收藏切换
A New Structural Design of UMOSFET with PN-Bottom
收藏切换
Chunhui PEI, Quanyuan FENG
Journal of Power Supply | 2026, 24(7) : 1 - 7
Less
收藏切换
Journal of Power Supply | 2026, 24(7): 1-7
• Power Semiconductor Devices and Drive Circuits •
A New Structural Design of UMOSFET with PN-Bottom
Full
Chunhui PEI, Quanyuan FENG
Affiliations
  • Institute of Microelectronics, Southwest Jiaotong University, Chengdu 611756, China
Published: 2026-07-30 doi: 10.13234/j.issn.2095-2805.2026.7.1
Outline
收藏切换

Due to the trade-off relationship between breakdown voltage (BV) and specific on-resistance Ron,sp, to minimize the decrease in breakdown voltage while reducing on-resistance, an improved U-trench metal-oxide-semiconductor field-effect transistor (UMOSFET) structure with PN-Bottom is proposed. First, on the basis of traditional 100 V U-trench metal-oxide-semiconductor (UMOS) devices, deep trench etching technology is adopted to introduce a PN-Bottom wrapping region at the bottom of the trench, which wraps the P-type region inside the N-type region. Then, the new structural parameters and fabrication process of the device are introduced. Next, using the TCAD simulation tool, a detailed discussion was conducted on the doping concentration, width, and depth of the N-Bottom and P-Bottom encapsulation regions, and their effects on the breakdown voltage and specific on-resistance of the device were studied. Finally, the simulation results show that under the same conditions, an optimized design with BV of 110 V and Ron,sp of 1.15 mΩ·cm2 was obtained.

Trench metal-oxide-semiconductor field-effect transistor (MOSFET)  /  PN-Bottom  /  breakdown voltage  /  specific on-resistance
裴春荟, 冯全源. 一种具有PN-Bottom的UMOSFET新结构设计. 电源学报, 2026 , 24 (7) : 1 -7 . DOI: 10.13234/j.issn.2095-2805.2026.7.1
Chunhui PEI, Quanyuan FENG. A New Structural Design of UMOSFET with PN-Bottom[J]. Journal of Power Supply, 2026 , 24 (7) : 1 -7 . DOI: 10.13234/j.issn.2095-2805.2026.7.1
  • National Natural Science Foundation of China(62090012)
  • Key R&D Project of Sichuan Province(2023YFG0004)
Year 2026 volume 24 Issue 7
35
7
Cite this Article
BibTeX
Article Info
doi: 10.13234/j.issn.2095-2805.2026.7.1
  • Receive Date:2024-04-29
  • Online Date:2026-10-29
  • Published:2026-07-30
Article Data
Affiliations
History
  • Received:2024-04-29
  • Revised:2024-11-04
  • Accepted:2024-11-25
Funding
National Natural Science Foundation of China(62090012)
Key R&D Project of Sichuan Province(2023YFG0004)
Affiliations
    Institute of Microelectronics, Southwest Jiaotong University, Chengdu 611756, China
References
Share
https://castjournals.cast.org.cn/joweb/dyxb/EN/10.13234/j.issn.2095-2805.2026.7.1
Share to
QR

Scan QR to access full text

Cite this article
BibTeX
Citations
表12种不同金属材料的力学参数
科
Family
属数
Number of
genus
种数
Number of
species
占总种数比例
Percentage of
total species (%)
属
Genus
种数
Number of
species
占总种数比例
Percentage of total
species (%)
鹅膏菌科Amanitaceae 2 11 5.26 鹅膏菌属 Amanita 10 4.78
小菇科 Mycenaceae 2 12 5.74 丝盖伞属 Inocybe 5 2.39
多孔菌科 Polyporaceae 8 14 6.70 蜡蘑属 Laccaria 5 2.39
红菇科 Russulaceae 3 23 11.00 小皮伞属 Marasmius 6 2.87
小菇属 Mycena 11 5.26
光柄菇属 Pluteus 5 2.39
红菇属 Russula 17 8.13
栓菌属 Trametes 5 2.39
关闭全屏
  • BibTeX
  • EndNote
  • RefWorks
  • TxT