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Article(id=1249045447768215952, tenantId=1146029695717560320, journalId=1249024381851058248, issueId=1249045444509246013, articleNumber=null, orderNo=null, doi=10.11823/j.issn.1674-5795.2025.06.13, pmid=null, cstr=null, oa=null, hot=null, price=null, onlineType=0, articleFormat=0, articleType=null, articleTypeStr=null, receivedDate=1757952000000, receivedDateStr=2025-09-16, revisedDate=1761235200000, revisedDateStr=2025-10-24, acceptedDate=null, acceptedDateStr=null, onlineDate=1775725240890, onlineDateStr=2026-04-09, pubDate=1766851200000, pubDateStr=2025-12-28, doiRegisterDate=null, doiRegisterDateStr=null, onlineIssueDate=1775725240890, onlineIssueDateStr=2026-04-09, onlineJustAcceptDate=null, onlineJustAcceptDateStr=null, onlineFirstDate=null, onlineFirstDateStr=null, sourceXml=null, magXml=null, createTime=1775725240890, creator=13701087609, updateTime=1775725240890, updator=13701087609, issue=Issue{id=1249045444509246013, tenantId=1146029695717560320, journalId=1249024381851058248, year='2025', volume='45', issue='6', pageStart='10', pageEnd='160', issueExtLink='null', onlineDate='null', pubDate='null', beforeIssueId=null, nextIssueId=null, price=null, status=1, issueComplete=1, articleOrder=1, issueType=1, specialIssue=null, createTime=1775725240111, creator=13701087609, updateTime=1775726845897, updator=13701087609, preIssue=null, nextIssue=null, ext={EN=IssueExt(id=1249052179722609030, tenantId=1146029695717560320, journalId=1249024381851058248, issueId=1249045444509246013, language=EN, specialIssueTitle=, coverIllustrator=null, specialIssueEditor=, specialIssueAbout=), CN=IssueExt(id=1249052179722609031, tenantId=1146029695717560320, journalId=1249024381851058248, issueId=1249045444509246013, language=CN, specialIssueTitle=, coverIllustrator=null, specialIssueEditor=, specialIssueAbout=)}, issueFiles=null}, startPage=153, endPage=160, ext={EN=ArticleExt(id=1249045448846152086, articleId=1249045447768215952, tenantId=1146029695717560320, journalId=1249024381851058248, language=EN, title=Design and application of chamber furnace for solving thin⁃film thermocouple static temperature testing challenges, columnId=1249045447231349319, journalTitle=Metrology & Measurement Technology, columnName=Metrology，Measurement and Calibration, runingTitle=null, highlight=null, articleAbstract=

Traditional test equipment struggles to meet the high⁃precision and efficient static temperature testing requirements of thin⁃film thermocouples in high⁃temperature environments. To address this issue, a chamber furnace with large⁃space and precise temperature control functions has been developed. The furnace body adopts a split⁃type multi⁃layer structure design. Its side thermal insulation components can be flexibly disassembled to eliminate installation obstructions, satisfying the testing needs of thin⁃film thermocouples with different shapes. High⁃efficiency heating is achieved using three⁃section molybdenum disilicide heating elements, combined with a water⁃cooling system to realize precise temperature control and generate a stable and reliable temperature field. A three⁃dimensional thermodynamic model was established and simulated using ANSYS Workbench 2019R3 software. The simulation results show that the temperature field at the measuring end and the temperature at the reference end of the sample meet the design expectations. Practical tests conducted with the developed box⁃type furnace indicate that the temperature fluctuation in the furnace's test coordinate system is 0.47 ℃ / 6 min, and the temperature field uniformity is better than 3 ℃ / 50 mm, which complies with the testing requirements for thin⁃film thermocouples. Tests on Au⁃Pt thin⁃film thermocouples were conducted using this box⁃type furnace, further verifying its application effectiveness. It provides important technical support for the static temperature characteristic detection of thin⁃film thermocouples.

