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Research on the influence of Ni content and film thickness on the environmental stability of PdNi hydrogen sensors
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Yu ZHANG1, Hongwei YANG2, 3, 1, Fang LIU2, 3, Wengang YANG2, 3, Hongchuan JIANG1, Xinwu DENG1
Metrology & Measurement Technology | 2025, 45(6) : 73 - 85
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Metrology & Measurement Technology | 2025, 45(6): 73-85
Sensor Technology
Research on the influence of Ni content and film thickness on the environmental stability of PdNi hydrogen sensors
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Yu ZHANG1, Hongwei YANG2, 3, 1, Fang LIU2, 3, Wengang YANG2, 3, Hongchuan JIANG1, Xinwu DENG1
Affiliations
  • 1School of Integrated Circuit Science and Engineering, Chengdu611731, China
  • 2Technology R&D Center of CNOOC Gas&Power Group Co., Ltd, Beijing610213, China
  • 3CNOOC Key Laboratory of Liquefied Natural Gas and Low⁃Carbon Technology, Beijing100028, China
Published: 2025-12-28 doi: 10.11823/j.issn.1674-5795.2025.06.06
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O₂ and H₂O significantly affect the hydrogen sensitivity of PdNi thin films. To monitor hydrogen concentration in high⁃humidity oxygen⁃containing environments such as electrolytic water hydrogen production, nuclear power plant storage, and deep⁃sea energy exploration, PdNi thin⁃film hydrogen sensors were fabricated using methods such as magnetron sputtering, photolithography, and plasma etching. By adjusting the Ni content and thickness of the PdNi thin films, the influence of Ni content and thickness on the stability of the PdNi thin⁃film hydrogen sensors under O₂ and H₂O interference was systematically studied. Analytical methods such as XRD, SEM, and XPS were employed to characterize the crystallinity, elemental content, and elemental valence states of the PdNi thin films. The experimental results indicate that as the Ni content increases, the hydrogen response of the PdNi thin films becomes more affected by H₂O and O₂, while increasing the film thickness can reduce interference but weakens the hydrogen response sensitivity. Among them, the PdNi thin⁃film hydrogen sensor with a Ni content of 8.04% and a thickness of 24 nm, although affected by O₂ and H₂O, can restore its response curve to the initial state after experiencing interference. This research provides important support for the development of the hydrogen sensor for applications under complex environment conditions.

hydrogen sensors  /  Ni content  /  film thickness  /  PdNi thin films  /  environmental stability  /  photolithography  /  magnetron sputtering  /  plasma etching
Yu ZHANG, Hongwei YANG, Fang LIU, Wengang YANG, Hongchuan JIANG, Xinwu DENG. Research on the influence of Ni content and film thickness on the environmental stability of PdNi hydrogen sensors[J]. Metrology & Measurement Technology, 2025 , 45 (6) : 73 -85 . DOI: 10.11823/j.issn.1674-5795.2025.06.06
Year 2025 volume 45 Issue 6
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doi: 10.11823/j.issn.1674-5795.2025.06.06
  • Receive Date:2025-08-07
  • Online Date:2026-04-09
  • Published:2025-12-28
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  • Received:2025-08-07
  • Revised:2025-09-04
Affiliations
    1School of Integrated Circuit Science and Engineering, Chengdu611731, China
    2Technology R&D Center of CNOOC Gas&Power Group Co., Ltd, Beijing610213, China
    3CNOOC Key Laboratory of Liquefied Natural Gas and Low⁃Carbon Technology, Beijing100028, China
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https://castjournals.cast.org.cn/joweb/jcjs/EN/10.11823/j.issn.1674-5795.2025.06.06
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表12种不同金属材料的力学参数

Family
属数
Number of
genus
种数
Number of
species
占总种数比例
Percentage of
total species (%)

Genus
种数
Number of
species
占总种数比例
Percentage of total
species (%)
鹅膏菌科Amanitaceae 2 11 5.26 鹅膏菌属 Amanita 10 4.78
小菇科 Mycenaceae 2 12 5.74 丝盖伞属 Inocybe 5 2.39
多孔菌科 Polyporaceae 8 14 6.70 蜡蘑属 Laccaria 5 2.39
红菇科 Russulaceae 3 23 11.00 小皮伞属 Marasmius 6 2.87
小菇属 Mycena 11 5.26
光柄菇属 Pluteus 5 2.39
红菇属 Russula 17 8.13
栓菌属 Trametes 5 2.39
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