Starting from a low-carbon perspective, the relationship between the agglomeration of productive service industries, green technology innovation, and industrial green total factor productivity was explored through provincial research data from 2003 to 2021. The results show that the impact of specialized agglomeration of productive service industries on industrial green total factor productivity exhibits a “U” - shaped characteristic, while the impact of diversified agglomeration exhibits an “N” - shaped characteristic. The specialized agglomeration of productive service industries has a significant positive impact on industrial green total factor productivity through the mediating effect of green technology innovation, while there is no mediating effect in diversified agglomeration.There are differences in the impact results among the three major regions of East, Central, and West. The specialized agglomeration of productive service industries in the eastern region is more flexible, while the diversified agglomeration of productive service industries in the central region is more significant. It is found that a good agglomeration of productive service industries can accelerate the improvement of industrial green total factor productivity. Based on emphasizing development characteristics and growth models, targeted green technology innovation and precise policies can be implemented to construct a localized policy model for productive service industries with Chinese characteristics, providing policy references and theoretical guidance for promoting industrial green development.