Article(id=1321927510665834621, tenantId=1146029695717560320, journalId=1220038251117760515, issueId=1321926982078681131, articleNumber=null, orderNo=null, doi=10.11868/j.issn.1001-4381.2025.000133, pmid=null, cstr=32421.14.j.issn.1001-4381.2025.000133, oa=null, hot=null, price=null, onlineType=0, articleFormat=0, articleType=null, articleTypeStr=research-article, receivedDate=1741708800000, receivedDateStr=2025-03-12, revisedDate=null, revisedDateStr=null, acceptedDate=1744732800000, acceptedDateStr=2025-04-16, onlineDate=1793101678767, onlineDateStr=2026-10-27, pubDate=1771516800000, pubDateStr=2026-02-20, doiRegisterDate=null, doiRegisterDateStr=null, onlineIssueDate=1793101678767, onlineIssueDateStr=2026-10-27, onlineJustAcceptDate=null, onlineJustAcceptDateStr=null, onlineFirstDate=null, onlineFirstDateStr=null, sourceXml=null, magXml=null, createTime=1793101678767, creator=13701087609, updateTime=1793101678767, updator=13701087609, issue=Issue{id=1321926982078681131, tenantId=1146029695717560320, journalId=1220038251117760515, year='2026', volume='54', issue='2', pageStart='1', pageEnd='311', issueExtLink='null', onlineDate='null', pubDate='1771516800000', pubDateStr='2026-02-20', beforeIssueId=null, nextIssueId=null, price=null, status=1, issueComplete=1, articleOrder=1, issueType=-1, specialIssue=null, createTime=1793101552742, creator='13701087609', updateTime=1793101552742, updator='13701087609', preIssue=null, nextIssue=null, articleTotal=null, ext=null, issueFiles=null, downloadFileDto=null}, startPage=285, endPage=293, ext={EN=ArticleExt(id=1321927510888132734, articleId=1321927510665834621, tenantId=1146029695717560320, journalId=1220038251117760515, language=EN, title=Preparation of highly preferred （110） optical-grade diamond films under CO₂ atmosphere, columnId=1220689384450478826, journalTitle=Journal of Materials Engineering, columnName=RESEARCH ARTICLE, runingTitle=null, highlight=null, articleAbstract=

Diamond films prepared by conventional microwave plasma chemical vapor deposition （MPCVD） often face issues such as low growth rates，disordered grain orientations，and non-diamond phase defects，which limit further enhancement of their optical properties. This study introduces CO₂ as an auxiliary gas to deposit high-quality diamond films using the MPCVD method. Diamond film deposition is conducted by introducing different flow rates of CO₂， and the optical emission characteristics of the plasma under varying CO₂ flow rates are measured using optical emission spectroscopy （OES）. The crystallinity quality， grain orientation， surface morphology， and growth rate of the diamond films are characterized by XRD， Raman， and SEM. The results indicate that adding a certain amount of CO₂ （flow ratio of CO₂/CH₄=2/6） is conducive to obtaining diamond films with a high （110） preferred orientation （I₂₂₀/I₁₁₁=18.19）. An excessively high CO₂/CH₄ flow ratio intensifies the etching effect of oxygen-containing groups， reducing the degree of preferential grain orientation. The addition of an appropriate amount of CO₂ significantly improves the crystalline quality of the diamond， with the full width at half maximum （FWHM） of the diamond characteristic peak decreasing from 12.68 cm^-1 to 8.26 cm^-1. Furthermore， the addition of a suitable amount of CO₂ promotes diamond growth to some extent. Under the optimized flow ratio condition of CO₂/CH₄=2/6， this study successfully prepares a high （110） orientation （I₂₂₀/I₁₁₁=18.19） diamond film with a growth rate of 4 μm/h. After polishing， the self-standing diamond film achieves a transmittance of 71% at the 10.6 μm wavelength. Its transmittance in the long-wave infrared band approaches the theoretical value， meeting the requirements for applications such as long-wave infrared optical windows and extreme ultraviolet lithography machine windows.

