Data factor allocation is an important driving force of enterprise digital technology innovation, and is gradually regarded as the core production factor of new quality productivity because of its significant multiplier effect and innovation engine. Taking enterprise data factor allocation as the starting point, listed manufacturing enterprises from 2011 to 2022 were selected as samples to empirically study the relationship between data factor allocation and enterprise new quality productivity, and the intermediary mechanism effect was studied from the two dimensions of digital technology innovation quantity and quality. It is found that data factor allocation of manufacturing enterprises can effectively promote the improvement of new quality productivity of enterprises, especially for state-owned enterprises, high-tech enterprises and the eastern region. The mechanism effect test shows that data element allocation can improve the new quality productivity of enterprises through the “incremental quality improvement” effect of digital technology innovation. In order to promote the formation of new quality productivity, it is suggested that manufacturing enterprises actively integrate the “data factor x” action, improve the level of data factor allocation, promote the synergy between data and technology factors, and promote the double improvement of the quantity and quality of digital technology output.