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传统测试设备难以满足高温环境下薄膜热电偶的高精度、高效静态温度测试需求，针对此问题，研发了一款具有大空间及精准控温功能的箱式炉。炉体采用分体式多层结构设计，可灵活拆卸侧部隔热构件以消除安装遮挡，满足不同形状薄膜热电偶的测试需求。利用三段硅钼棒进行高效加热，结合水冷装置实现精准控温，产生稳定可靠的温场。基于ANSYS Workbench 2019R3软件建立三维热力学模型并进行仿真测试，结果显示：试样测量端温场及参考端温度符合设计预期。利用研制的箱式炉进行实际测试，结果显示：炉内测试坐标系中温度波动度为0.47 ℃ / 6 min，温场均匀性均优于3 ℃ / 50 mm，符合薄膜热电偶测试要求。利用该箱式炉开展Au⁃Pt薄膜热电偶测试，进一步验证了其应用有效性，为薄膜热电偶静态温度特性检测提供了重要技术保障。

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王一达
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王一达（1995－），男，工程师，主要从事接触式精密温度测量、热功率计量数据处理及应用方向的研究。2021年毕业于西北工业大学，同年于航空工业计量所工作至今。

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王一达（1995－），男，工程师，主要从事接触式精密温度测量、热功率计量数据处理及应用方向的研究。2021年毕业于西北工业大学，同年于航空工业计量所工作至今。

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王一达（1995－），男，工程师，主要从事接触式精密温度测量、热功率计量数据处理及应用方向的研究。2021年毕业于西北工业大学，同年于航空工业计量所工作至今。

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Beijing， China Standards Press， 2013. （in Chinese）, articleTitle=null, refAbstract=null), Reference(id=1249046224880477114, tenantId=1146029695717560320, journalId=1249024381851058248, articleId=1249045447768215952, doi=null, pmid=null, pmcid=null, year=2022, volume=59, issue=5, pageStart=473, pageEnd=479， 493, url=null, language=null, rfNumber=16, rfOrder=24, authorNames=张秋宁, 张志杰, 陈昊泽, journalName=微纳电子技术, refType=null, unstructuredReference=张秋宁， 张志杰， 陈昊泽. 一种新型铂铑薄膜热电偶的制备及其性能测试［J］. 微纳电子技术， 2022， 59（5）： 473-479， 493., articleTitle=一种新型铂铑薄膜热电偶的制备及其性能测试, refAbstract=null), Reference(id=1249046224964363200, tenantId=1146029695717560320, journalId=1249024381851058248, articleId=1249045447768215952, doi=null, pmid=null, pmcid=null, year=2022, volume=59, issue=5, pageStart=473, pageEnd=479， 493, url=null, language=null, rfNumber=16, rfOrder=25, authorNames=ZHANG Q N, ZHANG Z J, CHEN H Z, journalName=Micronanoelectronic Technology, refType=null, unstructuredReference=ZHANG Q N， ZHANG Z J， CHEN H Z. Preparation and performance test of a new type of platinum⁃rhodium thin⁃film thermocouple［J］. Micronanoelectronic Technology， 2022， 59（5）： 473-479， 493. （in Chinese）, articleTitle=Preparation and performance test of a new type of platinum⁃rhodium thin⁃film thermocouple, refAbstract=null), Reference(id=1249046225044054979, tenantId=1146029695717560320, journalId=1249024381851058248, articleId=1249045447768215952, doi=null, pmid=null, pmcid=null, year=2024, volume=44, issue=5, pageStart=39, pageEnd=47, url=null, language=null, rfNumber=17, rfOrder=26, authorNames=黄明镜, 刘兆钧, 李杨, journalName=计测技术, refType=null, unstructuredReference=黄明镜， 刘兆钧， 李杨， 等. ITO⁃Pt柔性薄膜热电偶的制备及其热电性能优化［J］. 计测技术， 2024， 44（5）： 39-47., articleTitle=ITO⁃Pt柔性薄膜热电偶的制备及其热电性能优化, refAbstract=null), Reference(id=1249046225106969541, tenantId=1146029695717560320, journalId=1249024381851058248, articleId=1249045447768215952, doi=null, pmid=null, pmcid=null, year=2024, volume=44, issue=5, pageStart=39, pageEnd=47, url=null, language=null, rfNumber=17, rfOrder=27, authorNames=HUANG M J, LIU Z J, LI Y, journalName=Metrology Measurement Technology, refType=null, unstructuredReference=HUANG M J， LIU Z J， LI Y， et al. Preparation of ITO⁃Pt flexible thin film thermocouples and optimization of their thermoelectric properties［J］. 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Research on thin⁃film thermocouple temperature measurement technology for turbine blade surfaces in cold effect tests［J］. Science China： Technological Sciences， 2025， 55（2）： 310-311. （in Chinese）, articleTitle=Research on thin⁃film thermocouple temperature measurement technology for turbine blade surfaces in cold effect tests, refAbstract=null), Reference(id=1249046225341850580, tenantId=1146029695717560320, journalId=1249024381851058248, articleId=1249045447768215952, doi=null, pmid=null, pmcid=null, year=2022, volume=24, issue=10, pageStart=6163, pageEnd=6168, url=null, language=null, rfNumber=19, rfOrder=30, authorNames=MA K X, CAO L L, LUO F, journalName=Physical Chemistry Chemical Physics, refType=null, unstructuredReference=MA K X， CAO L L， LUO F， et al. Highly oriented platinum / iridium thin films for high⁃temperature thermocouples with superior precision［J］. 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tenantId=1146029695717560320, journalId=1249024381851058248, articleId=1249045447768215952, language=CN, label=图6, caption=氧化铝陶瓷试片上制备的Au⁃Pt薄膜热电偶, figureFileSmall=1piHIS/AQGdXwpz5mZljXg==, figureFileBig=JId9t+o9z1cDBa04vwOMkA==, tableContent=null), ArticleFig(id=1249046219734065939, tenantId=1146029695717560320, journalId=1249024381851058248, articleId=1249045447768215952, language=EN, label=Tab.1, caption=

