Article(id=1242116899589390885, tenantId=1146029695717560320, journalId=1146031591421210625, issueId=1242116867230339865, articleNumber=null, orderNo=null, doi=null, pmid=null, cstr=null, oa=null, hot=null, price=null, onlineType=0, articleFormat=0, articleType=null, articleTypeStr=null, receivedDate=1230998400000, receivedDateStr=2009-01-04, revisedDate=1229184000000, revisedDateStr=2008-12-14, acceptedDate=null, acceptedDateStr=null, onlineDate=1233072000000, onlineDateStr=2009-01-28, pubDate=1233072000000, pubDateStr=2009-01-28, doiRegisterDate=null, doiRegisterDateStr=null, onlineIssueDate=1233072000000, onlineIssueDateStr=2009-01-28, onlineJustAcceptDate=null, onlineJustAcceptDateStr=null, onlineFirstDate=null, onlineFirstDateStr=null, sourceXml=null, magXml=null, createTime=1774073346270, creator=sys-migrate, updateTime=1774073346270, updator=sys-migrate, issue=Issue{id=1242116867230339865, tenantId=1146029695717560320, journalId=1146031591421210625, year='2009', volume='27', issue='0902', pageStart='3', pageEnd='126', issueExtLink='null', onlineDate='null', pubDate='1233072000000', pubDateStr='2009-01-28', beforeIssueId=null, nextIssueId=null, price=null, status=1, issueComplete=1, articleOrder=3, issueType=-1, specialIssue=null, createTime=1774073338558, creator='sys-migrate', updateTime=1774073338558, updator='sys-migrate', preIssue=null, nextIssue=null, articleTotal=null, ext=null, issueFiles=null, downloadFileDto=null}, startPage=99, endPage=101, ext={EN=ArticleExt(id=1242116902651237254, articleId=1242116899589390885, tenantId=1146029695717560320, journalId=1146031591421210625, language=EN, title=Capilary Stiction Action in the MEMS/NEMS, columnId=1242116810380743325, journalTitle=Science & Technology Review, columnName=Reviews, runingTitle=null, highlight=null, articleAbstract=Capillary action exists on all scales, but is particularly important on the micro-nano scale. With the rapid development and in-depth study of the MEMS/NEMS technology, the MEMS/NEMS devices have found wide applications. In the processing and applications of the MEMS/NEMS devices, due to the capillary force, stiction failures may occur in different degrees, which affects their reliability and commercialization. In view of the importance of capillary stiction with respect to the performance of MEMS/NEMS device, this paper analyzes the effects of stiction failures on the MEMS/NEMS device performance, the capillary stiction mechanisms on micro/nano scales, as well as the capillary stiction control technology., authors=null, authorsList=null, authorCompany=null, correspAuthors=null, authorNote=null, correspAuthorsNote=null, copyrightStatement=null, copyrightOwner=null, extLink=null, articleAbsUrl=null, sourceXml=null, magXml=null, pdfUrl=null, pdf=05S5mrgGymgJP7sCWgDnxQ==, pdfFileSize=303461, pdfExtLink=null, richHtmlUrl=null, mobilePdfUrl=null, reviewReport=null, pdfFirstPage=null, abstractGraph=null, abstractGraphContent=null, abstractVideo=null, citation=null, cebUrl=null, magXmlContent=null, mapNumber=null, fund=null), CN=ArticleExt(id=1242116900767990320, articleId=1242116899589390885, tenantId=1146029695717560320, journalId=1146031591421210625, language=CN, title=微/纳机电系统中的毛细黏附作用, columnId=1242116809164390686, journalTitle=科技导报, columnName=综述文章, runingTitle=null, highlight=null, articleAbstract=毛细作用在所有尺度中都存在，但是在微/纳尺度下尤为重要。随着微/纳机电加工技术的迅速发展及深入研究，微/纳机电器件得到广泛应用。在微/纳机电器件的加工和使用过程中，毛细黏附作用影响其可靠性，进而影响微/纳机电器件的商品化。鉴于毛细黏附问题对微/纳机电器件性能的重要影响，本文综述毛细黏附力对微/纳机电系统器件性能的影响效果，微/纳尺度的毛细黏附力作用规律，以及毛细黏附控制技术。, authors=朱豫晋¹,梁新建²，金 磊², authorsList=朱豫晋;梁新建;金 磊, authorCompany=1. 中国人民解放军总装备部综合计划部装备财务局2. 北京理工大学机电学院, correspAuthors=null, authorNote=null, correspAuthorsNote=梁新建, copyrightStatement=null, copyrightOwner=null, extLink=null, articleAbsUrl=null, sourceXml=null, magXml=null, pdfUrl=null, pdf=6Tm1WtSqimEtqpjIi90XuA==, pdfFileSize=303461, pdfExtLink=null, richHtmlUrl=null, mobilePdfUrl=null, reviewReport=null, pdfFirstPage=null, abstractGraph=null, abstractGraphContent=null, abstractVideo=null, citation=null, cebUrl=null, magXmlContent=null, mapNumber=null, fund=null)}, authors=null, keywords=[Keyword(id=1242116900398891560, tenantId=1146029695717560320, journalId=1146031591421210625, 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