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Mechanical Analysis and Comparative Study of Ultra-Thin Chip Stretching-Ejecting Peeling Process
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Kewen SHI1, Ziwen KONG1, Wenhan LYU2, Siyu CHEN1, 3
Chinese Quarterly of Mechanics | 2025, 46(3) : 570 - 585
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Chinese Quarterly of Mechanics | 2025, 46(3): 570-585
Mechanical Analysis and Comparative Study of Ultra-Thin Chip Stretching-Ejecting Peeling Process
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Kewen SHI1, Ziwen KONG1, Wenhan LYU2, Siyu CHEN1, 3
Affiliations
  • 1.School of Aerospace Engineering and Applied Mechanics, Tongji University, Shanghai 200092, China
  • 2.School of Mechanical-Electronic and Vehicle Engineering, Beijing University of Civil Engineering and Architecture, Beijing 100044, China
  • 3.Shanghai Institute of Aircraft Mechanics and Control, Shanghai 200092, China
Published: 2025-09-25 doi: 10.15959/j.cnki.0254-0053.2025.03.002
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As a critical step in flexible electronics packaging, the ultra-thin chip peeling process plays a vital role in ensuring high-yield manufacturing. This study focused on mechanical behavior differences between two peeling methods: roller-stretching and needle-ejecting. A theoretical model of the "chip-adhesive-substrate" laminated structure was established and validated by finite element simulation. A dual-criteria safety criterion was proposed to quantify process safety based on the competing relationship between interfacial fracture energy of the adhesive layer and surface cracking stress of the chip layer, which overcame the limitations of traditional methods for quantitatively evaluating the safety of the peeling process. Results demonstrated that the needle-ejecting procedure outperforms roller-stretching in terms of the safety of ultra-thin chip peeling. The roller-stretching process only has high engineering application prospect for peeling large-sized and thick chips from soft and thick substrates. Furthermore, an innovative stretching-ejecting combination technology is proposed, introducing the concept of synergistic matching to achieve chip stress neutralization and fracture mode optimization. This research provides theoretical insights into non-destructive ultra-thin chip peeling technology, and delivers practical guidance for advancing high-yield flexible microelectronics packaging.

chip peeling process  /  roller-stretching  /  needle-ejecting  /  competing fracture  /  peeling safety criterion
Kewen SHI, Ziwen KONG, Wenhan LYU, Siyu CHEN. Mechanical Analysis and Comparative Study of Ultra-Thin Chip Stretching-Ejecting Peeling Process[J]. Chinese Quarterly of Mechanics, 2025 , 46 (3) : 570 -585 . DOI: 10.15959/j.cnki.0254-0053.2025.03.002
Year 2025 volume 46 Issue 3
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Article Info
doi: 10.15959/j.cnki.0254-0053.2025.03.002
  • Receive Date:2025-04-24
  • Online Date:2026-03-24
  • Published:2025-09-25
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  • Received:2025-04-24
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Affiliations
    1.School of Aerospace Engineering and Applied Mechanics, Tongji University, Shanghai 200092, China
    2.School of Mechanical-Electronic and Vehicle Engineering, Beijing University of Civil Engineering and Architecture, Beijing 100044, China
    3.Shanghai Institute of Aircraft Mechanics and Control, Shanghai 200092, China
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表12种不同金属材料的力学参数

Family
属数
Number of
genus
种数
Number of
species
占总种数比例
Percentage of
total species (%)

Genus
种数
Number of
species
占总种数比例
Percentage of total
species (%)
鹅膏菌科Amanitaceae 2 11 5.26 鹅膏菌属 Amanita 10 4.78
小菇科 Mycenaceae 2 12 5.74 丝盖伞属 Inocybe 5 2.39
多孔菌科 Polyporaceae 8 14 6.70 蜡蘑属 Laccaria 5 2.39
红菇科 Russulaceae 3 23 11.00 小皮伞属 Marasmius 6 2.87
小菇属 Mycena 11 5.26
光柄菇属 Pluteus 5 2.39
红菇属 Russula 17 8.13
栓菌属 Trametes 5 2.39
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