Box⁃type furnace temperature fluctuation test data

, figureFileSmall=null, figureFileBig=null, tableContent=
时间 / s温度 / ℃
101 597.3
201 597.3
301 597.3
401 597.4
501 597.2
601 597.3
701 597.3
801 597.2
901 597.4
1001 597.3
1101 597.3
1201 597.2
1301 597.2
1401 597.3
1501 597.3
1601 597.2
1701 597.4
1801 597.2
1901 597.2
2001 597.2
2101 597.2
2201 597.2
2301 597.2
2401 597.2
2501 597.1
2601 597.1
2701 597.1
2801 597.1
2901 597.0
3001 597.1
3101 597.0
3201 597.0
3301 597.0
3401 597.0
3501 596.9
3601 596.9
), ArticleFig(id=1249046219826340630, tenantId=1146029695717560320, journalId=1249024381851058248, articleId=1249045447768215952, language=CN, label=表1, caption=

箱式炉温度波动度测试数据

, figureFileSmall=null, figureFileBig=null, tableContent=
时间 / s温度 / ℃
101 597.3
201 597.3
301 597.3
401 597.4
501 597.2
601 597.3
701 597.3
801 597.2
901 597.4
1001 597.3
1101 597.3
1201 597.2
1301 597.2
1401 597.3
1501 597.3
1601 597.2
1701 597.4
1801 597.2
1901 597.2
2001 597.2
2101 597.2
2201 597.2
2301 597.2
2401 597.2
2501 597.1
2601 597.1
2701 597.1
2801 597.1
2901 597.0
3001 597.1
3101 597.0
3201 597.0
3301 597.0
3401 597.0
3501 596.9
3601 596.9
), ArticleFig(id=1249046219973141277, tenantId=1146029695717560320, journalId=1249024381851058248, articleId=1249045447768215952, language=EN, label=Tab.2, caption=

X⁃axis temperature field uniformity test data of box⁃type furnace

, figureFileSmall=null, figureFileBig=null, tableContent=
X轴位置 / mm测量温度 / ℃温度均值 / ℃
第1次第2次
-251 596.31 596.21 596.3
01 596.91 596.41 596.6
251 597.91 597.61 597.7
), ArticleFig(id=1249046220073804581, tenantId=1146029695717560320, journalId=1249024381851058248, articleId=1249045447768215952, language=CN, label=表2, caption=

箱式炉X轴温场均匀性测试数据

, figureFileSmall=null, figureFileBig=null, tableContent=
X轴位置 / mm测量温度 / ℃温度均值 / ℃
第1次第2次
-251 596.31 596.21 596.3
01 596.91 596.41 596.6
251 597.91 597.61 597.7
), ArticleFig(id=1249046220182856491, tenantId=1146029695717560320, journalId=1249024381851058248, articleId=1249045447768215952, language=EN, label=Tab.3, caption=

Y⁃axis temperature field uniformity test data of box⁃type furnace

, figureFileSmall=null, figureFileBig=null, tableContent=
Y轴位置 / mm测量温度 / ℃温度均值 / ℃
第1次第2次
-251 590.21 590.21 590.2
01 591.11 590.71 590.9
251 590.11 590.01 590.1
), ArticleFig(id=1249046220258353968, tenantId=1146029695717560320, journalId=1249024381851058248, articleId=1249045447768215952, language=CN, label=表3, caption=

