Research

Research ›› 2026, Vol. 9 ›› Issue (3) : 1197 - . DOI: 10.34133/research.1197

RESEARCH ARTICLE

Asymmetric Diffusion Metasurface-Based Lensless Monitoring and Uniform Illumination Systems for Optical Lithography

Guangbiao Wang ¹^,² ,
Yanhua Shen ²^,³ ,
Yazhi Pi ² ,
Wenchao Kong ² ,
Yun Lai ⁴ ,
Xu Ma ⁵ ,
Yan Zhou ²^,^* ,
Fan Li ¹^,^* ,
Zizheng Cao ²^,⁶^,⁷^,^* ,
Lei Wang ² ,
Shaohua Yu ²^,^*

Author information +

¹School of Electronics and Information Technology, Sun Yat-Sen University, Guangzhou 510275, China.

²Peng Cheng Laboratory, Shenzhen 518055, China.

³Department of Electronic and Information Engineering, Harbin Institute of Technology (Shenzhen), Shenzhen 518055, China.

⁴National Laboratory of Solid State Microstructures, School of Physics, and Collaborative Innovation, Center of Advanced Microstructures, Nanjing University, Nanjing 210093, China.

⁵Key Laboratory of Photoelectronic Imaging Technology and System of Ministry of Education of China, School of Optics and Photonics, Beijing Institute of Technology, Beijing 100081, China.

⁶College of Integrated Circuits, ZJ U-Hangzhou Global Scientific and Technological Innovation Center, Zhejiang University, Hangzhou 310027, China.

⁷Shanghai Institute for Advanced Study, Zhejiang University, Shanghai, China.

^* Address correspondence to: zhouy4295@outlook.com (Y.Z.);

^* Address correspondence to: lifan39@mail.sysu.edu.cn (F.L.);

^* Address correspondence to: zcaozju@zju.edu.cn (Z.C.);

^* Address correspondence to: yush@cae.cn (S.Y.)

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Received	Accepted	Published
2025-12-25	2026-02-12
Issue Date
2026-10-16

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