Article(id=1242134405083374105, tenantId=1146029695717560320, journalId=1146031591421210625, issueId=1242134390566887892, articleNumber=null, orderNo=11, doi=10.3981/j.issn.1000-7857.2016.2.005, pmid=null, cstr=null, oa=null, hot=null, price=null, onlineType=0, articleFormat=0, articleType=null, articleTypeStr=null, receivedDate=1440000000000, receivedDateStr=2015-08-20, revisedDate=1451836800000, revisedDateStr=2016-01-04, acceptedDate=null, acceptedDateStr=null, onlineDate=1454555982870, onlineDateStr=2016-02-04, pubDate=1453910400000, pubDateStr=2016-01-28, doiRegisterDate=null, doiRegisterDateStr=null, onlineIssueDate=1454555982870, onlineIssueDateStr=2016-02-04, onlineJustAcceptDate=null, onlineJustAcceptDateStr=null, onlineFirstDate=null, onlineFirstDateStr=null, sourceXml=null, magXml=null, createTime=1774077519909, creator=sys-migrate, updateTime=1774077519909, updator=sys-migrate, issue=Issue{id=1242134390566887892, tenantId=1146029695717560320, journalId=1146031591421210625, year='2016', volume='34', issue='2', pageStart='1', pageEnd='332', issueExtLink='null', onlineDate='null', pubDate='1453910400000', pubDateStr='2016-01-28', beforeIssueId=null, nextIssueId=null, price=null, status=1, issueComplete=1, articleOrder=3, issueType=-1, specialIssue=null, createTime=1774077516449, creator='sys-migrate', updateTime=1774077516449, updator='sys-migrate', preIssue=null, nextIssue=null, articleTotal=null, ext=null, issueFiles=null, downloadFileDto=null}, startPage=43, endPage=45, ext={EN=ArticleExt(id=1242134409093132895, articleId=1242134405083374105, tenantId=1146029695717560320, journalId=1146031591421210625, language=EN, title=Fabrication of CIS thin film by sputtering one ternary target, columnId=1150494642224591153, journalTitle=Science & Technology Review, columnName=Exclusive, runingTitle=null, highlight=null, articleAbstract=The CIGS solar cells have drew much attention recently because of its specific advantages such as high efficiency, good performance under low illumination, resistance to radiation and flexible bandgap. The CIGS absorber layer can be fabricated by coevaporation, sputtering, electrical deposition and many other methods and sputtering is considered to be the most suitable way for large scale fabrication. In this paper CIS thin films were deposited on both SLG and Mo coated SLG substrates by sputtering one ternary target followed by post annealing. CIS thin film with good crystallinity under optimal process parameters was obtained. The effects of different substrate temperatures in deposition process and annealing temperature on the crystallization of the thin films were investigated. We found that the crystallinity of the CIS thin film deposited at 150℃ was improved after post annealing while the annealing temperature had slight effect on the crystallization of CIS thin film on Mo coated SLG substrate. The result also shows that density of the target has significant influence while sputtering ternary target., authors=WU Zhao, HONG Ruijiang, authorsList=WU Zhao, HONG Ruijiang, authorCompany=Guangdong Provincial Key Laboratory of Photovoltaic Technology, Institute for Solar Energy Systems, Sun Yat-Sen University, Guangzhou 510006, China, correspAuthors=null, authorNote=null, correspAuthorsNote=null, copyrightStatement=null, copyrightOwner=null, extLink=null, articleAbsUrl=null, sourceXml=null, magXml=null, pdfUrl=null, pdf=8RSE2lgzKvW8iRqcGWZxvw==, pdfFileSize=986001, pdfExtLink=null, richHtmlUrl=null, mobilePdfUrl=null, reviewReport=null, pdfFirstPage=null, abstractGraph=null, abstractGraphContent=null, abstractVideo=null, citation=null, cebUrl=null, magXmlContent=null, mapNumber=null, fund=null), CN=ArticleExt(id=1242134408161993273, articleId=1242134405083374105, tenantId=1146029695717560320, journalId=1146031591421210625, language=CN, title=单靶溅射法制备CIS薄膜, columnId=1242116902361830275, journalTitle=科技导报, columnName=专题论文, runingTitle=null, highlight=null, articleAbstract=通过单靶一步溅射再退火的方法,在钠钙玻璃及镀钼玻璃衬底上制备了铜铟硒(CIS)薄膜。