箱式炉Y轴温场均匀性测试数据

, figureFileSmall=null, figureFileBig=null, tableContent=
Y轴位置 / mm测量温度 / ℃温度均值 / ℃
第1次第2次
-251 590.21 590.21 590.2
01 591.11 590.71 590.9
251 590.11 590.01 590.1
), ArticleFig(id=1249046220329657139, tenantId=1146029695717560320, journalId=1249024381851058248, articleId=1249045447768215952, language=EN, label=Tab.4, caption=

Z⁃axis temperature field uniformity test data of box⁃type furnace

, figureFileSmall=null, figureFileBig=null, tableContent=
Z轴位置 / mm测量温度 / ℃温度均值 / ℃
第1次第2次
-251 590.61 591.21 590.9
01 589.91 590.31 590.1
251 589.51 589.51 589.5
), ArticleFig(id=1249046220426126136, tenantId=1146029695717560320, journalId=1249024381851058248, articleId=1249045447768215952, language=CN, label=表4, caption=

箱式炉Z轴温场均匀性测试数据

, figureFileSmall=null, figureFileBig=null, tableContent=
Z轴位置 / mm测量温度 / ℃温度均值 / ℃
第1次第2次
-251 590.61 591.21 590.9
01 589.91 590.31 590.1
251 589.51 589.51 589.5
), ArticleFig(id=1249046220610675517, tenantId=1146029695717560320, journalId=1249024381851058248, articleId=1249045447768215952, language=EN, label=Tab.5, caption=

Test data of Au⁃Pt thin⁃film thermocouples

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温度 / ℃薄膜热电偶电势值 / mV
测试参考端标准热电偶
80091.6808.1311.549 3
900101.8911.8513.825 3
), ArticleFig(id=1249046220711338818, tenantId=1146029695717560320, journalId=1249024381851058248, articleId=1249045447768215952, language=CN, label=表5, caption=

Au⁃Pt薄膜热电偶测试数据

, figureFileSmall=null, figureFileBig=null, tableContent=
温度 / ℃薄膜热电偶电势值 / mV
测试参考端标准热电偶
80091.6808.1311.549 3
900101.8911.8513.825 3
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解决薄膜热电偶静态温度测试难题的箱式炉设计及应用研究
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王一达 1 , 田青云 2 , 陈勇 3 , 孔祥雪 1 , 马可欣 2 , 王素杰 2 , 史继源 2
计测技术 | 计量、测试与校准 2025,45(6): 153-160
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计测技术 | 计量、测试与校准 2025, 45(6): 153-160
解决薄膜热电偶静态温度测试难题的箱式炉设计及应用研究
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王一达1, 田青云2, 陈勇3, 孔祥雪1, 马可欣2, 王素杰2, 史继源2
作者信息
  • 1中国航空工业集团公司北京长城计量测试技术研究所，北京100095
  • 2中国航发北京航空材料研究院，北京100095
  • 3长三角台州创新中心，浙江台州318000

    • 王一达（1995－），男，工程师，主要从事接触式精密温度测量、热功率计量数据处理及应用方向的研究。2021年毕业于西北工业大学，同年于航空工业计量所工作至今。

通讯作者:

王一达
Design and application of chamber furnace for solving thin⁃film thermocouple static temperature testing challenges
Yida WANG1, Qingyun TIAN2, Yong CHEN3, Xiangxue KONG1, Kexin MANG2, Sujie WANG2, Jiyuan SHI2
Affiliations
  • 1AVIC Changcheng Institute of Metrology Measurement, Beijing100095, China
  • 2Beijing Institute of Aeronautical Materials, Beijing100095, China
  • 3Thermal Energy Control System Research and Application Center, Taizhou318000, China
出版时间: 2025-12-28 doi: 10.11823/j.issn.1674-5795.2025.06.13
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摘要
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传统测试设备难以满足高温环境下薄膜热电偶的高精度、高效静态温度测试需求，针对此问题，研发了一款具有大空间及精准控温功能的箱式炉。炉体采用分体式多层结构设计，可灵活拆卸侧部隔热构件以消除安装遮挡，满足不同形状薄膜热电偶的测试需求。利用三段硅钼棒进行高效加热，结合水冷装置实现精准控温，产生稳定可靠的温场。基于ANSYS Workbench 2019R3软件建立三维热力学模型并进行仿真测试，结果显示：试样测量端温场及参考端温度符合设计预期。利用研制的箱式炉进行实际测试，结果显示：炉内测试坐标系中温度波动度为0.47 ℃ / 6 min，温场均匀性均优于3 ℃ / 50 mm，符合薄膜热电偶测试要求。利用该箱式炉开展Au⁃Pt薄膜热电偶测试，进一步验证了其应用有效性，为薄膜热电偶静态温度特性检测提供了重要技术保障。

