in the micromirror system. Factors such as excitation voltage and capacitance fitting parameters can affect the system’s resonance amplitude. Damping can alter the system’s instability region, increase the instability threshold, and influence the occurrence of subharmonic parametric resonance in the system.

nonlinear vibration  /  parametric resonance  /  micromirror  /  multiscale method  /  numerical validation
Xu LI, Jingjing FENG, Shuying HAO, Wenhua HU. Analysis of subharmonic vibrations under parametric excitation of electrostatically driven micromirrors[J]. Journal of Vibration Engineering, 2025 , 38 (2) : 242 -248 . DOI: 10.16385/j.cnki.issn.1004-4523.2025.02.003
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Year 2025 volume 38 Issue 2
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Article Info
doi: 10.16385/j.cnki.issn.1004-4523.2025.02.003
  • Receive Date：2023-03-21
  • Online Date：2026-02-11
  • Published：2025-02-10
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History
  • Received：2023-03-21
  • Revised：2023-05-29
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Affiliations
    1.Tianjin Key Laboratory for Advanced Mechatronic System Design and Intelligent Control, Tianjin University of Technology, Tianjin 300384, China
    2.National Demonstration Center for Experimental Mechanical and Electrical Engineering Education, Tianjin University of Technology, Tianjin 300384, China
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表12种不同金属材料的力学参数
科
Family		 属数
Number of
genus		 种数
Number of
species		 占总种数比例
Percentage of
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Genus		 种数
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鹅膏菌科Amanitaceae 2 11 5.26 鹅膏菌属 Amanita 10 4.78
小菇科 Mycenaceae 2 12 5.74 丝盖伞属 Inocybe 5 2.39
多孔菌科 Polyporaceae 8 14 6.70 蜡蘑属 Laccaria 5 2.39
红菇科 Russulaceae 3 23 11.00 小皮伞属 Marasmius 6 2.87
小菇属 Mycena 11 5.26
光柄菇属 Pluteus 5 2.39
红菇属 Russula 17 8.13
栓菌属 Trametes 5 2.39
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