Article(id=1241719005585658347, tenantId=1146029695717560320, journalId=1146032081894723586, issueId=1241718870671675569, articleNumber=null, orderNo=null, doi=10.3981/j.issn.2097-0781.2022.04.006, pmid=null, cstr=null, oa=null, hot=null, price=null, onlineType=0, articleFormat=0, articleType=null, articleTypeStr=research-article, receivedDate=1666713600000, receivedDateStr=2022-10-26, revisedDate=1667491200000, revisedDateStr=2022-11-04, acceptedDate=null, acceptedDateStr=null, onlineDate=1673884800000, onlineDateStr=2023-01-17, pubDate=1671465600000, pubDateStr=2022-12-20, doiRegisterDate=null, doiRegisterDateStr=null, onlineIssueDate=1673884800000, onlineIssueDateStr=2023-01-17, onlineJustAcceptDate=null, onlineJustAcceptDateStr=null, onlineFirstDate=null, onlineFirstDateStr=null, sourceXml=null, magXml=null, createTime=1773978480951, creator=sys-migrate, updateTime=1773978480951, updator=sys-migrate, issue=Issue{id=1241718870671675569, tenantId=1146029695717560320, journalId=1146032081894723586, year='2022', volume='1', issue='4', pageStart='113', pageEnd='150', issueExtLink='null', onlineDate='null', pubDate='null', beforeIssueId=null, nextIssueId=null, price=null, status=1, issueComplete=1, articleOrder=1, issueType=-1, specialIssue=1, createTime=1773978448786, creator=sys-migrate, updateTime=1776075219003, updator=13041195026, preIssue=null, nextIssue=null, ext={EN=IssueExt(id=1250513362480742955, tenantId=1146029695717560320, journalId=1146032081894723586, issueId=1241718870671675569, language=EN, specialIssueTitle=Science and Technology Foresight, coverIllustrator=null, specialIssueEditor=null, specialIssueAbout=null), CN=IssueExt(id=1250513362480742956, tenantId=1146029695717560320, journalId=1146032081894723586, issueId=1241718870671675569, language=CN, specialIssueTitle=智能化弹药技术专刊, coverIllustrator=null, specialIssueEditor=null, specialIssueAbout=null)}, issueFiles=null}, startPage=81, endPage=98, ext={EN=ArticleExt(id=1241719008966267375, articleId=1241719005585658347, tenantId=1146029695717560320, journalId=1146032081894723586, language=EN, title=Technology Status and Application Outlook of Micro-Opto-Electro-Mechanical System Accelerometers, columnId=1149656489310208610, journalTitle=Science and Technology Foresight, columnName=Review and Commentary, runingTitle=null, highlight=null, articleAbstract=

A micro-opto-electro-mechanical system (MOEMS) accelerometer features high precision, electromagnetic interference resistance, good adaptability to the environment, high reliability, and easy miniaturization, which is the major development trend of inertial instruments. According to the optical measurement principle, this paper divides MOEMS accelerometers into three categories, which are based on the direct intensity modulation (IM), the undulatory property of light, and the light-matter interaction separately. Following a brief introduction to the measurement principles and typical cases, we systematically analyze the merits and demerits of the three accelerometers, as well as their potential application scenarios. Given the research progress in MOEMS accelerometers, we also present their development tendencies.

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微光机电系统（MOEMS）加速度计具有精度高、抗电磁干扰、环境适应性好、可靠性高及易小型化的特点，是未来惯性仪表的重要发展方向。根据光学检测原理对现有微光机电系统加速度计进行了分类：基于直接光强调制、基于光的波动性、基于光与物质相互作用的微光机电系统加速度计；基于测量原理和典型案例，分析了这3类微光机电系统加速度计的优缺点和适用场景；结合微光机电系统加速度计的研究进展，提出了其未来发展的趋势和重点方向。

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朱启举，研究员，西安现代控制技术研究所副总工程师，惯导事业部主任。中国兵器科技带头人。主要研究方向为智能化弹药惯性导航及组合导航技术。获国家科学技术进步奖二等奖1项，国防科学技术进步奖二等奖1项。发表论文10余篇，获授权国防专利20余项。电子信箱：zhuqiju971071@sina.com。