箱式炉  /  薄膜热电偶  /  静态温度  /  高精度测试  /  塞贝克效应  /  温度波动度  /  温场均匀性  /  热力学仿真

Traditional test equipment struggles to meet the high⁃precision and efficient static temperature testing requirements of thin⁃film thermocouples in high⁃temperature environments. To address this issue, a chamber furnace with large⁃space and precise temperature control functions has been developed. The furnace body adopts a split⁃type multi⁃layer structure design. Its side thermal insulation components can be flexibly disassembled to eliminate installation obstructions, satisfying the testing needs of thin⁃film thermocouples with different shapes. High⁃efficiency heating is achieved using three⁃section molybdenum disilicide heating elements, combined with a water⁃cooling system to realize precise temperature control and generate a stable and reliable temperature field. A three⁃dimensional thermodynamic model was established and simulated using ANSYS Workbench 2019R3 software. The simulation results show that the temperature field at the measuring end and the temperature at the reference end of the sample meet the design expectations. Practical tests conducted with the developed box⁃type furnace indicate that the temperature fluctuation in the furnace's test coordinate system is 0.47 ℃ / 6 min, and the temperature field uniformity is better than 3 ℃ / 50 mm, which complies with the testing requirements for thin⁃film thermocouples. Tests on Au⁃Pt thin⁃film thermocouples were conducted using this box⁃type furnace, further verifying its application effectiveness. It provides important technical support for the static temperature characteristic detection of thin⁃film thermocouples.