, authors=Ao YANG, Yuchen LIU, Zhijian GUO, Liangxian CHEN, Jinlong LIU, Junjun WEI, Chengming LI, authorsList=Ao YANG, Yuchen LIU, Zhijian GUO, Liangxian CHEN, Jinlong LIU, Junjun WEI, Chengming LI, authorCompany=null, correspAuthors=Liangxian CHEN, Chengming LI, authorNote=null, correspAuthorsNote=null, copyrightStatement=null, copyrightOwner=null, extLink=null, articleAbsUrl=null, sourceXml=null, magXml=null, pdfUrl=null, pdf=null, pdfFileSize=null, pdfExtLink=null, richHtmlUrl=null, mobilePdfUrl=null, reviewReport=null, pdfFirstPage=null, abstractGraph=null, abstractGraphContent=null, abstractVideo=null, citation=null, cebUrl=null, magXmlContent=null, mapNumber=null, fund=null), CN=ArticleExt(id=1321927514419736721, articleId=1321927510665834621, tenantId=1146029695717560320, journalId=1220038251117760515, language=CN, title=CO₂气氛下高择优取向（110）光学级金刚石膜的制备, columnId=1220689384622445292, journalTitle=材料工程, columnName=研究论文, runingTitle=null, highlight=null, articleAbstract=

传统微波等离子体化学气相沉积（microwave plasma chemical vapor deposition，MPCVD）方法制备的金刚石膜常面临生长速率低、晶粒取向杂乱及非金刚石相缺陷等问题，限制了其光学性能的进一步提升。本研究将CO₂作为辅助气体，采用MPCVD方法沉积了高质量金刚石薄膜，并通入不同流量的CO₂进行沉积，利用光学发射光谱（optical emission spectroscopy，OES）仪测量不同CO₂流量下等离子体的光学发射特征。通过XRD、Raman、SEM对金刚石膜结晶质量、晶粒取向、表面形貌和生长速率进行表征。结果表明：加入一定量的CO₂（流量比CO₂/CH₄=2/6）有利于获得高（110）择优取向（I₂₂₀/I₁₁₁=18.19）金刚石薄膜，过高的CO₂/CH₄流量比会增强含氧基团的刻蚀作用，降低晶粒的择优程度；适量CO₂的加入对于金刚石结晶质量有较大提升，金刚石特征峰半峰全宽从12.68 cm^-1降低至8.26 cm^-1；适量添加CO₂对金刚石生长有一定的促进作用。本研究在优化的流量比CO₂/CH₄=2/6的条件下，获得了生长速率4 μm/h的高（110）取向（I₂₂₀/I₁₁₁=18.19）金刚石薄膜。金刚石自支撑膜经过抛光后在10.6 μm波段的透过率达到71%，在长波红外波段其透过率接近理论值，可满足长波红外光学窗口和极紫外光刻机窗口的需求。