通过优化工艺参数,获得了结晶性良好的CIS 薄膜,分析了溅射沉积薄膜时衬底温度及不同退火温度对薄膜结晶性的影响。研究发现,衬底温度为150℃时,退火获得的CIS 薄膜结晶性最好;不同的退火温度对Mo 衬底上的CIS 薄膜结晶性影响不大。结果表明,靶材的致密度对CIS 薄膜性能有较大的影响,说明一步法制备CIS 薄膜对靶材有较高的质量要求。, authors=吴兆, 洪瑞江, authorsList=吴兆, 洪瑞江, authorCompany=中山大学太阳能系统研究所, 广东省光伏技术重点实验室, 广州 510006, correspAuthors=null, authorNote=吴兆,博士研究生,研究方向为薄膜太阳电池,电子信箱:wz_sysu@163.com, correspAuthorsNote=洪瑞江,教授,研究方向为薄膜材料与薄膜技术,电子信箱:hongruij@mail.sysu.edu.cn, copyrightStatement=null, copyrightOwner=null, extLink=null, articleAbsUrl=null, sourceXml=null, magXml=null, pdfUrl=null, pdf=MJ3YobO2vj+huvT554wDIg==, pdfFileSize=986001, pdfExtLink=null, richHtmlUrl=null, mobilePdfUrl=null, reviewReport=null, pdfFirstPage=null, abstractGraph=null, abstractGraphContent=null, abstractVideo=null, citation=null, cebUrl=null, magXmlContent=null, mapNumber=null, fund=广东省科技计划项目(2014A010106009);广东省教育厅项目(2013CX2DA002))}, authors=[Author(id=1280065899730289395, tenantId=1146029695717560320, journalId=null, articleId=1242134405083374105, orderNo=null, firstName=null, middleName=null, lastName=null, nameCn=null, orcid=null, stid=null, country=null, authorPic=null, dead=null, email=null, emailSecond=null, emailThird=null, correspondingAuthor=null, authorType=null, ext={EN=AuthorExt(id=null, tenantId=null, journalId=1146031591421210625, articleId=1242134405083374105, authorId=1280065899730289395, language=EN, stringName=WU Zhao, HONG Ruijiang, firstName=null, middleName=null, lastName=null, prefix=null, suffix=null, authorComment=null, nameInitials=null, affiliation=null, department=null, xref=null, address=null, bio=null, bioImg=null, bioContent=null, aboutCorrespAuthor=null), CN=AuthorExt(id=null, tenantId=null, journalId=1146031591421210625, articleId=1242134405083374105, authorId=1280065899730289395, language=CN, stringName=吴兆, 洪瑞江, firstName=null, middleName=null, lastName=null, prefix=null, suffix=null, authorComment=null, nameInitials=null, affiliation=null, department=null, xref=null, address=null, bio=null, bioImg=null, bioContent=null, aboutCorrespAuthor=null)}, companyList=null)], keywords=[Keyword(id=1242134407759344212, tenantId=1146029695717560320, journalId=1146031591421210625, articleId=1242134405083374105, language=CN, orderNo=1, keyword=铜铟硒), Keyword(id=1242134407839031862, tenantId=1146029695717560320, journalId=1146031591421210625, articleId=1242134405083374105, language=CN, orderNo=1, keyword=磁控溅射), Keyword(id=1242134407914529335, tenantId=1146029695717560320, journalId=1146031591421210625, articleId=1242134405083374105, language=CN, orderNo=1, keyword=退火), Keyword(id=1242134407985832504, tenantId=1146029695717560320, journalId=1146031591421210625, articleId=1242134405083374105, language=CN, orderNo=1, keyword=三元靶材), Keyword(id=1242134408694674011, tenantId=1146029695717560320, journalId=1146031591421210625, articleId=1242134405083374105, language=EN, orderNo=1, keyword=CIS), Keyword(id=1242134408770171484, tenantId=1146029695717560320, journalId=1146031591421210625, articleId=1242134405083374105, language=EN, orderNo=1, keyword=magnetron sputtering), Keyword(id=1242134408858251869, tenantId=1146029695717560320, journalId=1146031591421210625, articleId=1242134405083374105, language=EN, orderNo=1, keyword=post annealing), Keyword(id=1242134408942137950, tenantId=1146029695717560320, journalId=1146031591421210625, articleId=1242134405083374105, language=EN, orderNo=1, keyword=ternary