box⁃type furnace  /  thin⁃film thermocouple  /  static temperature  /  high⁃precision testing  /  Seebeck effect  /  temperature fluctuation  /  temperature field uniformity  /  thermodynamic simulation
王一达, 田青云, 陈勇, 孔祥雪, 马可欣, 王素杰, 史继源. 解决薄膜热电偶静态温度测试难题的箱式炉设计及应用研究. 计测技术, 2025 , 45 (6) : 153 -160 . DOI: 10.11823/j.issn.1674-5795.2025.06.13
Yida WANG, Qingyun TIAN, Yong CHEN, Xiangxue KONG, Kexin MANG, Sujie WANG, Jiyuan SHI. Design and application of chamber furnace for solving thin⁃film thermocouple static temperature testing challenges[J]. Metrology & Measurement Technology, 2025 , 45 (6) : 153 -160 . DOI: 10.11823/j.issn.1674-5795.2025.06.13
正文
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0　引言
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在航空航天、工业自动化及能源化工等领域，精准感知极端工况下的温度对于保障装备可靠性、优化运行效能至关重要。以航空发动机为例，其涡轮叶片等部件需要在高温、高压以及高转速耦合工况下运行，这些部件的温度监测数据直接影响航空发动机热防护设计、燃烧效率优化及寿命预测。传统侵入式测温技术存在破坏部件结构完整性、响应滞后、易受振动偏移干扰等不足，已无法适配新一代航空发动机双层薄壁叶片、陶瓷基复合材料部件的测温需求。薄膜热电偶［1-3］具有体积小、响应速度快、曲面贴合性好等优点，在新一代航空发动机关键部件温度测量领域获得了重要应用。
薄膜热电偶的静态温度特性是衡量其测量精度与可靠性的核心指标。目前，薄膜热电偶的静态温度特性测试方法包括管式炉校准法、盐浴法、激光校准法等。
管式炉校准法的原理：基于管式炉的狭长腔室构建均匀热场，将被测薄膜热电偶与标准热电偶的测量端共同置于该均匀热场中，通过对比二者热电势输出实现量值溯源。该方法操作流程成熟、设备成本相对较低，适用于规则片状、丝状且参考端与测量端间距较大的薄膜热电偶的校准，但存在以下局限性：① 管式炉的腔室结构狭长，无法装夹涡轮扇叶状、螺旋状等特殊形状的薄膜热电偶，不适用于此类薄膜热电偶的温度特性测试；② 炉口区域与外界环境的直接热交换导致该区域轴向温度梯度误差常超出计量允许范围，使得校准参考端与测量端间距较短的薄膜热电偶时误差较大；③ 参考端缺乏有效隔热与控温手段，易受炉体热辐射影响产生温度漂移，影响静态温度特性测试的准确性。
盐浴法的原理：利用熔融态的特定盐类（如硝酸盐、硫酸盐混合物）构建恒温环境，将薄膜热电偶的测量端与标准热电偶共同浸入该盐浴环境中，待温度稳定后，通过对比两者的输出热电势以实现校准。该方法能够实现中低温条件下的薄膜热电偶高精度校准，但在高温环境中熔融盐对航空用贵金属薄膜的腐蚀性较强，因此不适用于高温条件下的贵金属薄膜热电偶静态温度特性测试。
激光校准法的原理：采用脉冲激光或连续激光作为热源，快速、精准地照射薄膜热电偶的测量端，激光能量被薄膜热电偶吸收后产生瞬时温度变化，形成可控的热响应，从而实现校准。该方法具有非接触测量的优势，但设备成本高昂且仅适用于单点校准，不适用于航空领域大批量薄膜热电偶的静态温度特性测试。
为满足高温环境下薄膜热电偶的高精度、高效静态温度测试需求，本研究团队设计了一款具有较大内部空间且能产生稳定温场的箱式炉。炉内部采用保温构件拼装设计方案，便于固定不同形状、尺寸的薄膜热电偶。利用三段式硅钼棒加热系统与水冷装置实现高效温度控制，产生均匀可靠的温场。基于ANSYS Workbench 2019R3软件构建热力学模型进行仿真实验，在此基础上研制实体箱式炉并开展温度波动度、温场均匀性等测试，验证其实际应用效果。
1　测试原理及要求
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热电偶测温基于塞贝克效应实现［4-5］，当2种不同材料的导体A和导体B组成闭合回路时，若测量端接点处温度为TT，参考端接点处温度为ToTo，则回路中将产生热电势EAB(T,To)EAB(T,To)，其数学表达式为
EABT, To=∫TToSA-SBdT
式中：SASA和SBSB分别为导体A和导体B的塞贝克系数。在一定温度范围内，热电势与温差呈单值函数关系，当ToTo恒定（实验中通常设置为0 ℃）时，热电势仅随TT变化，即
EABT, To=EABT-EABTo
