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The current wireless SAW (Surface Acoustic Wave) sensor based on langasite (LGS) can work at temperatures as high as 600 °C. Nevertheless, the propagation loss of LGS increases significantly as frequency and temperature increase, which limits the operating frequency of the SAW sensor based on LGS to 1 GHz. However, SAW resonator based on AlN/sapphire structure exhibits gigantic potential for high-temperature sensing applications due to its resistance to high temperatures, high Q-factor, and low propagation loss. In this work, an efficient model for SAW resonator based on AlN/sapphire is developed using the coupled mode (COM) theory combined with the finite element method (FEM). The influence of different numbers of interdigital transducers(IDT), reflective gratings, and different aperture lengths on device performance are investigated. Furthermore, the relationship between resonant frequency and temperature at various temperatures is simulated, which compares well with that of the experimental results. The investigation results show that the resonator works reliably in the temperature range of up to 500 °C and the operating frequency of up to 2.45 GHz. The frequency-temperature characteristics exhibit good linearity, with a temperature coefficient of-67×10-6 °C-1. This work provides an important reference for designing high-performance SAW high-temperature sensors.
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| 科 Family | 属数 Number of genus | 种数 Number of species | 占总种数比例 Percentage of total species (%) | 属 Genus | 种数 Number of species | 占总种数比例 Percentage of total species (%) |
|---|---|---|---|---|---|---|
| 鹅膏菌科Amanitaceae | 2 | 11 | 5.26 | 鹅膏菌属 Amanita | 10 | 4.78 |
| 小菇科 Mycenaceae | 2 | 12 | 5.74 | 丝盖伞属 Inocybe | 5 | 2.39 |
| 多孔菌科 Polyporaceae | 8 | 14 | 6.70 | 蜡蘑属 Laccaria | 5 | 2.39 |
| 红菇科 Russulaceae | 3 | 23 | 11.00 | 小皮伞属 Marasmius | 6 | 2.87 |
| 小菇属 Mycena | 11 | 5.26 | ||||
| 光柄菇属 Pluteus | 5 | 2.39 | ||||
| 红菇属 Russula | 17 | 8.13 | ||||
| 栓菌属 Trametes | 5 | 2.39 |
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