¹College of Electronic Information and Optical Engineering, Nankai University, Tianjin 300350, China

²National Key Laboratory of Semiconductor Laser, Institute of Modern Optics, Nankai University, Tianjin 300350, China

³School of Physics, Shandong University, Jinan, Shandong 250100, China

⁴College of Electronic Science and Engineering, College of Integrated Circuits, Jilin University, Changchun, Jilin 130000, China

⁵State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun, Jilin 130000, China