¹College of Microelectronics, College of Information Science and Electronic Engineering, Zhejiang University, Hangzhou 310027, China

²State Key Lab for Mesoscopic Physics and Frontiers Science Center for Nano-optoelectronics, Collaborative Innovation Center of Quantum Matter, School of Physics, Peking University, Beijing 100871, China

³Guangdong Provincial Key Laboratory of Quantum Engineering and Quantum Materials, School of Physics and Telecommunication Engineering, South China Normal University, Guangzhou 510006, China

⁴State Key Laboratory of Modern Optical Instrumentation, Zhejiang University, Hangzhou 310027, China