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Integrated circuit nanotechnology is gradually approaching the physical limit. Therefore, relying on heterogeneous integration technology to continue and expand Moore Law is becoming increasingly important. The vertical interconnection of signals from various integrated chips is achieved through technologies such as through silicon via (TSV) or through glass via (TGV), while high-density interconnection in the horizontal direction can be achieved through rewiring layer (RDL) technology. The article summarizes the comparison between TGV technology and adapter boards, elaborates on the current application status in the field of passive systems and RF 3D integration, analyzes the TGV process capability and the current technical progress of domestic and foreign manufacturers, and explores the existing technical difficulties and future development trends of the TGV.
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| 科 Family | 属数 Number of genus | 种数 Number of species | 占总种数比例 Percentage of total species (%) | 属 Genus | 种数 Number of species | 占总种数比例 Percentage of total species (%) |
|---|---|---|---|---|---|---|
| 鹅膏菌科Amanitaceae | 2 | 11 | 5.26 | 鹅膏菌属 Amanita | 10 | 4.78 |
| 小菇科 Mycenaceae | 2 | 12 | 5.74 | 丝盖伞属 Inocybe | 5 | 2.39 |
| 多孔菌科 Polyporaceae | 8 | 14 | 6.70 | 蜡蘑属 Laccaria | 5 | 2.39 |
| 红菇科 Russulaceae | 3 | 23 | 11.00 | 小皮伞属 Marasmius | 6 | 2.87 |
| 小菇属 Mycena | 11 | 5.26 | ||||
| 光柄菇属 Pluteus | 5 | 2.39 | ||||
| 红菇属 Russula | 17 | 8.13 | ||||
| 栓菌属 Trametes | 5 | 2.39 |
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