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articleTitle=Diamond deposition on Mo with thermal stress buffer layer coated mild steel substrate by combustion flame CVD, refAbstract=null), Reference(id=1321927527367553273, tenantId=1146029695717560320, journalId=1220038251117760515, articleId=1321927510665834621, doi=null, pmid=null, pmcid=null, year=2023, volume=201, issue=null, pageStart=328, pageEnd=337, url=null, language=null, rfNumber=[26], rfOrder=33, authorNames=LEIGH W G S, CUENCA J A, THOMAS E L H, journalName=Carbon, refType=null, unstructuredReference=LEIGH W G S， CUENCA J A， THOMAS E L H，et al.Mapping the effect of substrate temperature inhomogeneity during microwave plasma-enhanced chemical vapour deposition nanocrystalline diamond growth［J］.Carbon，2023，201：328-337., articleTitle=Mapping the effect of substrate temperature inhomogeneity during microwave plasma-enhanced chemical vapour deposition nanocrystalline diamond growth, refAbstract=null), Reference(id=1321927527447245050, tenantId=1146029695717560320, journalId=1220038251117760515, articleId=1321927510665834621, doi=null, pmid=null, pmcid=null, year=2023, volume=43, issue=19, pageStart=1931001, pageEnd=null, url=null, language=null, rfNumber=[27], rfOrder=34, authorNames=产思义, 屠菊萍, 黄珂, journalName=光学学报, refType=null, unstructuredReference=产思义，屠菊萍，黄珂，等.光学级多晶金刚石膜的快速生长［J］.光学学报，2023，43（19）：1931001., articleTitle=光学级多晶金刚石膜的快速生长, refAbstract=null), Reference(id=1321927527522742523, tenantId=1146029695717560320, journalId=1220038251117760515, articleId=1321927510665834621, doi=null, pmid=null, pmcid=null, year=2023, volume=43, issue=19, pageStart=1931001, pageEnd=null, url=null, language=null, rfNumber=[27], rfOrder=35, authorNames=CHAN S Y, TU J P, HUANG K, journalName=Acta Optica Sinica, refType=null, unstructuredReference=CHAN S Y， TU J P， HUANG K，et al.Rapid growth of optical grade polycrystalline diamond films［J］.Acta Optica Sinica，2023，43（19）：1931001., articleTitle=null, refAbstract=null), Reference(id=1321927527623405820, 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tenantId=1146029695717560320, journalId=1220038251117760515, articleId=1321927510665834621, doi=null, pmid=null, pmcid=null, year=2003, volume=23, issue=3, pageStart=176, pageEnd=181, url=null, language=null, rfNumber=[29], rfOrder=38, authorNames=任妮, 马占吉, 高欣, journalName=真空科学与技术, refType=null, unstructuredReference=任妮，马占吉，高欣.无氢类金刚石碳膜的研究进展［J］.真空科学与技术，2003，23（3）：176-181., articleTitle=无氢类金刚石碳膜的研究进展, refAbstract=null), Reference(id=1321927527854092543, tenantId=1146029695717560320, journalId=1220038251117760515, articleId=1321927510665834621, doi=null, pmid=null, pmcid=null, year=2003, volume=23, issue=3, pageStart=176, pageEnd=181, url=null, language=null, rfNumber=[29], rfOrder=39, authorNames=REN N, MA Z J, GAO X, journalName=Vacuum Science and Technology, refType=null, unstructuredReference=REN N， MA Z J， GAO X.Latest development of hydrogen-free diamond-like carbon films［J］.Vacuum Science and Technology，2003，23（3）：176-181., articleTitle=null, refAbstract=null), Reference(id=1321927527929590016, tenantId=1146029695717560320, journalId=1220038251117760515, articleId=1321927510665834621, doi=null, pmid=null, pmcid=null, year=2021, volume=50, issue=1, pageStart=158, pageEnd=166, url=null, language=null, rfNumber=[30], rfOrder=40, authorNames=李建军, 范澄兴, 程佑法, journalName=人工晶体学报, refType=null, unstructuredReference=李建军，范澄兴，程佑法，等.金刚石UV-Vis-MIR光谱常见特征综述［J］.人工晶体学报，2021，50（1）：158-166., articleTitle=金刚石UV-Vis-MIR光谱常见特征综述, refAbstract=null), Reference(id=1321927528013476097, tenantId=1146029695717560320, journalId=1220038251117760515, articleId=1321927510665834621, doi=null, pmid=null, pmcid=null, year=2021, volume=50, issue=1, pageStart=158, pageEnd=166, url=null, language=null, rfNumber=[30], rfOrder=41, authorNames=LI J J, FAN C X, CHENG Y F, journalName=Journal of Synthetic Crystals, refType=null, unstructuredReference=LI J J， FAN C X， CHENG Y F，et al.Review for frequent characteristics of diamond UV-Vis-MIR spectra［J］.Journal of Synthetic Crystals，2021，50（1）：158-166., articleTitle=null, refAbstract=null), Reference(id=1321927528097362178, tenantId=1146029695717560320, journalId=1220038251117760515, articleId=1321927510665834621, doi=null, pmid=null, pmcid=null, year=2008, volume=45, issue=7, pageStart=44, pageEnd=51, url=null, language=null, rfNumber=[31], rfOrder=42, authorNames=郭延龙, 王淑云, 袁孝, journalName=激光与光电子学进展, refType=null, unstructuredReference=郭延龙，王淑云，袁孝，等.金刚石膜及类金刚石膜的光学应用研究进展［J］.激光与光电子学进展，2008，45（7）：44-51., articleTitle=金刚石膜及类金刚石膜的光学应用研究进展, refAbstract=null), Reference(id=1321927528185442563, tenantId=1146029695717560320, journalId=1220038251117760515, articleId=1321927510665834621, doi=null, pmid=null, pmcid=null, year=2008, volume=45, issue=7, pageStart=44, pageEnd=51, url=null, language=null, rfNumber=[31], rfOrder=43, authorNames=GUO Y L, WANG S Y, YUAN X, journalName=Laser & Optoelectronics Progress, refType=null, unstructuredReference=GUO Y L， WANG S Y， YUAN X，et al.Research progress of optical application of diamond carbon films and diamond-like carbon films［J］.Laser & Optoelectronics Progress，2008，45（7）：44-51., articleTitle=null, refAbstract=null)], funds=null, companyList=[AuthorCompany(id=1321927514667200658, tenantId=1146029695717560320, journalId=1220038251117760515, articleId=1321927510665834621, xref=null, ext=[AuthorCompanyExt(id=1321927514675589267, tenantId=1146029695717560320, journalId=1220038251117760515, articleId=1321927510665834621, companyId=1321927514667200658, language=EN, country=null, province=null, city=null, postcode=null, companyName=null, departmentName=null, remark=Institute for Advanced Materials and Technology，University of Science and Technology Beijing，Beijing 100083，China), AuthorCompanyExt(id=1321927514683977876, tenantId=1146029695717560320, journalId=1220038251117760515, articleId=1321927510665834621, companyId=1321927514667200658, language=CN, country=null, province=null, city=null, postcode=null, companyName=null, departmentName=null, remark=北京科技大学 新材料技术研究院，北京 100083)])], figs=[ArticleFig(id=1321927519171883200, tenantId=1146029695717560320, journalId=1220038251117760515, articleId=1321927510665834621, language=EN, label=Fig.1, caption=Surface morphologies of diamond films deposited with different CO₂/CH₄ flow ratios, figureFileSmall=ee+MeOt28/JLfm20Zz1rNA==, figureFileBig=7T7CcuI4kqtE6QOAXTlM4w==, tableContent=null), ArticleFig(id=1321927519264157889, tenantId=1146029695717560320, journalId=1220038251117760515, articleId=1321927510665834621, language=CN, label=图1, caption=不同CO₂/CH₄流量比沉积金刚石膜表面形貌

