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In this paper, an improved Surface Acoustic Wave (SAW) temperature and pressure sensor with two chambers is proposed to solve the nonlinear coupling problem in the integrated structure suggested in earlier studies, and the design and experimental study of an acoustic surface wave all quartz pressure sensor is carried out. Based on the finite element method and perturbation theory, the response mechanism of the quartz-based SAW pressure sensor is analyzed, the coupled mode theory is used to optimize the design of the three-resonator-type sensitive element, and the glass paste bonding is used to realize the quartz cross-lead hermetic encapsulation, and the preparation of the SAW allquartz pressure sensor is realized. The test results show that the developed SAW all quartz pressure sensor has a pressure range of 0~500 kPa, a linearity of 0.415% FS, a pressure sensitivity of 551 kHz/MPa, and a temperature coefficient of sensitivity of 0.134% over the operating temperature range of 0 ℃~120 ℃. The development of this surface acoustic wave all quartz pressure sensor lays the foundation for the subsequent realization of wireless passive measurement of the sensor.
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| 科 Family | 属数 Number of genus | 种数 Number of species | 占总种数比例 Percentage of total species (%) | 属 Genus | 种数 Number of species | 占总种数比例 Percentage of total species (%) |
|---|---|---|---|---|---|---|
| 鹅膏菌科Amanitaceae | 2 | 11 | 5.26 | 鹅膏菌属 Amanita | 10 | 4.78 |
| 小菇科 Mycenaceae | 2 | 12 | 5.74 | 丝盖伞属 Inocybe | 5 | 2.39 |
| 多孔菌科 Polyporaceae | 8 | 14 | 6.70 | 蜡蘑属 Laccaria | 5 | 2.39 |
| 红菇科 Russulaceae | 3 | 23 | 11.00 | 小皮伞属 Marasmius | 6 | 2.87 |
| 小菇属 Mycena | 11 | 5.26 | ||||
| 光柄菇属 Pluteus | 5 | 2.39 | ||||
| 红菇属 Russula | 17 | 8.13 | ||||
| 栓菌属 Trametes | 5 | 2.39 |
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