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Review on Gate Oxide Reliability of SiC MOSFET Devices
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Jiahao HU, Yinglun WANG, Haohao DAI, Xiaochuan DENG, Bo ZHANG
Journal of Power Supply | 2024, 22(4) : 1 - 11
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Journal of Power Supply | 2024, 22(4): 1-11
Invited Paper
Review on Gate Oxide Reliability of SiC MOSFET Devices
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Jiahao HU, Yinglun WANG, Haohao DAI, Xiaochuan DENG, Bo ZHANG
Affiliations
  • School of Integrated Circuit Science and Engineering University of Electronic Science and Technology of China Chengdu 610054 China
Published: 2024-07-30 doi: 10.13234/j.issn.2095-2805.2024.4.1
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Silicon carbide metal-oxide-semiconductor field effect transistor (SiC MOSFET) has attracted attention from the industry owing to its excellent characteristics such as high voltage, high frequency and low conduction loss. However, compared with the silicon-based IGBT, the problem of gate oxide reliability caused by the high defect density at the SiC/SiO2 gate oxide interface has become a key bottleneck restricting the large-scale applications of SiC MOSFET devices. By sorting out and analyzing the research results of the gate oxide reliability of SiC MOSFET at home and abroad in recent years, the causes of the gate oxide reliability problems at present were elaborated upon, and various commonly-used gate oxide reliability evaluation methods were summarized and compared. Finally, the gate oxide reliability of SiC MOSFET under extreme operating conditions and the development status of technologies for improving its performance were discussed.

Silicon carbide metal-oxide-semiconductor field effect transistor (SiC MOSFET)  /  gate oxide reliability  /  evaluation method  /  extreme operating condition
Jiahao HU, Yinglun WANG, Haohao DAI, Xiaochuan DENG, Bo ZHANG. Review on Gate Oxide Reliability of SiC MOSFET Devices[J]. Journal of Power Supply, 2024 , 22 (4) : 1 -11 . DOI: 10.13234/j.issn.2095-2805.2024.4.1
Year 2024 volume 22 Issue 4
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Article Info
doi: 10.13234/j.issn.2095-2805.2024.4.1
  • Receive Date:2024-03-11
  • Online Date:2025-07-21
  • Published:2024-07-30
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  • Received:2024-03-11
  • Revised:2024-06-14
  • Accepted:2024-06-24
Affiliations
    School of Integrated Circuit Science and Engineering University of Electronic Science and Technology of China Chengdu 610054 China
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表12种不同金属材料的力学参数

Family
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Number of
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Number of
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鹅膏菌科Amanitaceae 2 11 5.26 鹅膏菌属 Amanita 10 4.78
小菇科 Mycenaceae 2 12 5.74 丝盖伞属 Inocybe 5 2.39
多孔菌科 Polyporaceae 8 14 6.70 蜡蘑属 Laccaria 5 2.39
红菇科 Russulaceae 3 23 11.00 小皮伞属 Marasmius 6 2.87
小菇属 Mycena 11 5.26
光柄菇属 Pluteus 5 2.39
红菇属 Russula 17 8.13
栓菌属 Trametes 5 2.39
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