Home Journals Articles Updates About
CN
image
收藏切换
Effects of Molding Pressure on Properties of Indium Tin Oxide (ITO) Sputtering Target
收藏切换
PDF
Feng JIANG1, Zedan TAN1, 2, Shicheng HUANG2, Zhijie FANG3, Yingdong LU2, Liren QIN1, Yongqing WANG3, Jishu ZENG3
Mining and Metallurgical Engineering | 2024, 44(1) : 134 - 137
Less
收藏切换
Mining and Metallurgical Engineering | 2024, 44(1): 134-137
• MATERIALS •
Effects of Molding Pressure on Properties of Indium Tin Oxide (ITO) Sputtering Target
Full
Feng JIANG1, Zedan TAN1, 2, Shicheng HUANG2, Zhijie FANG3, Yingdong LU2, Liren QIN1, Yongqing WANG3, Jishu ZENG3
Affiliations
  • 1.School of Mechanical and Automotive Engineering, Guangxi University of Science and Technology, Liuzhou 545616, Guangxi, China
  • 2.Guangxi Crystal Union Photoelectric Materials Co Ltd, Liuzhou 545036, Guangxi, China
  • 3.School of Electronic Engineering, Guangxi University of Science and Technology, Liuzhou 545006, Guangxi, China
Published: 2024-02-01 doi: 10.3969/j.issn.0253-6099.2024.01.029
Outline
收藏切换

Nano ITO powders prepared by chemical coprecipitation plus calcination process were used as raw materials to prepare ITO sputtering target by molding and cold isostatic pressing, as well as conventional sintering. The effects of molding pressure on the relative density, resistivity, and grain size of ITO target were investigated. The results show that with the molding pressure of 60 MPa and the appropriate sintering conditions, the prepared ITO target has the relative density of 99.81% and resistivity of 1.707×10-4 Ω·cm, with an average grain size of 7.62 μm. The research results can provide reference for densification and large-scale production of ITO sputtering targets.

molding  /  indium tin oxide (ITO)  /  conductive thin film  /  target material  /  conventional sintering  /  electrical resistivity  /  densification
Feng JIANG, Zedan TAN, Shicheng HUANG, Zhijie FANG, Yingdong LU, Liren QIN, Yongqing WANG, Jishu ZENG. Effects of Molding Pressure on Properties of Indium Tin Oxide (ITO) Sputtering Target[J]. Mining and Metallurgical Engineering, 2024 , 44 (1) : 134 -137 . DOI: 10.3969/j.issn.0253-6099.2024.01.029
Appendix
Less
Year 2024 volume 44 Issue 1
PDF
61
29
Cite this Article
BibTeX
Article Info
doi: 10.3969/j.issn.0253-6099.2024.01.029
  • Receive Date：2023-08-24
  • Online Date：2026-03-20
  • Published：2024-02-01
Article Data
Affiliations
History
  • Received：2023-08-24
Funding
Affiliations
    1.School of Mechanical and Automotive Engineering, Guangxi University of Science and Technology, Liuzhou 545616, Guangxi, China
    2.Guangxi Crystal Union Photoelectric Materials Co Ltd, Liuzhou 545036, Guangxi, China
    3.School of Electronic Engineering, Guangxi University of Science and Technology, Liuzhou 545006, Guangxi, China
References
Share
https://castjournals.cast.org.cn/joweb/kygczz/EN/10.3969/j.issn.0253-6099.2024.01.029
Share to
QR

Scan QR to access full text

Cite this article
BibTeX
Citations
表12种不同金属材料的力学参数
科
Family		 属数
Number of
genus		 种数
Number of
species		 占总种数比例
Percentage of
total species (%)		 属
Genus		 种数
Number of
species		 占总种数比例
Percentage of total
species (%)
鹅膏菌科Amanitaceae 2 11 5.26 鹅膏菌属 Amanita 10 4.78
小菇科 Mycenaceae 2 12 5.74 丝盖伞属 Inocybe 5 2.39
多孔菌科 Polyporaceae 8 14 6.70 蜡蘑属 Laccaria 5 2.39
红菇科 Russulaceae 3 23 11.00 小皮伞属 Marasmius 6 2.87
小菇属 Mycena 11 5.26
光柄菇属 Pluteus 5 2.39
红菇属 Russula 17 8.13
栓菌属 Trametes 5 2.39
关闭全屏
  • BibTeX
  • EndNote
  • RefWorks
  • TxT
Links
Articles
Latest Articles
Most Read
Collections
Updates
Events
News
Multimedia
About
About Us
Contact
No. 86 Xueyuan South Road, Haidian District, Beijing
100081
010-62199257
qkjq@cast.org.cn

Copyright © 2025 China Association for Science and Technology. All rights reserved. For all open access content, the relevant licensing terms apply.
Sponsored by the Office of the Leading Group for Cybersecurity and Informatization of CAST, and supported by Science and Technology Review Publishing House