（a）CO₂/CH₄=0；（b）CO₂/CH₄=1/6；（c）CO₂/CH₄=2/6；（d）CO₂/CH₄=3/6；（e）CO₂/CH₄=4/6；（f）CO₂/CH₄=5/6

（a）CO₂/CH₄=0；（b）CO₂/CH₄=1/6；（c）CO₂/CH₄=2/6；（d）CO₂/CH₄=3/6；（e）CO₂/CH₄=4/6；（f）CO₂/CH₄=5/6

, figureFileSmall=ee+MeOt28/JLfm20Zz1rNA==, figureFileBig=7T7CcuI4kqtE6QOAXTlM4w==, tableContent=null), ArticleFig(id=1321927519511621826, tenantId=1146029695717560320, journalId=1220038251117760515, articleId=1321927510665834621, language=EN, label=Fig.2, caption=Growth rate of diamond films with different CO₂/CH₄ flow ratios, figureFileSmall=bpWjnwLZhHfMQ7T/rzmzjQ==, figureFileBig=qfqvromse0efwp/rH6Qttg==, tableContent=null), ArticleFig(id=1321927519599702211, tenantId=1146029695717560320, journalId=1220038251117760515, articleId=1321927510665834621, language=CN, label=图2, caption=不同CO₂/CH₄流量比金刚石膜的生长速率, figureFileSmall=bpWjnwLZhHfMQ7T/rzmzjQ==, figureFileBig=qfqvromse0efwp/rH6Qttg==, tableContent=null), ArticleFig(id=1321927519675199684, tenantId=1146029695717560320, journalId=1220038251117760515, articleId=1321927510665834621, language=EN, label=Fig.3, caption=Optical emission spectrum of the microwave plasma in the 400-1000 nm wavelength range, figureFileSmall=RBOzxiqnwadzT3/vWIv52A==, figureFileBig=qEzRGaDGc7Cd0NChKC4GfA==, tableContent=null), ArticleFig(id=1321927519763280069, tenantId=1146029695717560320, journalId=1220038251117760515, articleId=1321927510665834621, language=CN, label=图3, caption=微波等离子体在400~1000 nm波长范围内的发射光谱, figureFileSmall=RBOzxiqnwadzT3/vWIv52A==, figureFileBig=qEzRGaDGc7Cd0NChKC4GfA==, tableContent=null), ArticleFig(id=1321927519847166150, tenantId=1146029695717560320, journalId=1220038251117760515, articleId=1321927510665834621, language=EN, label=Fig.4, caption=Variation curves of chamber I（C₂）/I（H_α） with different CO₂/CH₄ flow ratios, figureFileSmall=Jv1uT3DNss4JD/23FByahw==, figureFileBig=GyKc8HUdZpiJMp77EQK0rw==, tableContent=null), ArticleFig(id=1321927519926857927, tenantId=1146029695717560320, journalId=1220038251117760515, articleId=1321927510665834621, language=CN, label=图4, caption=不同CO₂/CH₄流量比腔室I（C₂）/I（H_α）的变化曲线图, figureFileSmall=Jv1uT3DNss4JD/23FByahw==, figureFileBig=GyKc8HUdZpiJMp77EQK0rw==, tableContent=null), ArticleFig(id=1321927520023326920, tenantId=1146029695717560320, journalId=1220038251117760515, articleId=1321927510665834621, language=EN, label=Fig.5, caption=XRD patterns of samples grown with different CO₂/CH₄ flow ratios, figureFileSmall=DJr525vI5gNGSEMue5Z78g==, figureFileBig=Ogaec7Gp7LQpin0fcp1jqg==, tableContent=null), ArticleFig(id=1321927520115601609, tenantId=1146029695717560320, journalId=1220038251117760515, articleId=1321927510665834621, language=CN, label=图5, caption=不同CO₂/CH₄流量比生长样品的XRD谱图