target)], refs=null, funds=null, companyList=null, figs=null, attaches=null, journal=Journal(id=1125356956822126595, delFlag=0, nameCn=科技导报, nameEn=Science & Technology Review, nameHistory1=null, nameHistory2=null, issn=1000-7857, eissn=, cn=11-1421/N, coden=null, periodic=3, language=CN, oaType=0, ccby=null, superviseOffice=null, ownerOffice=null, pubOffice=null, editorOffice=null, officeType=null, aims=null, clcCode=null, officeProv=null, officeCity=null, officeAddr=null, officeZip=null, officeEmail=null, officePhone=null, editDirector=null, officeDirector=null, officeDirectorPhone=null, officeStaffNum=null, officeEmpNum=null, coverPicUrl=wfghvu3bhh/dKxuZ+ucVHA==, journalPrice=null, startedYear=null, abbrevIsoEn=Sci Technol Rev, journalRemark=null, publicationField=null, createdTime=null, updatedTime=1774230116083, createdBy=null, updatedBy=13041195026, firstLetterCn=S, firstLetterEn=S, subjectCode=Natural Sciences, subjectName=自然科学, subjectCodeEn=Natural Sciences, subjectNameEn=null, picCn=wfghvu3bhh/dKxuZ+ucVHA==, picEn=yjSfclmpNm7ihn9NbTZ69g==, jcr=null, cjcr=null, exts=[JournalExt(id=1242774439910290156, language=CN, name=科技导报, nameHistory1=null, nameHistory2=null, managedBy=中国科学技术协会, sponsoredBy=中国科学技术协会, publishedBy=科技导报社, editorOffice=, officeProv=null, officeCity=null, officeAddr=, officeZip=, editDirector=, officeDirector=null, officePhone=null, coverPicUrl=null, journalRemark=, submitArticleUrl=null, websiteUrl=http://www.kjdb.org/CN/home, createdTime=1774230116107, updatedTime=1774230116107, createdBy=13041195026, updatedBy=13041195026, submissionGuidelinesUrl=http://www.kjdb.org/CN/column/column7.shtml, submissionAuthorUrl=https://kjdbauthor.cast.org.cn/webm, submissionEditorUrl=https://kjdbeditor.cast.org.cn/webm/, submissionReviewUrl=https://kjdbauthor.cast.org.cn/webm, submissionCeEditorUrl=https://kjdbeditor.cast.org.cn/webm/, submissionAeEditorUrl=https://kjdbeditor.cast.org.cn/webm/, option={"copyright":""}), JournalExt(id=1242774439960621805, language=EN, name=Science & Technology Review, nameHistory1=null, nameHistory2=null, managedBy=, sponsoredBy=, publishedBy=, editorOffice=, officeProv=null, officeCity=null, officeAddr=, officeZip=, editDirector=, officeDirector=null, officePhone=null, coverPicUrl=null, journalRemark=, submitArticleUrl=null, websiteUrl=http://www.kjdb.org/EN/home, createdTime=1774230116119, updatedTime=1774230116119, createdBy=13041195026, updatedBy=13041195026, submissionGuidelinesUrl=http://www.kjdb.org/EN/column/column7.shtml, submissionAuthorUrl=https://kjdbauthor.manuscriptcloud.com/login, submissionEditorUrl=https://kjdbeditor.manuscriptcloud.com/login, submissionReviewUrl=https://kjdbauthor.manuscriptcloud.com/login, submissionCeEditorUrl=https://kjdbeditor.manuscriptcloud.com/login, submissionAeEditorUrl=https://kjdbeditor.manuscriptcloud.com/login, option={"copyright":""})], databaseList=null, tenantJournalId=1146031591421210625, websiteList=[Website(id=1146104741081231361, webName=null, webTitle=null, webDomain=null, webCopyrigh=null, webIpcNo=null, seoTitle=null, seoKeywords=null, seoDescription=null, tenantJournalId=null, journalId=1146031591421210625, journalNameCn=null, journalNameEn=null, grayFlag=null, tenantId=1146029695717560320, platformId=null, journalGroupId=null, journalGroupNameCn=null, journalGroupNameEn=null, type=1, domain=https://castjournals.cast.org.cn/joweb/kjdb/CN, language=CN, createTime=1751182263881, createBy=18614031015, updateTime=1751778001962, updateBy=18614031015, name=科技导报, tplId=1146099689490845704, title=科技导报, delFlag=0, indexPage=/home, props=[WebsiteProps(id=1148021146403992296, tenantId=1146029695717560320, journalId=null, journalGroupId=null, siteId=1146104741081231361, code=articleTextType, value=kx, createTime=1751639170504, updateTime=1751639170504, creator=18614031015, updator=18614031015), WebsiteProps(id=1148021146378826469, tenantId=1146029695717560320, journalId=null, journalGroupId=null, siteId=1146104741081231361, code=banner, value=null, createTime=1751639170498, updateTime=1751639170498, creator=18614031015, updator=18614031015), WebsiteProps(id=1148021146366243556, tenantId=1146029695717560320, journalId=null, journalGroupId=null, siteId=1146104741081231361, code=logo, value=https://castjournals.cast.org.cn/joweb/kjdb/CN/file/pic?fileId=9GHSf7eGlIPH0Tv/OOdstA==, createTime=1751639170495, updateTime=1751639170495, creator=18614031015, updator=18614031015), WebsiteProps(id=1148021146395603687, tenantId=1146029695717560320, journalId=null, journalGroupId=null, siteId=1146104741081231361, code=picServerUrl, value=https://castjournals.cast.org.cn/joweb/kjdb/CN/file/pic, createTime=1751639170502, updateTime=1751639170502, creator=18614031015, updator=18614031015), WebsiteProps(id=1148021146387215078, tenantId=1146029695717560320, journalId=null, journalGroupId=null, siteId=1146104741081231361, code=staticResourcePath, value=https://castjournals.cast.org.cn/joweb/cast_kjdb_cn_619/, createTime=1751639170500, updateTime=1751639170500, creator=18614031015, updator=18614031015)]), Website(id=1146105254833139715, webName=null, webTitle=null, webDomain=null, webCopyrigh=null, webIpcNo=null, seoTitle=null, seoKeywords=null, seoDescription=null, tenantJournalId=null, journalId=1146031591421210625, journalNameCn=null, journalNameEn=null, grayFlag=null, tenantId=1146029695717560320, platformId=null, journalGroupId=null, journalGroupNameCn=null, journalGroupNameEn=null, type=1, domain=https://castjournals.cast.org.cn/joweb/kjdb/EN, language=EN, createTime=1751182386363, createBy=18614031015, updateTime=1753500121937, updateBy=18614031015, name=科技导报, tplId=1146101810881728533, title=Science & Technology Review, delFlag=0, indexPage=/home, props=[WebsiteProps(id=1155838567709528217, tenantId=1146029695717560320, journalId=null, journalGroupId=null, siteId=1146105254833139715, code=articleTextType, value=kx, createTime=1753502988984, updateTime=1753502988984, creator=18614031015, updator=18614031015), WebsiteProps(id=1155838567692750998, tenantId=1146029695717560320, journalId=null, journalGroupId=null, siteId=1146105254833139715, code=banner, value=null, createTime=1753502988980, updateTime=1753502988980, creator=18614031015, updator=18614031015), WebsiteProps(id=1155838567688556693, tenantId=1146029695717560320, journalId=null, journalGroupId=null, siteId=1146105254833139715, code=logo, value=https://castjournals.cast.org.cn/joweb/kjdb/EN/file/pic?fileId=9GHSf7eGlIPH0Tv/OOdstA==, createTime=1753502988979, updateTime=1753502988979, creator=18614031015, updator=18614031015), WebsiteProps(id=1155838567705333912, tenantId=1146029695717560320, journalId=null, journalGroupId=null, siteId=1146105254833139715, code=picServerUrl, value=https://castjournals.cast.org.cn/joweb/kjdb/EN/file/pic, createTime=1753502988983, updateTime=1753502988983, creator=18614031015, updator=18614031015), WebsiteProps(id=1155838567701139607, tenantId=1146029695717560320, journalId=null, journalGroupId=null, siteId=1146105254833139715, code=staticResourcePath, value=https://castjournals.cast.org.cn/joweb/cast_kjdb_en_623/, createTime=1753502988982, updateTime=1753502988982, creator=18614031015, updator=18614031015)])], journalTitle=科技导报, weixinUrl=null, journalUrl=null, iacademicId=null, status=1, seqNo=null, journalTitleEn=Science & Technology