A series of experiments are conducted using elastomers with various configurations. Figure
2D shows the measured output force responses of a 3 × 3 cm
2 square actuator with 1, 2, and 3 elastomer layers, all with a fixed total thickness, under driving voltages up to 35 V and a 90-g load to simulate human touch pressure. The results indicate that multilayer elastomer actuators generate significantly higher output forces than single-layer configurations. For instance, the 3-layer elastomer actuator produces an average output force of 4.6 mN at a minimum driving voltage of 5 V, reaching a maximum force of 34.4 mN at 35 V. In contrast, the single-layer actuator achieves only 7.9 mN under the same 35-V driving condition. Further investigation on stiffness ratios was performed by testing 3 different stiffness configurations in a 3-layer elastomer actuator, with a fixed mass for each elastomer layer in each sample but varied stiffness ratios. For each layer of the elastomers, stiffness is governed by the cross-linking ratio, with higher ratios corresponding to lower stiffness. For multilayer structures, the stiffness ratio refers to the relative difference in stiffness among the constituent layers. Given that all samples share the same structural design, the observed differences in stiffness are primarily attributed to variations in the intrinsic material properties of the elastomers, rather than geometric or mass-related factors. The measured Young's modulus and Poisson's ratio for elastomers with different cross-linking ratios (Table
S1 and Fig.
S9) effectively characterize their mechanical properties. The results show that increasing the cross-linking ratio leads to a corresponding decrease in Young's modulus, while the Poisson's ratio remains nearly constant. This trend further suggests that a lower ethoxysilane content, associated with a higher cross-linking ratio, effectively reduces the stiffness of the PDMS elastomer, resulting in a softer material. Figure
2E shows the output force of these actuators across a voltage range of 5 to 200 V, demonstrating that a higher overall stiffness ratio results in greater output forces. The output force of the one-layer elastomer and optimized-stiffness-ratio multilayer elastomer actuator under applied voltages ranging from 5 to 200 V is presented in Fig.
S10. To provide a comprehensive view of the tested configurations, a total of 10 scenarios, including 1-layer, 2-layer, and 3-layer designs, are detailed in the Supplementary Materials (Table
S2 and Fig.
S11). These combinations were tested to investigate the mechanical effects of the layered structure. In the 3-layer elastomer configurations, the middle layer was fixed at a 15:1 cross-linking ratio, while the first and third layers are varied in stiffness using different step changes. These are then combined in different schemes to create 4 distinct scenarios, enabling a more structured examination of the influence of stiffness gradients within the multilayer architecture. Figure
2F shows that 3-layer elastomers with increasing cross-linking density in each layer significantly reduce damping compared to the single-layer configuration, highlighting the effectiveness of the multilayer design in achieving higher elastic recovering force under the same electrostatic field. Consequently, the multilayer elastomers act as effective stiffness regulators, lowering the actuator's required driving voltage and enhancing vibratory motion from a mechanical perspective. A cross-sectional scanning electron microscope (SEM) image of the 3-layer elastomer is provided in Fig.
2G, offering visual insight into our layered structure.