（a）CO₂/CH₄=0；（b）CO₂/CH₄=1/6；（c）CO₂/CH₄=2/6；（d）CO₂/CH₄=3/6；（e）CO₂/CH₄=4/6；（f）CO₂/CH₄=5/6

（a）CO₂/CH₄=0；（b）CO₂/CH₄=1/6；（c）CO₂/CH₄=2/6；（d）CO₂/CH₄=3/6；（e）CO₂/CH₄=4/6；（f）CO₂/CH₄=5/6

, figureFileSmall=DJr525vI5gNGSEMue5Z78g==, figureFileBig=Ogaec7Gp7LQpin0fcp1jqg==, tableContent=null), ArticleFig(id=1321927520224653514, tenantId=1146029695717560320, journalId=1220038251117760515, articleId=1321927510665834621, language=EN, label=Fig.6, caption=Raman spectra of diamond grown with different CO₂/CH₄ flow ratios, figureFileSmall=jPAvLebYPLPtlEFGHRGXVQ==, figureFileBig=DIPGLHn4S9iUq1DVCqbVKg==, tableContent=null), ArticleFig(id=1321927520308539595, tenantId=1146029695717560320, journalId=1220038251117760515, articleId=1321927510665834621, language=CN, label=图6, caption=不同CO₂/CH₄流量比生长金刚石的拉曼光谱图, figureFileSmall=jPAvLebYPLPtlEFGHRGXVQ==, figureFileBig=DIPGLHn4S9iUq1DVCqbVKg==, tableContent=null), ArticleFig(id=1321927520413397196, tenantId=1146029695717560320, journalId=1220038251117760515, articleId=1321927510665834621, language=EN, label=Fig.7, caption=AFM image of the polished diamond sample grown at CO₂/CH₄=2/6, figureFileSmall=p/Uv8vHaVT4PJo7Zey48Pw==, figureFileBig=AexuYFVHBcBWgbHMrFBF/g==, tableContent=null), ArticleFig(id=1321927520493088973, tenantId=1146029695717560320, journalId=1220038251117760515, articleId=1321927510665834621, language=CN, label=图7, caption=CO₂/CH₄=2/6时生长金刚石样品抛光后AFM图, figureFileSmall=p/Uv8vHaVT4PJo7Zey48Pw==, figureFileBig=AexuYFVHBcBWgbHMrFBF/g==, tableContent=null), ArticleFig(id=1321927520593752270, tenantId=1146029695717560320, journalId=1220038251117760515, articleId=1321927510665834621, language=EN, label=Fig.8, caption=Infrared transmittance spectrum of the diamond sample grown at CO₂/CH₄=2/6, figureFileSmall=ge7aLpWuqLaZ2GeEZDW6sQ==, figureFileBig=heq1NI8tBjZ5UYR4PLAk6g==, tableContent=null), ArticleFig(id=1321927520694415567, tenantId=1146029695717560320, journalId=1220038251117760515, articleId=1321927510665834621, language=CN, label=图8, caption=CO₂/CH₄=2/6时生长金刚石样品红外透过率光谱, figureFileSmall=ge7aLpWuqLaZ2GeEZDW6sQ==, figureFileBig=heq1NI8tBjZ5UYR4PLAk6g==, tableContent=null), ArticleFig(id=1321927522372137168, tenantId=1146029695717560320, journalId=1220038251117760515, articleId=1321927510665834621, language=EN, label=Fig.9, caption=Near-infrared-ultraviolet transmittance spectrum of the diamond sample grown at CO₂/CH₄=2/6, figureFileSmall=HXOkzh7612BKeUxxqnH6qA==, figureFileBig=X0LBLy0n/WYrkHZISpx9sw==, tableContent=null), ArticleFig(id=1321927522481189073, tenantId=1146029695717560320, journalId=1220038251117760515, articleId=1321927510665834621, language=CN, label=图9, caption=CO₂/CH₄=2/6时生长金刚石样品近红外-紫外透过率光谱, figureFileSmall=HXOkzh7612BKeUxxqnH6qA==, figureFileBig=X0LBLy0n/WYrkHZISpx9sw==, tableContent=null), ArticleFig(id=1321927522577658066, tenantId=1146029695717560320, journalId=1220038251117760515, articleId=1321927510665834621, language=EN, label=Table 1, caption=

