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Design and Implementation of Closed-Loop Signal Conditioning Circuit for Capacitive MEMS Sensors
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Yan ZHANG1, Haifeng ZHANG1, 2, Wenbo ZHANG1, Liang YIN1, 2, Yadan YUE3
Journal of Telemetry, Tracking and Command | 2025, 46(6) : 161 - 170
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Journal of Telemetry, Tracking and Command | 2025, 46(6): 161-170
• MEMS and Sensor •
Design and Implementation of Closed-Loop Signal Conditioning Circuit for Capacitive MEMS Sensors
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Yan ZHANG1, Haifeng ZHANG1, 2, Wenbo ZHANG1, Liang YIN1, 2, Yadan YUE3
Affiliations
  • 1. MEMS Center, Harbin Institute of Technology, Harbin 150001, China
  • 2. Key Laboratory of Micro-Systems and Micro-Structures Manufacturing, Ministry of Education, Harbin 150001, China
  • 3. National Key Laboratory of Science and Technology on Underwater Acoustic Antagonizing, Shanghai 201108, China
doi: 10.12347/j.ycyk.20250709003
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With the development of marine resources and the increasing demand for safety monitoring, the traditional underwater acoustic detection equipment has problems such as large size and difficult deployment. In order to meet the need of high precision underwater acoustic detection, a design method of seismic wave sensor based on micro-electro-mechanical system (MEMS)technology is proposed in this paper. By constructing the second-order dynamic model of the sensitive structure, the fully integrated closed-loop system control is realized by combining the ΣΔ modulator, and the behavior level modeling and non-ideal characteristic simulation optimization are completed by Simulink platform, and the chip integration is realized by 0.5 μm CMOS process. A fully differential precharge amplifier and a correlation double sampling circuit are designed. The test results show that the sensor sensitivity is up to 1.5V/g, the operating bandwidth is 300 Hz, the dynamic range is about 136 dB at 1 Hz bandwidth, the equivalent input noise is as low as 154 ng/√Hz, the nonlinearity is 0.065%, and the bias stability is about 28.2 μg, The FOM value is 204.5 μW·μg/Hz. The high-precision application potential of MEMS technology in the field of underwater acoustic detection is verified, and a miniaturized solution for seismic monitoring and marine environment perception is provided.

MEMS technology  /  Seismic wave sensor  /  Sigma-delta modulator  /  Closed-loop control  /  High-precision
Yan ZHANG, Haifeng ZHANG, Wenbo ZHANG, Liang YIN, Yadan YUE. Design and Implementation of Closed-Loop Signal Conditioning Circuit for Capacitive MEMS Sensors[J]. Journal of Telemetry, Tracking and Command, 2025 , 46 (6) : 161 -170 . DOI: 10.12347/j.ycyk.20250709003
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Year 2025 volume 46 Issue 6
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Article Info
doi: 10.12347/j.ycyk.20250709003
  • Receive Date：2025-07-09
  • Online Date：2026-03-13
Article Data
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History
  • Received：2025-07-09
  • Revised：2025-07-21
Funding
Affiliations
    1. MEMS Center, Harbin Institute of Technology, Harbin 150001, China
    2. Key Laboratory of Micro-Systems and Micro-Structures Manufacturing, Ministry of Education, Harbin 150001, China
    3. National Key Laboratory of Science and Technology on Underwater Acoustic Antagonizing, Shanghai 201108, China
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https://castjournals.cast.org.cn/joweb/ycyk/EN/10.12347/j.ycyk.20250709003
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