Article(id=1242133170754233167, tenantId=1146029695717560320, journalId=1146031591421210625, issueId=1242133153922495427, articleNumber=null, orderNo=10, doi=10.3981/j.issn.1000-7857.2015.05.008, pmid=null, cstr=null, oa=null, hot=null, price=null, onlineType=0, articleFormat=0, articleType=null, articleTypeStr=null, receivedDate=1411488000000, receivedDateStr=2014-09-24, revisedDate=1416758400000, revisedDateStr=2014-11-24, acceptedDate=null, acceptedDateStr=null, onlineDate=1427431018770, onlineDateStr=2015-03-27, pubDate=1426176000000, pubDateStr=2015-03-13, doiRegisterDate=null, doiRegisterDateStr=null, onlineIssueDate=1427431018770, onlineIssueDateStr=2015-03-27, onlineJustAcceptDate=null, onlineJustAcceptDateStr=null, onlineFirstDate=null, onlineFirstDateStr=null, sourceXml=null, magXml=null, createTime=1774077225623, creator=sys-migrate, updateTime=1774077225623, updator=sys-migrate, issue=Issue{id=1242133153922495427, tenantId=1146029695717560320, journalId=1146031591421210625, year='2015', volume='33', issue='5', pageStart='1', pageEnd='128', issueExtLink='null', onlineDate='null', pubDate='1426176000000', pubDateStr='2015-03-13', beforeIssueId=null, nextIssueId=null, price=null, status=1, issueComplete=1, articleOrder=3, issueType=-1, specialIssue=null, createTime=1774077221610, creator='sys-migrate', updateTime=1774077221610, updator='sys-migrate', preIssue=null, nextIssue=null, articleTotal=null, ext=null, issueFiles=null, downloadFileDto=null}, startPage=57, endPage=61, ext={EN=ArticleExt(id=1242133175258915698, articleId=1242133170754233167, tenantId=1146029695717560320, journalId=1146031591421210625, language=EN, title=Anti-overloading on-chip integrated MEMS suspended spiral inductor, columnId=1242116080374710456, journalTitle=Science & Technology Review, columnName=Articles, runingTitle=null, highlight=null, articleAbstract=For the presence of the suspended spiral coil, the MEMS suspended inductor has unsatisfactory mechanical performance, and use of the inductor in shock environments is restricted. Aimed at this problem, this paper designed an on-chip integrated MEMS suspended spiral inductor with a novel step-shaped spiral coil. A simple cantilever beam was used to explain the design principle, and the radio frequency performance was considered together with the mechanical performance in the design to ensure the high-Q characteristic, which is the main and inherent advantage of the MEMS suspended inductor. The fabrication process of the inductor is briefly introduced. ANSYS and HFSS were used to study the mechanical performance and the radio performance of the inductor, respectively. To compare with simulation results of the introduced inductor (denoted by ‘Inductor- A’), a conventional MEMS suspended inductor with an equal cross-section area spiral coil (denoted by ‘Indcutor-B’) and a conventional MEMS suspended inductor with an additional support pillar (denoted by ‘Inductor-C’) were also analyzed by using ANSYS and HFSS at the same time. The results show that the anti-overload capacity of Inductor-A was improved by about three times that of the Inductor-B, while radio frequency performances of both inductors were almost the same, and accordingly, the quality factor of Inductor-A was much higher than that of Inductor-C, while mechanical performances of both inductors were almost the same. The results indicate that the inductor presented in this paper has excellent radio frequency performance and mechanical performance., authors=LI Jianhua1 , LU Chongying1 , XU Lixin1 , WU Hao2 , authorsList=LI Jianhua, LU Chongying, XU Lixin, WU Hao, authorCompany=1. National Key Laboratory of Science and Technology on Electromechanical Dynamic Control, Beijing Institute of Technology, Beijing 100081, China;1 , 卢冲赢1 , 徐立新1 , 武浩2 , authorsList=李建华, 卢冲赢, 徐立新, 武浩, authorCompany=1. 北京理工大学机电动态控制重点实验室, 北京 100081;