Deposition parameters of diamond samples

, figureFileSmall=null, figureFileBig=null, tableContent=

Sample	Microwave power/kW	Flow rate of H2/ （mL·min-1）	Flow rate of CH4/ （mL·min-1）	Flow ratio of CO2 to CH4	Pressure/kPa	Temperature/℃
1	8	100	6	0	20	900±5
2	8	100	6	1/6	20.2	900±5
3	8	100	6	2/6	20.3	900±5
4	8	100	6	3/6	20.5	900±5
5	8	100	6	4/6	20.7	900±5
6	8	100	6	5/6	20.9	900±5

), ArticleFig(id=1321927522644766931, tenantId=1146029695717560320, journalId=1220038251117760515, articleId=1321927510665834621, language=CN, label=表1, caption=

金刚石样品沉积参数

, figureFileSmall=null, figureFileBig=null, tableContent=

Sample	Microwave power/kW	Flow rate of H2/ （mL·min-1）	Flow rate of CH4/ （mL·min-1）	Flow ratio of CO2 to CH4	Pressure/kPa	Temperature/℃
1	8	100	6	0	20	900±5
2	8	100	6	1/6	20.2	900±5
3	8	100	6	2/6	20.3	900±5
4	8	100	6	3/6	20.5	900±5
5	8	100	6	4/6	20.7	900±5
6	8	100	6	5/6	20.9	900±5

), ArticleFig(id=1321927522741235924, tenantId=1146029695717560320, journalId=1220038251117760515, articleId=1321927510665834621, language=EN, label=Table 2, caption=

Orientation of samples grown with different CO₂/CH₄ flow ratios

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Sample	I111	I220	I311	I220/I111
1	100	216.64	14.51	2.16
2	100	915.24	159.96	9.15
3	100	1819.51	56.03	18.19
4	100	432.92	103.91	4.35
5	100	363.74	53.16	3.63
6	100	235.36	30.51	2.35
PDF#06-0675	100	25	16	0.25

), ArticleFig(id=1321927522825122005, tenantId=1146029695717560320, journalId=1220038251117760515, articleId=1321927510665834621, language=CN, label=表2, caption=

不同CO₂/CH₄流量比生长样品取向度

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Sample	I111	I220	I311	I220/I111
1	100	216.64	14.51	2.16
2	100	915.24	159.96	9.15
3	100	1819.51	56.03	18.19
4	100	432.92	103.91	4.35
5	100	363.74	53.16	3.63
6	100	235.36	30.51	2.35
PDF#06-0675	100	25	16	0.25

), ArticleFig(id=1321927522929979606, tenantId=1146029695717560320, journalId=1220038251117760515, articleId=1321927510665834621, language=EN, label=Table 3, caption=

Raman FWHM of diamond grown with different CO₂/CH₄ flow ratios

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Sample	Raman shift/cm-1	Raman FWHM/cm-1
1	1332.6	12.68
2	1332.6	11.78
3	1332.7	8.26
4	1334.4	8.35
5	1334.0	9.73
6	1333.6	8.56

), ArticleFig(id=1321927523018059991, tenantId=1146029695717560320, journalId=1220038251117760515, articleId=1321927510665834621, language=CN, label=表3, caption=

不同CO₂/CH₄流量比生长金刚石的拉曼半峰全宽

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Sample	Raman shift/cm-1	Raman FWHM/cm-1
1	1332.6	12.68
2	1332.6	11.78
3	1332.7	8.26
4	1334.4	8.35
5	1334.0	9.73
6	1333.6	8.56

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