A 4096-element 3D-integrated Si-SiN optical phased array for high-power coherent LiDAR
1State Key Laboratory of Extreme Photonics and Instrumentation, Zhejiang Key Laboratory of Autonomous Optoelectronic Perception, College of Optical Science and Engineering, Zhejiang University, Hangzhou 310027, China
2ZJU-Hangzhou Global Scientific and Technological Innovation Center, Zhejiang University, Hangzhou 311215, China
3National Laboratory on Adaptive Optics, Chengdu 610209, China
4United Microelectronics Center Co., Ltd (CUMEC), Chongqing 401332, China
5Chongqing Normal University, College of Physics and Optoelectronic Engineering, Chongqing 401331, China
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