Due to the trade-off relationship between breakdown voltage (BV) and specific on-resistance Ron,sp, to minimize the decrease in breakdown voltage while reducing on-resistance, an improved U-trench metal-oxide-semiconductor field-effect transistor (UMOSFET) structure with PN-Bottom is proposed. First, on the basis of traditional 100 V U-trench metal-oxide-semiconductor (UMOS) devices, deep trench etching technology is adopted to introduce a PN-Bottom wrapping region at the bottom of the trench, which wraps the P-type region inside the N-type region. Then, the new structural parameters and fabrication process of the device are introduced. Next, using the TCAD simulation tool, a detailed discussion was conducted on the doping concentration, width, and depth of the N-Bottom and P-Bottom encapsulation regions, and their effects on the breakdown voltage and specific on-resistance of the device were studied. Finally, the simulation results show that under the same conditions, an optimized design with BV of 110 V and Ron,sp of 1.15 mΩ·cm2 was obtained.
| 科 Family | 属数 Number of genus | 种数 Number of species | 占总种数比例 Percentage of total species (%) | 属 Genus | 种数 Number of species | 占总种数比例 Percentage of total species (%) |
|---|---|---|---|---|---|---|
| 鹅膏菌科Amanitaceae | 2 | 11 | 5.26 | 鹅膏菌属 Amanita | 10 | 4.78 |
| 小菇科 Mycenaceae | 2 | 12 | 5.74 | 丝盖伞属 Inocybe | 5 | 2.39 |
| 多孔菌科 Polyporaceae | 8 | 14 | 6.70 | 蜡蘑属 Laccaria | 5 | 2.39 |
| 红菇科 Russulaceae | 3 | 23 | 11.00 | 小皮伞属 Marasmius | 6 | 2.87 |
| 小菇属 Mycena | 11 | 5.26 | ||||
| 光柄菇属 Pluteus | 5 | 2.39 | ||||
| 红菇属 Russula | 17 | 8.13 | ||||
| 栓菌属 Trametes | 5 | 2.39 |