开展薄膜热电偶静态温度测试时，将被测薄膜热电偶与标准热电偶的测量端同步置于已知温度的均匀热场中，维持参考端温度恒定，根据热电势输出数据，计算得到被测热电偶的微分电势，进而确定其测量误差［6-9］。相较普通热电偶测试，薄膜热电偶测试存在特殊技术要求［10-11］：① 应充分考虑基底材料（例如聚酰亚胺、陶瓷等）的耐热性限制，须严格控制参考端温度（本文中参考端温度不超过200 ℃）；② 应保证炉口测量端区域温场均匀性符合薄膜热电偶测试要求（本文中温场均匀性优于3 ℃ / 50 mm）；③ 应充分考虑高温条件下薄膜热电偶的结构脆弱性，采用无应力托持方式，避免薄膜热电偶损伤变形。
2　箱式炉设计
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本研究团队设计的箱式炉整体结构如图1所示，其包括炉体、炉门、加热系统、水冷装置等部分。炉内有效空间达200 mm × 200 mm × 200 mm，可容纳涡轮扇叶状、螺旋状等特殊形状的薄膜热电偶。
2.1　炉体、炉门结构设计
炉体采用分体式多层结构设计，可通过拆卸侧部隔热构件消除特殊形状试样（如涡轮扇叶状）的安装遮挡，实现无干涉装卸；同时，可灵活调整装配方式，适配不同长度试样的定位需求。炉体外壳选用不锈钢钣金制造，可有效承受炉内高温带来的热应力。炉体内部设置耐高温钢板与隔热砖组成的双层隔热体系，耐高温钢板的作用是支撑内层隔热材料并减少热辐射；隔热砖的作用是降低炉内热量向外界环境传导造成的能量损失。根据工业炉热损失计算理论，热流量QQ的表达式为
Q=λA·ΔTδ
式中：λλ为材料导热系数，AA为传热面积，ΔTΔT为温差，δδ为材料厚度。当炉内温度为1 600 ℃、环境温度为30 ℃时，该双层隔热体系可将炉体表面温度控制在70 ℃以内，符合实验室安全操作规范要求，可避免操作人员烫伤。
炉门采用不锈钢钣金、中层隔热砖、内层隔热砖3层结构设计，且为侧开门模式，结合前段加热补偿机制，使靠近炉口处温场均匀性优于3 ℃ / 50 mm。
2.2　加热系统设计
加热系统采用三段式硅钼棒设计方案，即在前、中、后3段加热区域采用“4-2-2”硅钼棒排布。前段加热区域（炉口附近）与外界存在持续热交换，热损失量显著高于其他区域，若采用相同数量的加热元件，易导致炉口温度偏低、温场不均。因此在前段加热区域设置4根硅钼棒，通过提升加热功率补偿炉口热损失，确保测量端处于均匀热场。中、后段加热区域被双层隔热体系包裹，热损失较小，各设置2根同型号硅钼棒即可维持温度恒定，同时避免中、后段温度过高影响参考端温度，降低参考端温度漂移风险。
选定的硅钼棒工作温度为500 ~ 1 700 ℃，覆盖薄膜热电偶500 ~ 1 600 ℃的校准温度，且该型硅钼棒在1 600 ℃高温下仍具有良好的功率稳定性。通过温控仪实现3段温度控制，可根据炉内不同区域的热损失情况精准调整加热功率，最终在炉腔内部形成稳定的均匀热场，该区域内任意2点的温差不超过3 ℃，满足薄膜热电偶测量端对均匀热场的需求。
炉腔底部设置可调节支架，其能够安全稳固地托持薄膜热电偶，并可根据薄膜热电偶的不同形制便捷地调整位置及高度，降低因基底形变产生的应力影响，防止高温条件下基底损坏。
2.3　水冷装置设计
水冷装置为参考端控温核心部件，其结构如图2所示，能够实现快速散热、精准测温的功能。水冷夹套选用紫铜材料制作，紫铜在常温条件下的导热系数为386 W / （m·K），可快速导出参考端吸收的炉体辐射热，避免参考端温度超过200 ℃。采用将循环水泵接入水冷机组的设计方式，避免因水温波动导致参考端温度漂移。
参考端固定区域内置Pt100铂电阻温度传感器，采用四引线法接入数据采集系统。若采用传统两引线法接入，引线电阻会引入测量误差，无法满足参考端温度测量误差不超过± 0.1 ℃的要求；而四引线法通过“独立电流回路与电压回路”设计，可完全消除引线电阻对测量结果的影响，实现参考端温度的实时监测与动态补偿。
3　仿真分析
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为验证箱式炉温度场特性，基于ANSYS Workbench 2019R3建立三维热力学仿真模型［12-13］，针对试样区域温度进行仿真。仿真条件设置：试样长148 mm，宽19 mm，厚1.95 mm；炉体内壁施加1 600 ℃温度载荷；水冷装置通入25 ℃循环水。
陶瓷试样温度分布如图3所示。由图3（a）可知：试样测量端（距水冷装置50 mm以上区域）温度集中在1 590 ~ 1 600 ℃，温度梯度优于5 ℃ / 50 mm，满足均匀热场要求。根据图3（b）可知：参考端（距水冷装置10 mm以内区域）温度稳定在120 ~ 150 ℃，符合低于200 ℃的要求，验证了水冷控温的有效性。
为分析箱式炉升温过程中试样的动态响应特性，在试样上选取6个特征点进行时间⁃温度仿真［14］。陶瓷试验仿真点分布如图4所示，1号点距测量端0 mm，2号点距测量端30 mm，3号点距测量端60 mm， 4号点距参考端60 mm，5号点距参考端30 mm，6号点距参考端0 mm。
时间⁃温度仿真结果如图5所示。试样放入箱式炉升温至1 600 ℃过程中，1号点、2号点处温度在50 s时超过1 450 ℃；5号点、6号点处温度始终低于200 ℃，完全满足校准实验对参考端温度的控制要求。过渡区域形成明显温度梯度，有效阻断炉内高温向参考端的热传导。
4　应用验证
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4.1　箱式炉性能指标验证
