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Enhanced room-temperature hydrogen response of TiO2 nanotube Schottky device through carrier transport modulation
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Xiaochuan Longa, b, c, d, Xiao Wenb, c, d, Xiao Zhangb, c, d, Zheng Lua, Feng Weib, e, Xiaopeng Liub, c, d, *
Progress in Natural Science: Materials International | 2026, 36(1) : 187 - 194
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Progress in Natural Science: Materials International | 2026, 36(1): 187-194
• Research Article •
Enhanced room-temperature hydrogen response of TiO2 nanotube Schottky device through carrier transport modulation
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Xiaochuan Longa, b, c, d, Xiao Wenb, c, d, Xiao Zhangb, c, d, Zheng Lua, Feng Weib, e, Xiaopeng Liub, c, d, *
Affiliations
  • aSchool of Materials Science and Engineering, Northeastern University, Shenyang, 110819, China
  • bState Key Laboratory of Advanced Materials for Intelligent Sensing, China GRINM Group Co. Ltd., Beijing, 100088, China
  • cGRIMAT Engineering Institute Co. Ltd., Beijing, 101407, China
  • dGeneral Research Institute for Nonferrous Metals, Beijing, 100088, China
  • eGRINM (Guangdong) Institute for Advanced Materials and Technology, Foshan, 528000, China
Published: 2026-02-22 doi: 10.1016/j.pnsc.2026.01.006
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Fabricating TiO2 nanotube hydrogen sensors via anodic oxidation of sputtered Ti films on Si wafers enhances stability and facilitates integration/miniaturization. However, these sensors exhibit lower room-temperature responses compared to counterparts derived from anodized Ti thin sheets. In this work, Pt/TiO2/Ti sensors incorporating an unoxidized Ti film at the nanotube base and Pt/TiO2 sensors with completely oxidized Ti foil were fabricated on SiO2/Si substrates through magnetron sputtering and anodic oxidation. The Pt/TiO2/Ti sensor exhibited a response of 5.3 × 106 toward 200 ppm H2 at room temperature - four orders of magnitude higher than the Pt/TiO2 counterpart. Through SEM, Hall measurements, and I-V analysis, this enhancement is attributed to significantly reduced charge transfer resistance between Pt interdigitated electrodes (IDEs) due to the conductive Ti film in Pt/TiO2/Ti devices. The modulating effect of the Ti film on carrier transport pathways becomes more pronounced at lower operating temperatures. This study provides a straightforward yet effective approach for developing high-responsivity TiO2 nanotube hydrogen sensors on silicon wafers.

Hydrogen sensor  /  TiO2 nanotubes  /  Titanium film  /  Anodic oxidation
Xiaochuan Long, Xiao Wen, Xiao Zhang, Zheng Lu, Feng Wei, Xiaopeng Liu. Enhanced room-temperature hydrogen response of TiO2 nanotube Schottky device through carrier transport modulation[J]. Progress in Natural Science: Materials International, 2026 , 36 (1) : 187 -194 . DOI: 10.1016/j.pnsc.2026.01.006
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Funding
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  • Beijing Nova Program(20230484408)
  • National Natural Science Foundation of China(52172158)
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Year 2026 volume 36 Issue 1
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Article Info
doi: 10.1016/j.pnsc.2026.01.006
  • Receive Date：2025-11-14
  • Online Date：2026-06-03
  • Published：2026-02-22
Article Data
Affiliations
History
  • Received：2025-11-14
  • Revised：2025-12-29
  • Accepted：2026-01-19
Funding
Beijing Nova Program(20230484408)
National Natural Science Foundation of China(52172158)
Affiliations
    aSchool of Materials Science and Engineering, Northeastern University, Shenyang, 110819, China
    bState Key Laboratory of Advanced Materials for Intelligent Sensing, China GRINM Group Co. Ltd., Beijing, 100088, China
    cGRIMAT Engineering Institute Co. Ltd., Beijing, 101407, China
    dGeneral Research Institute for Nonferrous Metals, Beijing, 100088, China
    eGRINM (Guangdong) Institute for Advanced Materials and Technology, Foshan, 528000, China

Corresponding:

* State Key Laboratory of Advanced Materials for Intelligent Sensing, China GRINM Group Co. Ltd., Beijing, 100088, China. E-mail address: (X. Liu).
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https://castjournals.cast.org.cn/joweb/pnsmi/EN/10.1016/j.pnsc.2026.01.006
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表12种不同金属材料的力学参数
科
Family		 属数
Number of
genus		 种数
Number of
species		 占总种数比例
Percentage of
total species (%)		 属
Genus		 种数
Number of
species		 占总种数比例
Percentage of total
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鹅膏菌科Amanitaceae 2 11 5.26 鹅膏菌属 Amanita 10 4.78
小菇科 Mycenaceae 2 12 5.74 丝盖伞属 Inocybe 5 2.39
多孔菌科 Polyporaceae 8 14 6.70 蜡蘑属 Laccaria 5 2.39
红菇科 Russulaceae 3 23 11.00 小皮伞属 Marasmius 6 2.87
小菇属 Mycena 11 5.26
光柄菇属 Pluteus 5 2.39
红菇属 Russula 17 8.13
栓菌属 Trametes 5 2.39
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