To support the scenario of intrinsic strengthening and toughening in Ta
3ZrB
8 solid solution, we further examined factors that may influence the hardness and toughness of the film samples, including residual compressive stress in the film, grain size, tissue phase around grain boundaries, indentation-induced structural transformation, and dislocation generation and movement. Residual compressive stress in film samples tends to enhance measured hardness [
27]. We calculated the intrinsic stress of as-deposited films using the Stoney equation [
28] and obtained −2.99 ± 0.23, −1.02 ± 0.16, and −1.39 ± 0.11 GPa for the TaB
2, Ta
3ZrB
8, and ZrB
2 films, respectively. It is seen that the Ta
3ZrB
8 solid solution film hosts the lowest intrinsic compressive stress yet the highest measured hardness, suggesting that compression stress is not a determining factor for the strengthening of Ta
3ZrB
8 solid solution over TaB
2 or ZrB
2. Highly crystallized and oriented film specimens comprising grains with a size of 20 nm or larger are known to exhibit minimal grain-boundary effect and possess hardness close to that of high-quality single crystals [
29]. The grain sizes for the synthesized TaB
2, Ta
3ZrB
8, and ZrB
2 films in this work are ~20, ~33, and ~28 nm, respectively. Therefore, grain size is not a main influencing factor in enhancing the mechanical properties of the Ta
3ZrB
8 solid solution film. It has been reported that a tissue phase may improve hardness; for example, a boron-rich tissue phase at the grain boundaries of TiB
2.4 films has shown to contribute to notable improvement of hardness because the high cohesive strength of the tissue phase prevents grain-boundary sliding [
30]. Moreover, such tissue phases may also help improve toughness via inhibition of crack propagation and promotion of grain-boundary sliding [
31]. However, no tissue phase was found in the crystal structure of Ta
3ZrB
8 solid solution. Another possible source of structural toughening is phase transformation during indentation, which dissipates a large amount of deformation energy and deflects or even stops the crack propagation [
32]. However, the results in Fig.
3B clearly show that there is no structural transformation in the Ta
3ZrB
8 solid solution film during the nanoindentation test, thereby removing this possibility. In addition, a recent work reported positive effect of stacking fault and twinning on the plastic deformation of interstitial intermetallic compounds [
33]. In fact, for TMB
2 with high crystalline quality, the material deformation mode at room temperature usually transitions from complete elasticity to suddenly fracture [
7]; thus, there is probably no stacking fault and twinning-induced plasticity under the conditions reported in our present work. We finally evaluate the role of dislocation in affecting the mechanical properties. Dislocation pinning is a major mechanism for hardness improvement in metallic solid solutions, and dislocation slip dominates plasticity of metallic systems. However, for ceramics similar to TM compounds studied in this work, dislocation generation and motion are not major deformation modes due to the very high energy cost associated with the breaking and rearrangement of the strong (pure or mixed) covalent bonds. Instead, incipient plastic formation is usually dominated by brittle bond breaking, followed by crack propagation. We have analyzed the area underneath the indented surface using the selected-area inverse fast Fourier transform method, and the results in Fig.
3B3 show no dislocation in this area. Some literatures reported that TMB
2 films with the (001) preferred orientation make it difficult to form dislocation [
26,
30], which hints that dislocation may not be a major relevant factor for solid solution strengthening and toughening in Ta
3ZrB
8 solid solution. Moreover, we likewise obtain the scanning TEM high-angle annular dark-field (STEM-HAADF) picture (Fig.
3C1) beneath the indentation surface, which illustrates the high crystalline quality of Ta
3ZrB
8. Subsequently, the corresponding geometric phase analysis is executed to observe the strain distribution of film after indentation test. The [0001] and [1010] are defined as
x and
y axes, respectively. The stain maps of horizontal normal strain (
exx) and vertical normal strain (
eyy) are computed and displayed in Fig.
3C2 and C3, which exhibit the compression stain (blue color) along the direction perpendicular to (0001) plane and the tensile strain (red color) along the direction parallel to (0001) plane, indicating a complex strain state of Ta
3ZrB
8 under berkovich indentation deformation mode. Below, we carry out a systematic and in-depth theoretical evaluation of the structural deformation modes and stress responses of Ta
3ZrB
8 solid solution under indentation loading conditions, and the results are compared to those of TaB
2 and ZrB
2 to reveal the atomistic mechanisms responsible for the strengthening and toughening caused by the chemical tuning of bonding charge on the main load-bearing bonds in the solid solution crystal.