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科技导报
|研究论文
2013
, 31
(17) :
25
-28
基于SVD的MEMS微结构位移测量新算法
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胡章芳, 计超, 罗元
作者信息
A New Algorithm for MEMS Microstructure Amplitude Measurements Based on Singular Value Decomposition
HU Zhangfang, JI Chao, LUO Yuan
Affiliations
Photoelectric engineering college,The Chongqing University of Posts and Telecommunications, Chongqing 400065, China
出版时间: 2013-06-18
doi: 10.3981/j.issn.1000-7857.2013.17.003
文章导航
为实现MEMS微结构周期运动过程中平面运动位移测量及其动态特性参数的高分辨力测量,本文针对频闪成像技术获得的微结构运动图像序列,提出一种基于相位相关技术与奇异值分解技术相结合的亚像素测量方法。该方法通过相位相关技术将图像的空间坐标转换为频域坐标的参数空间,然后通过奇异值分解技术处理得到的相关矩阵,最后利用最小二乘法线性拟合,得到物体水平位移的亚像素测量结果。实验结果表明,用该方法测量MEMS微结构平面运动位移能达到亚像素精度,从而提高测量结果的稳定性和减少测量误差。
微机电系统
/
相位相关
/
奇异值分解
/
亚像素
In order to obtain the high resolution measurement dynamic parameters for Micro Electro Mechanical System (MEMS) microstructure, the microstructure of moving image sequence is acquired by using stroboscopic imaging technology. One kind method based on the phase correlation technique and Singular Value Decomposition (SVD) technique combining with sub-pixel measurement is proposed. By means of phase correlation, the method is able to transform the spatial coordinate of the images into the parameter space in frequency domain coordinates. And then through the SVD technique, a correlation matrix is gained. Finally using the least-squares fitting, the results of sub-pixel level displacement measurement are got. The experimental results indicate that with the method, the amplitude measurement of MEMS microstructure plane motion is able to reach at the precision of sub-pixel, and could effectively reduce uneven illumination effect on the measuring result, thereby increasing the stability of measurement results and reducing the measuring error.
MEMS
/
phase correlation
/
SVD
/
sub-pixel
胡章芳;计超;罗元.
基于SVD的MEMS微结构位移测量新算法.
科技导报,
2013
, 31
(17)
: 25
-28
.
DOI: 10.3981/j.issn.1000-7857.2013.17.003
HU Zhangfang;JI Chao;LUO Yuan.
A New Algorithm for MEMS Microstructure Amplitude Measurements Based on Singular Value Decomposition[J].
Science & Technology Review ,
2013
, 31
(17)
: 25
-28
.
DOI: 10.3981/j.issn.1000-7857.2013.17.003
2013年第31卷第17期
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文章信息
doi: 10.3981/j.issn.1000-7857.2013.17.003
接收时间：2012-05-07
首发时间：2013-06-18
出版时间：2013-06-18
收稿日期：2012-05-07
修回日期：2013-04-10
https://castjournals.cast.org.cn/joweb/kjdb/CN/10.3981/j.issn.1000-7857.2013.17.003
引用本文
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2种不同金属材料的力学参数
科 属数 种数 占总种数比例 属 种数 占总种数比例 鹅膏菌科Amanitaceae 2 11 5.26 鹅膏菌属 Amanita 10 4.78 小菇科 Mycenaceae 2 12 5.74 丝盖伞属 Inocybe 5 2.39 多孔菌科 Polyporaceae 8 14 6.70 蜡蘑属 Laccaria 5 2.39 红菇科 Russulaceae 3 23 11.00 小皮伞属 Marasmius 6 2.87 小菇属 Mycena 11 5.26 光柄菇属 Pluteus 5 2.39 红菇属 Russula 17 8.13 栓菌属 Trametes 5 2.39
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