参考JJG 141-2013《工作用贵金属热电偶》［15］，对箱式炉关键性能指标进行测试验证。炉体升温至1 600 ℃并运行30 min后，参考端温度实测值为89.8 ℃，满足不超过200 ℃的阈值要求。
在箱式炉中放入陶瓷基底薄膜热电偶试样，保证试样测量端位于炉腔中心位置，然后放置B型标准热电偶，使B型标准热电偶测量端与试样测量端位置尽可能保持一致，对温度波动度进行测试。1 600 ℃恒温条件下，以10 s为采样间隔连续采集6 min数据，测试结果如表1所示。数据显示：最高温度为1 597.4 ℃，最低温度为1 596.9 ℃，计算得到温度波动度为0.47 ℃ / 6 min，符合薄膜热电偶测试要求。
在炉中放入陶瓷基底薄膜热电偶试样，以炉腔内试样测试端位置为原点O（记为0 mm位置点）建立坐标系，分别在X、Y、Z轴-25、0、25 mm位置点处放入B型标准热电偶，对温场均匀性进行测试，结果如表2至表4所示。利用表2至表4数据计算可知：X、Y、Z轴最大温差分别为1.7、1.0、1.4 ℃；测试坐标系内温场均匀性优于3 ℃ / 50 mm，符合薄膜热电偶的测试要求［16-17］。
4.2　Au⁃Pt薄膜热电偶测试
合金型薄膜热电偶在航空发动机恶劣应用工况下经常出现因敏感层成分偏析、氧化导致的性能衰减。基于此，中国航发北京航空材料研究院创新性地开展了贵金属单质型薄膜热电偶的研究，从根本上避免了薄膜材料在高温下的成分偏析，提升了薄膜热电偶的测温精度和高温稳定性［18-19］。以中国航发北京航空材料研究院采用直流磁控溅射技术在氧化铝陶瓷试片制备的Au⁃Pt薄膜热电偶原理件作为参照热电偶，如图6所示。薄膜热电偶测点处薄膜热电臂宽度约为2 mm，测点面积约为4 mm2。
利用箱式炉对制备的Au⁃Pt薄膜热电偶进行测试，选取温度点800 ℃和900 ℃，采用铂电阻温度传感器对箱式炉内薄膜热电偶的参考端温度进行实时监测，同时以S型标准热电偶的测量值作为温度基准，将薄膜热电偶的输出热电势与该基准温度对应的理论热电势进行对比。Au⁃Pt薄膜热电偶测试数据如表5所示，计算可知：该Au⁃Pt薄膜热电偶在测试点的微分电势为0.024 mV / ℃。综上所述，箱式炉能够有效完成薄膜热电偶的测试工作。
5　结论
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针对高温环境下薄膜热电偶的高精度、高效静态温度测试需求，本研究团队设计了一款内部有效空间达200 mm × 200 mm × 200 mm且能够产生可靠温场的箱式炉。采用三段式硅钼棒“4-2-2”排布加热系统，高效产生热量并补偿炉口热损失。利用紫铜水冷夹套与四引线Pt100铂电阻组合，精准调控炉内温度并维持温场恒定。热力学仿真分析结果显示：箱式炉加热至1 600 ℃时，试样测量端温度符合测试要求；参考端加温50 s后温度低于200 ℃，符合设计要求。研制实体箱式炉并开展实际测试，结果表明：在6 min测试周期内，炉内温度波动低于0.5 ℃，测试坐标系内温场均匀性均优于3 ℃ / 50 mm。利用该箱式炉对某应用于航空发动机的Au⁃Pt薄膜热电偶进行性能测试，结果显示：该箱式炉可满足测量端与参考端距离较短的薄膜热电偶的测试需求。研究成果为短型薄膜热电偶的测试工作提供了更好的解决方案，为推动航空领域温度计量校准技术发展提供了有力支撑。
未来将选取不同类型的薄膜热电偶，分别用本箱式炉与符合JJG 141-2013《工作用贵金属热电偶》要求的管式炉进行平行校准，对比热电势输出、温度测量误差、测试重复性等指标，为2种设备互补应用提供数据支撑。
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doi: 10.11823/j.issn.1674-5795.2025.06.13
  • 接收时间：2025-09-16
  • 首发时间：2026-04-09
  • 出版时间：2025-12-28
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  • 收稿日期：2025-09-16
  • 修回日期：2025-10-24
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    1中国航空工业集团公司北京长城计量测试技术研究所，北京100095
    2中国航发北京航空材料研究院，北京100095
    3长三角台州创新中心，浙江台州318000

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2种不同金属材料的力学参数
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鹅膏菌科Amanitaceae 2 11 5.26 鹅膏菌属 Amanita 10 4.78
小菇科 Mycenaceae 2 12 5.74 丝盖伞属 Inocybe 5 2.39
多孔菌科 Polyporaceae 8 14 6.70 蜡蘑属 Laccaria 5 2.39
红菇科 Russulaceae 3 23 11.00 小皮伞属 Marasmius 6 2.87
小菇属 Mycena 11 5.26
光柄菇属 Pluteus 5 2.39
红菇属 Russula 17 8.13
栓菌属 Trametes 5 2.39
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