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朱启举，研究员，西安现代控制技术研究所副总工程师，惯导事业部主任。中国兵器科技带头人。主要研究方向为智能化弹药惯性导航及组合导航技术。获国家科学技术进步奖二等奖1项，国防科学技术进步奖二等奖1项。发表论文10余篇，获授权国防专利20余项。电子信箱：zhuqiju971071@sina.com。

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The asymmetrical anti-spring structure is used and the device is microfabricated using SOI technology. Two capacitive readout methods, namely, capacitance-to-voltage-converter (CVC) and a commercial sigma-delta modulator, are introduced for comparison in the device characterization. For both methods, the accelerometer has a frequency dynamic range of 0-158 Hz. The sensitivity and non-linearity of the sensor is 53 fF/g (21.3 mV/g), 0.03% by the sigma-delta modulator, while the CVC method is 3.78 mV/g with the non-linearity 0.04%. As for the resolution, both methods have detected the lab's background noise of 11.5 mu g/root Hz at 0.03 Hz and have exhibited the resolution of the sensor is better than 10 mu g/root Hz. Regardless of the difference in parameter selection for the circuits, the CVC method has a much lower noise floor (51.8 ng/root Hz at 1 Hz) than sigma-delta readout configuration (10 mu g/root Hz at 1 Hz). The proposed MEMS accelerometer based on anti-spring structures shows its high sensitivity and low noise performance, demonstrating its potential in seismic applications. (C) 2019 Published by Elsevier B.V.), Reference(id=1241719112745939432, tenantId=1146029695717560320, journalId=1146032081894723586, articleId=1241719005585658347, doi=10.1038/nature17397, pmid=null, pmcid=null, year=2016, volume=531, issue=7596, pageStart=614, pageEnd=617, url=https://doi.org/10.1038/nature17397, language=null, rfNumber=[12], rfOrder=11, authorNames=Middlemiss R P, Samarelli A, Paul D J, journalName=Nature, refType=null, unstructuredReference=Middlemiss R P, Samarelli A, Paul D J, et al. Measurement of the earth tides with a MEMS gravimeter[J]. 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This enables several useful features such as dynamic self-characterization and a variety of force-feedback modalities, including alteration of device dynamics in situ. These features are experimentally demonstrated with sensors that have been optoelectronically integrated into sub-cubic-millimeter volumes using an entirely surface-normal, rigid, and robust embodiment incorporating vertical cavity surface emitting lasers and integrated photodetector arrays. In addition to small form factor and high acceleration resolution, the ability to self-characterize and alter device dynamics in situ may be advantageous. 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0^TH为0级衍射光；1^ST为1级衍射光；-1^ST为-1级衍射光；2^ND为2级衍射光；-2^ND为-2级衍射光。

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d_gap为腔长；h_a为第1次刻蚀深度；h_b为第2次刻蚀深度；U₁为区域一等效相位；U₂为区域二等效相位；U₃为区域三等效相位；U₄为区域四等效相位。

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x_s为横向位移；l_m为腔长；L为腔长；x为位移量；θ为倾角；ϕ为相对相位； \widehat{a}₊、 \widehat{a}_-为两个相向传播的腔体模式； \widehat{\psi }（x）为运动轨迹；η₀为横向泵浦激光。

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PD为探测相机；PBS为偏振光滤波器。

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性能指标	MEMS加速度计				MOEMS加速度计
	电容式	压阻式	压电式	谐振式
测量原理	板间电容变化	压阻效应	压电效应	改变二阶系统固有频率	加速度→位移→光学读出位移
位移测量精度	亚纳米级	微米至纳米级	亚纳米级	亚纳米级	纳米至飞米级
噪声等效加速度	~10-6 gHz-1/2	10-3~10-6 gHz-1/2	10-6~10-7 gHz-1/2	10-6~10-7 gHz-1/2	10-3~10-7gHz-1/2（取决于不同光学原理和机械结构设计）
优点	工艺成熟，易集成，精度适中	结构和读出电路简单	较高的灵敏度和大带宽	灵敏度较高，数字输出，易集成	超高灵敏度潜力，抗电磁干扰，响应快
缺点	电磁干扰，量程较小	灵敏度低，温度系数大	低频特性差，材料不易集成	带宽有限，直流测量困难	较低技术成熟度，异构集成难度大