科技导报
| 研究论文 2015, 33(5): 57-61
抗过载片上集成MEMS悬浮螺旋电感
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李建华1 , 卢冲赢1 , 徐立新1 , 武浩2
作者信息
1. 北京理工大学机电动态控制重点实验室, 北京 100081;
通讯作者:
徐立新,研究员,研究方向为目标探测与控制、射频微机电技术,电子信箱:lxxu@bit.edu.cn
Anti-overloading on-chip integrated MEMS suspended spiral inductor
Affiliations
出版时间: 2015-03-13
doi: 10.3981/j.issn.1000-7857.2015.05.008
文章导航
针对微机电系统(MEMS)悬浮电感机械性能较差问题,设计了一种应用于高过载环境的片上集成MEMS 悬浮螺旋电感。通过采用一种新颖的阶梯式螺旋线圈结构,有效减小了悬浮线圈在高过载环境中的变形与应力。利用ANSYS 和HFSS 软件对设计的电感力学性能和射频性能进行联合仿真。仿真结果表明,采用阶梯式螺旋线圈的MEMS 悬浮电感的抗过载能力比采用等截面线圈的传统MEMS 悬浮电感提高了近3 倍,并且具有相当的射频性能;与增加了支撑柱的等截面MEMS 悬浮电感相比,所设计的MEMS 悬浮电感具有与之相当的力学性能,但是其射频性能明显优于增加了支撑柱的电感。
微机电系统
/
悬浮螺旋电感
/
阶梯式螺旋线圈
/
过载
For the presence of the suspended spiral coil, the MEMS suspended inductor has unsatisfactory mechanical performance, and use of the inductor in shock environments is restricted. Aimed at this problem, this paper designed an on-chip integrated MEMS suspended spiral inductor with a novel step-shaped spiral coil. A simple cantilever beam was used to explain the design principle, and the radio frequency performance was considered together with the mechanical performance in the design to ensure the high-Q characteristic, which is the main and inherent advantage of the MEMS suspended inductor. The fabrication process of the inductor is briefly introduced. ANSYS and HFSS were used to study the mechanical performance and the radio performance of the inductor, respectively. To compare with simulation results of the introduced inductor (denoted by ‘Inductor- A’), a conventional MEMS suspended inductor with an equal cross-section area spiral coil (denoted by ‘Indcutor-B’) and a conventional MEMS suspended inductor with an additional support pillar (denoted by ‘Inductor-C’) were also analyzed by using ANSYS and HFSS at the same time. The results show that the anti-overload capacity of Inductor-A was improved by about three times that of the Inductor-B, while radio frequency performances of both inductors were almost the same, and accordingly, the quality factor of Inductor-A was much higher than that of Inductor-C, while mechanical performances of both inductors were almost the same. The results indicate that the inductor presented in this paper has excellent radio frequency performance and mechanical performance.
micro electro mechanical system
/
suspended spiral inductor
/
step-shaped spiral coil
李建华, 卢冲赢, 徐立新, 武浩.
抗过载片上集成MEMS悬浮螺旋电感.
科技导报,
2015
, 33
(5)
: 57
-61
.
DOI: 10.3981/j.issn.1000-7857.2015.05.008
LI Jianhua, LU Chongying, XU Lixin, WU Hao.
Anti-overloading on-chip integrated MEMS suspended spiral inductor[J].
Science & Technology Review ,
2015
, 33
(5)
: 57
-61
.
DOI: 10.3981/j.issn.1000-7857.2015.05.008
2015年第33卷第5期
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文章信息
doi: 10.3981/j.issn.1000-7857.2015.05.008
接收时间：2014-09-24
首发时间：2015-03-27
出版时间：2015-03-13
收稿日期：2014-09-24
修回日期：2014-11-24
通讯作者:
徐立新,研究员,研究方向为目标探测与控制、射频微机电技术,电子信箱:lxxu@bit.edu.cn
https://castjournals.cast.org.cn/joweb/kjdb/CN/10.3981/j.issn.1000-7857.2015.05.008
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2种不同金属材料的力学参数
科 属数 种数 占总种数比例 属 种数 占总种数比例 鹅膏菌科Amanitaceae 2 11 5.26 鹅膏菌属 Amanita 10 4.78 小菇科 Mycenaceae 2 12 5.74 丝盖伞属 Inocybe 5 2.39 多孔菌科 Polyporaceae 8 14 6.70 蜡蘑属 Laccaria 5 2.39 红菇科 Russulaceae 3 23 11.00 小皮伞属 Marasmius 6 2.87 小菇属 Mycena 11 5.26 光柄菇属 Pluteus 5 2.39 红菇属 Russula 17 8.13 栓菌属 Trametes 5 2.39
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