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Design and process study of high-inductance MEMS arch inductor
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Bo ZHANG1, 2, Xiaolong WEN1, 2, Yadong WAN1, 2, Chao ZHANG2, Jianhua LI1, 2
Electronic Components and Materials | 2025, 44(10) : 1169 - 1175
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Electronic Components and Materials | 2025, 44(10): 1169-1175
• Research & Development •
Design and process study of high-inductance MEMS arch inductor
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Bo ZHANG1, 2, Xiaolong WEN1, 2, Yadong WAN1, 2, Chao ZHANG2, Jianhua LI1, 2
Affiliations
  • 1Department of Physics, University of Science and Technology Beijing, Beijing 100083, China
  • 2Beijing Engineering Research Center of Detection and Application for Weak Magnetic Field, Beijing 100083, China
Published: 2025-10-05 doi: 10.14106/j.cnki.1001-2028.2025.0046
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Three-dimensional inductors，owing to their small footprint，low loss，and high inductance，are widely applied in MEMS sensors，RF MEMS，and energy storage systems. Traditional three-dimensional MEMS inductors rely on high aspect ratio pillars for support and are typically fabricated by UV-LIGA lithography or through-silicon-via（TSV）technology，resulting in a complex process. To simplify the fabrication，this paper presented a MEMS-based method for three-dimensional arch inductor supported by a non-photosensitive polyimide layer. The inductor employed a high-permeability，Co-based amorphous alloy wire as the magnetic core，significantly enhancing its electrical performance. By optimizing development time to improve the smoothness of polyimide sidewalls，an arch coil was fabricated without high aspect ratio pillars，thus simplifying the process and enhancing device stability. The fabricated MEMS arch inductor achieves an inductance of 1881nH at 78.5MHz，with its electrical performance variation within 3% over the temperature range from 20℃ to 120 ℃.

inductor  /  arch coils  /  polyimide  /  amorphous alloy wire
Bo ZHANG, Xiaolong WEN, Yadong WAN, Chao ZHANG, Jianhua LI. Design and process study of high-inductance MEMS arch inductor[J]. Electronic Components and Materials, 2025 , 44 (10) : 1169 -1175 . DOI: 10.14106/j.cnki.1001-2028.2025.0046
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Year 2025 volume 44 Issue 10
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doi: 10.14106/j.cnki.1001-2028.2025.0046
  • Receive Date：2025-02-07
  • Online Date：2026-04-16
  • Published：2025-10-05
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  • Received：2025-02-07
Affiliations
    1Department of Physics, University of Science and Technology Beijing, Beijing 100083, China
    2Beijing Engineering Research Center of Detection and Application for Weak Magnetic Field, Beijing 100083, China
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表12种不同金属材料的力学参数
科
Family		 属数
Number of
genus		 种数
Number of
species		 占总种数比例
Percentage of
total species (%)		 属
Genus		 种数
Number of
species		 占总种数比例
Percentage of total
species (%)
鹅膏菌科Amanitaceae 2 11 5.26 鹅膏菌属 Amanita 10 4.78
小菇科 Mycenaceae 2 12 5.74 丝盖伞属 Inocybe 5 2.39
多孔菌科 Polyporaceae 8 14 6.70 蜡蘑属 Laccaria 5 2.39
红菇科 Russulaceae 3 23 11.00 小皮伞属 Marasmius 6 2.87
小菇属 Mycena 11 5.26
光柄菇属 Pluteus 5 2.39
红菇属 Russula 17 8.13
栓菌属 Trametes 5 2.39
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