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To meet the application requirements of inertial navigation, autonomous driving, and other fields, and to advance the development of micro-electromechanical systems (MEMS) silicon gyroscopes towards high precision, digitalization, and miniaturization, this paper presents the design and implementation of a MEMS silicon gyroscope interface ASIC with digital output, based on a 0.35 μm BCD process and a monolithic integration approach. A closed-loop drive scheme based on noise self-excitation is adopted, enabling the gyroscope to achieve harmonic vibration in the drive direction. The detection circuit uses a low-noise capacitive-to-voltage (C/V) conversion circuit to efficiently convert the small displacement signal into a voltage signal. Signal processing is performed using switched-capacitor phase-sensitive demodulation technology, combined with low-pass filtering, effectively suppressing noise interference and yielding a low-noise analog angular velocity output signal. To achieve the digital output of the silicon gyroscope's angular velocity, an integrated fourth-order feed-forward Sigma-Delta (ΣΔ) analog-to-digital converter (ADC) is designed to convert the analog angular velocity signal into a digital signal. The chip test results show that the dynamic range of the ΣΔ modulator reaches 110 dB, with a low-frequency noise floor of approximately -120 dB. The overall range of the gyroscope is ±200(°)/s, with a scale factor of 21 310 LSB/((°)/s), a nonlinearity of 178×10-6, bias instability of 0.259(°)/h, and angle random walk of 0.028 7(°)/√h. The chip area is 4.3 mm×4.3 mm. By using the integrated interface ASIC to replace the traditional PCB-level system, the system's integration is significantly improved, successfully meeting the miniaturization requirements for MEMS silicon gyroscopes and promot-ing their development in high-precision digital applications.
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| 科 Family | 属数 Number of genus | 种数 Number of species | 占总种数比例 Percentage of total species (%) | 属 Genus | 种数 Number of species | 占总种数比例 Percentage of total species (%) |
|---|---|---|---|---|---|---|
| 鹅膏菌科Amanitaceae | 2 | 11 | 5.26 | 鹅膏菌属 Amanita | 10 | 4.78 |
| 小菇科 Mycenaceae | 2 | 12 | 5.74 | 丝盖伞属 Inocybe | 5 | 2.39 |
| 多孔菌科 Polyporaceae | 8 | 14 | 6.70 | 蜡蘑属 Laccaria | 5 | 2.39 |
| 红菇科 Russulaceae | 3 | 23 | 11.00 | 小皮伞属 Marasmius | 6 | 2.87 |
| 小菇属 Mycena | 11 | 5.26 | ||||
| 光柄菇属 Pluteus | 5 | 2.39 | ||||
| 红菇属 Russula | 17 | 8.13 | ||||
| 栓菌属 Trametes | 5 | 2.39 |
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