Vacancy oscillating mode in amorphous binary oxide film by terahertz time domain spectroscopy
1Hangzhou Institute of Technology, Xidian University, Hangzhou 311231, China
2Faculty of Integrated Circuits, Xidian University, Xi'an 710071, China
3Beijing Academy of Quantum Information Sciences, Beijing 100193, China
4School of Integrated Circuits, Huazhong University of Science and Technology, Wuhan 430074, China
5State Key Laboratory of Materials for Integrated Circuits, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, 865 Changning Road, Shanghai 200050, China
6Electrical Engineering College, Zhejiang University, Hangzhou 310027, China
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