), ArticleFig(id=1241719110401323482, tenantId=1146029695717560320, journalId=1146032081894723586, articleId=1241719005585658347, language=CN, label=表1, caption=

MEMS加速度计与MOEMS加速度计典型性能指标对比

, figureFileSmall=null, figureFileBig=null, tableContent=

性能指标	MEMS加速度计				MOEMS加速度计
	电容式	压阻式	压电式	谐振式
测量原理	板间电容变化	压阻效应	压电效应	改变二阶系统固有频率	加速度→位移→光学读出位移
位移测量精度	亚纳米级	微米至纳米级	亚纳米级	亚纳米级	纳米至飞米级
噪声等效加速度	~10-6 gHz-1/2	10-3~10-6 gHz-1/2	10-6~10-7 gHz-1/2	10-6~10-7 gHz-1/2	10-3~10-7gHz-1/2（取决于不同光学原理和机械结构设计）
优点	工艺成熟，易集成，精度适中	结构和读出电路简单	较高的灵敏度和大带宽	灵敏度较高，数字输出，易集成	超高灵敏度潜力，抗电磁干扰，响应快
缺点	电磁干扰，量程较小	灵敏度低，温度系数大	低频特性差，材料不易集成	带宽有限，直流测量困难	较低技术成熟度，异构集成难度大

), ArticleFig(id=1241719110455849435, tenantId=1146029695717560320, journalId=1146032081894723586, articleId=1241719005585658347, language=EN, label=null, caption=null, figureFileSmall=null, figureFileBig=null, tableContent=

性能指标与潜在应用场景	基于直接光强调制	基于光的波动性			基于光与物质相互作用
		干涉腔式	FBG式	光子晶体式
光学位移 测量精度	微米至纳米级	亚纳米级	纳米级	亚纳米级	高至飞米级
噪声等效 加速度	10-3~10-9 gHz-1/2（取决于机械结构设计）	10-6~10-9 gHz-1/2	亚10-6 gHz-1/2	亚10-6 gHz-1/2	高至亚10-9 gHz-1/2
特点	结构简单，成本低廉，灵敏度适中	高集成度，高灵敏度	多点复用，多功能，灵敏度适中	高集成度，高灵敏度	较低技术成熟度，超高灵敏度
潜在应用 场景	从日常应用到地球物理应用	惯性导航，地球物理应用	日常应用，装备 健康监测	惯性导航	惯性导航，地球物理应用

), ArticleFig(id=1241719110527152604, tenantId=1146029695717560320, journalId=1146032081894723586, articleId=1241719005585658347, language=CN, label=表2, caption=

不同类别MOEMS加速度计的典型性能指标和潜在应用场景

, figureFileSmall=null, figureFileBig=null, tableContent=

性能指标与潜在应用场景	基于直接光强调制	基于光的波动性			基于光与物质相互作用
		干涉腔式	FBG式	光子晶体式
光学位移 测量精度	微米至纳米级	亚纳米级	纳米级	亚纳米级	高至飞米级
噪声等效 加速度	10-3~10-9 gHz-1/2（取决于机械结构设计）	10-6~10-9 gHz-1/2	亚10-6 gHz-1/2	亚10-6 gHz-1/2	高至亚10-9 gHz-1/2
特点	结构简单，成本低廉，灵敏度适中	高集成度，高灵敏度	多点复用，多功能，灵敏度适中	高集成度，高灵敏度	较低技术成熟度，超高灵敏度
潜在应用 场景	从日常应用到地球物理应用	惯性导航，地球物理应用	日常应用，装备 健康监测	惯性导航	惯性导航，地球物理应用

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