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Working Mode Analysis and Performance Optimization of Discharge-pumped Excimer Laser Charging Power Supply
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Qihui SHEN1, 2, Jiacheng REN1, 2, Jingzhen SHAO1, Ying LIN1, Xu LIANG1
Journal of Power Supply | 2026, 24(1) : 321 - 329
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Journal of Power Supply | 2026, 24(1): 321-329
• Special Power Supplies •
Working Mode Analysis and Performance Optimization of Discharge-pumped Excimer Laser Charging Power Supply
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Qihui SHEN1, 2, Jiacheng REN1, 2, Jingzhen SHAO1, Ying LIN1, Xu LIANG1
Affiliations
  • 1.Anhui Institute of Optics and Fine Mechanics, Hefei Institute of Physical Science, Chinese Academy of Sciences, Hefei 230031, China
  • 2.Science Island Branch, Graduate School of University of Science and Technology of China, Hefei 230026, China
Published: 2026-01-30 doi: 10.13234/j.issn.2095-2805.2026.1.321
Outline
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Discharge-pumped excimer laser has some unique applications in the biomedical field. However, there still exist some practical problems to be solved in the process of engineering, such as machine heating and electromagnetic compatibility. The discharge-pumped circuit structure of excimer laser was introduced, the electromagnetic radiation and heat generation of the laser head and high-voltage charging power supply were analyzed, and the working states of an LC series resonant high-voltage capacitor charging power supply in different modes were compared. In addition, the heating and electromagnetic radiation of each part in the high-voltage capacitor charging power supply in different working modes were compared through experiments. Experimental results show that when the circuit switch tube worked in the mode of fs=fr/2, the IGBT junction temperature decreased by 16.8 ℃ compared with that in the mode of fs≥fr, and the IGBT loss was also reduced by 83.7 W (i.e., 82.8% in proportion) in the meantime, thus effectively reducing the temperature of the high-voltage charging power supply and improving the machine’s electro-optical conversion efficiency. Moreover, the peak value of magnetic field intensity was reduced by 16.53 dB, and the peak value of electric field intensity was reduced by 20.05 dB, effectively suppressing the electromagnetic radiation interference.

Excimer laser  /  capacitor charging power supply  /  LC series resonance  /  soft switching
沈启辉, 任嘉成, 邵景珍, 林颖, 梁勖. 放电泵浦准分子激光充电电源工作模式分析和性能优化. 电源学报, 2026 , 24 (1) : 321 -329 . DOI: 10.13234/j.issn.2095-2805.2026.1.321
Qihui SHEN, Jiacheng REN, Jingzhen SHAO, Ying LIN, Xu LIANG. Working Mode Analysis and Performance Optimization of Discharge-pumped Excimer Laser Charging Power Supply[J]. Journal of Power Supply, 2026 , 24 (1) : 321 -329 . DOI: 10.13234/j.issn.2095-2805.2026.1.321
  • Research Equipment Development Project of Chinese Academy of Sciences(YJKYYQ20210007)
  • Basic Strengthening Plan Key Basic Research Project(2021-JCJQ-ZD-051-00-05)
  • Youth Innovation Promotion Association of Chinese Academy of Sciences(2018481)
Year 2026 volume 24 Issue 1
39
4
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Article Info
doi: 10.13234/j.issn.2095-2805.2026.1.321
  • Receive Date:2023-01-17
  • Online Date:2026-10-26
  • Published:2026-01-30
Article Data
Affiliations
History
  • Received:2023-01-17
  • Revised:2023-07-10
  • Accepted:2023-07-27
Funding
Research Equipment Development Project of Chinese Academy of Sciences(YJKYYQ20210007)
Basic Strengthening Plan Key Basic Research Project(2021-JCJQ-ZD-051-00-05)
Youth Innovation Promotion Association of Chinese Academy of Sciences(2018481)
Affiliations
    1.Anhui Institute of Optics and Fine Mechanics, Hefei Institute of Physical Science, Chinese Academy of Sciences, Hefei 230031, China
    2.Science Island Branch, Graduate School of University of Science and Technology of China, Hefei 230026, China
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表12种不同金属材料的力学参数
科
Family
属数
Number of
genus
种数
Number of
species
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Percentage of
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属
Genus
种数
Number of
species
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Percentage of total
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鹅膏菌科Amanitaceae 2 11 5.26 鹅膏菌属 Amanita 10 4.78
小菇科 Mycenaceae 2 12 5.74 丝盖伞属 Inocybe 5 2.39
多孔菌科 Polyporaceae 8 14 6.70 蜡蘑属 Laccaria 5 2.39
红菇科 Russulaceae 3 23 11.00 小皮伞属 Marasmius 6 2.87
小菇属 Mycena 11 5.26
光柄菇属 Pluteus 5 2.39
红菇属 Russula 17 8.13
栓菌属 Trametes 5 2.39
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