Review, journalPhotoCn=wfghvu3bhh/dKxuZ+ucVHA==, journalPhotoEn=yjSfclmpNm7ihn9NbTZ69g==, journalFirstLetter=S, journalRecommend=null, journalNew=null, journalCollection=1, jcrJf=null, cjcrJf=0.91, jcrJfStr=null, cjcrJfStr=null, submissionFirstDecision=null, sciSubjectClassification=null, casSubjectClassification=null, citeScore=null, totalCitationFrequency=null, icpCode=null, psCode=null, advertisingLicenseCode=null, copyrightInformation=null, country=null, option=, provinceCode=null, provinceName=null, collectFlag=false, interPubPlatform=null, interPubPlatformUrl=null), detailUrlCn=https://castjournals.cast.org.cn/joweb/kjdb/CN/10.3981/j.issn.1000-7857.2016.2.005, detailUrlEn=https://castjournals.cast.org.cn/joweb/kjdb/EN/10.3981/j.issn.1000-7857.2016.2.005, pdfUrlCn=https://castjournals.cast.org.cn/joweb/kjdb/CN/PDF/10.3981/j.issn.1000-7857.2016.2.005, pdfUrlEn=https://castjournals.cast.org.cn/joweb/kjdb/EN/PDF/10.3981/j.issn.1000-7857.2016.2.005, aliStartDate=null, aliEndDate=null, collectionFlag=false, citedCount=null, citedUrl=null, previewStatus=0, delFlag=0, hasFullText=0, orderTime=1453910400000, fullTextJson=null, articleText=null, reference=null)
科技导报
| 专题论文 2016, 34(2): 43-45
单靶溅射法制备CIS薄膜
全屏
吴兆, 洪瑞江
作者信息
通讯作者:
洪瑞江,教授,研究方向为薄膜材料与薄膜技术,电子信箱:hongruij@mail.sysu.edu.cn
Fabrication of CIS thin film by sputtering one ternary target
WU Zhao, HONG Ruijiang
Affiliations
出版时间: 2016-01-28
doi: 10.3981/j.issn.1000-7857.2016.2.005
文章导航
通过单靶一步溅射再退火的方法,在钠钙玻璃及镀钼玻璃衬底上制备了铜铟硒(CIS)薄膜。通过优化工艺参数,获得了结晶性良好的CIS 薄膜,分析了溅射沉积薄膜时衬底温度及不同退火温度对薄膜结晶性的影响。研究发现,衬底温度为150℃时,退火获得的CIS 薄膜结晶性最好;不同的退火温度对Mo 衬底上的CIS 薄膜结晶性影响不大。结果表明,靶材的致密度对CIS 薄膜性能有较大的影响,说明一步法制备CIS 薄膜对靶材有较高的质量要求。
The CIGS solar cells have drew much attention recently because of its specific advantages such as high efficiency, good performance under low illumination, resistance to radiation and flexible bandgap. The CIGS absorber layer can be fabricated by coevaporation, sputtering, electrical deposition and many other methods and sputtering is considered to be the most suitable way for large scale fabrication. In this paper CIS thin films were deposited on both SLG and Mo coated SLG substrates by sputtering one ternary target followed by post annealing. CIS thin film with good crystallinity under optimal process parameters was obtained. The effects of different substrate temperatures in deposition process and annealing temperature on the crystallization of the thin films were investigated. We found that the crystallinity of the CIS thin film deposited at 150℃ was improved after post annealing while the annealing temperature had slight effect on the crystallization of CIS thin film on Mo coated SLG substrate. The result also shows that density of the target has significant influence while sputtering ternary target.
CIS
/
magnetron sputtering
/
post annealing
/
ternary target
吴兆, 洪瑞江.
单靶溅射法制备CIS薄膜.
科技导报,
2016
, 34
(2)
: 43
-45
.
DOI: 10.3981/j.issn.1000-7857.2016.2.005
WU Zhao, HONG Ruijiang.
Fabrication of CIS thin film by sputtering one ternary target[J].
Science & Technology Review ,
2016
, 34
(2)
: 43
-45
.
DOI: 10.3981/j.issn.1000-7857.2016.2.005
2016年第34卷第2期
PDF下载
196
21
引用本文
BibTeX
文章信息
doi: 10.3981/j.issn.1000-7857.2016.2.005
接收时间：2015-08-20
首发时间：2016-02-04
出版时间：2016-01-28
收稿日期：2015-08-20
修回日期：2016-01-04
通讯作者:
洪瑞江,教授,研究方向为薄膜材料与薄膜技术,电子信箱:hongruij@mail.sysu.edu.cn
https://castjournals.cast.org.cn/joweb/kjdb/CN/10.3981/j.issn.1000-7857.2016.2.005
引用本文
BibTeX
2种不同金属材料的力学参数
科 属数 种数 占总种数比例 属 种数 占总种数比例 鹅膏菌科Amanitaceae 2 11 5.26 鹅膏菌属 Amanita 10 4.78 小菇科 Mycenaceae 2 12 5.74 丝盖伞属 Inocybe 5 2.39 多孔菌科 Polyporaceae 8 14 6.70 蜡蘑属 Laccaria 5 2.39 红菇科 Russulaceae 3 23 11.00 小皮伞属 Marasmius 6 2.87 小菇属 Mycena 11 5.26 光柄菇属 Pluteus 5 2.39 红菇属 Russula 17 8.13 栓菌属 Trametes 5 2.39
关闭全屏
BibTeX
EndNote
RefWorks
TxT
PDF下载
全屏
196
21
关闭全屏
北京市海淀区学院南路86号
010-62199257
qkjq@cast.org.cn
