Article(id=1320176370936820419, tenantId=1146029695717560320, journalId=1301849854269554754, issueId=1320176147946648091, articleNumber=null, orderNo=null, doi=10.11729/syltlx20250120, pmid=null, cstr=null, oa=null, hot=null, price=null, onlineType=0, articleFormat=0, articleType=null, articleTypeStr=null, receivedDate=1766419200000, receivedDateStr=2025-12-23, revisedDate=1769011200000, revisedDateStr=2026-01-22, acceptedDate=1769443200000, acceptedDateStr=2026-01-27, onlineDate=1792684174522, onlineDateStr=2026-10-22, pubDate=1787587200000, pubDateStr=2026-08-25, doiRegisterDate=null, doiRegisterDateStr=null, onlineIssueDate=1792684174522, onlineIssueDateStr=2026-10-22, onlineJustAcceptDate=null, onlineJustAcceptDateStr=null, onlineFirstDate=null, onlineFirstDateStr=null, sourceXml=null, magXml=null, createTime=1792684174522, creator=13701087609, updateTime=1792684174522, updator=13701087609, issue=Issue{id=1320176147946648091, tenantId=1146029695717560320, journalId=1301849854269554754, year='2026', volume='40', issue='4', pageStart='1', pageEnd='137', issueExtLink='null', onlineDate='null', pubDate='1787587200000', pubDateStr='2026-08-25', beforeIssueId=null, nextIssueId=null, price=null, status=1, issueComplete=1, articleOrder=1, issueType=1, specialIssue=null, createTime=1792684121357, creator='13701087609', updateTime=1792720571222, updator='13701087609', preIssue=null, nextIssue=null, articleTotal=null, ext={EN=IssueExt(id=1320329029853495708, tenantId=1146029695717560320, journalId=1301849854269554754, issueId=1320176147946648091, language=EN, specialIssueTitle=, coverIllustrator=null, specialIssueEditor=, specialIssueAbout=), CN=IssueExt(id=1320329029853495709, tenantId=1146029695717560320, journalId=1301849854269554754, issueId=1320176147946648091, language=CN, specialIssueTitle=, coverIllustrator=null, specialIssueEditor=, specialIssueAbout=)}, issueFiles=null, downloadFileDto=null}, startPage=46, endPage=53, ext={EN=ArticleExt(id=1320176371196867269, articleId=1320176370936820419, tenantId=1146029695717560320, journalId=1301849854269554754, language=EN, title=Study on a piston-type liquid ultra-microflow standard device based on the interference method, columnId=1320176148672262684, journalTitle=Journal of Experiments in Fluid Mechanics, columnName=Special Issue on Microscale and Nanoscale Flows, runingTitle=null, highlight=null, articleAbstract=

To achieve metrological calibration of nL/min-level liquid ultra-microflow, a piston-type liquid ultra-microflow standard device based on the interference method has been developed. This device employs laser interference measurement technology to ensure precise capture of the syringe piston’s micrometer-level displacement. By establishing a flow calculation model based on the syringe's inner diameter and piston displacement, the uncertainty of each component in the device is analyzed and evaluated. The study used syringes of various specifications to test ultra-microflows in the range of 1–1000 nL/min. Experimental results demonstrate that the device can detect microscopic changes in ultra-microflow, exhibiting excellent flow response capability. Calibration errors for the syringe pump were below 1%, with an expanded uncertainty of less than 4% (k = 2). Finally, comparative experiments between gravimetric and interference method standard devices demonstrated consistent error trends in syringe pump calibration. Further calculation of normalized deviation validated the accuracy of the interference method device and the validity of its uncertainty assessment results.

, authors=Likai Hou1, 3, *, Wenze Wu1, Hong Zheng2, *, Tengfei Zhu2, Xu Fan1, Xiaojie Xu2, Fubing Bao1, 3, authorsList=Likai Hou, Wenze Wu, Hong Zheng, Tengfei Zhu, Xu Fan, Xiaojie Xu, Fubing Bao, authorCompany=null, correspAuthors=Likai Hou, Hong Zheng, authorNote=null, correspAuthorsNote=null, copyrightStatement=Copyright ©2026 Journal of Experiments in Fluid Mechanics. All rights reserved., copyrightOwner=null, extLink=null, articleAbsUrl=null, sourceXml=null, magXml=null, pdfUrl=null, pdf=null, pdfFileSize=null, pdfExtLink=null, richHtmlUrl=null, mobilePdfUrl=null, reviewReport=null, pdfFirstPage=null, abstractGraph=null, abstractGraphContent=null, abstractVideo=null, citation=null, cebUrl=null, magXmlContent=null, mapNumber=null, fund=null), CN=ArticleExt(id=1320176379547726589, articleId=1320176370936820419, tenantId=1146029695717560320, journalId=1301849854269554754, language=CN, title=基于干涉法的活塞式液体超微流量标准装置研究, columnId=1320176148844229150, journalTitle=实验流体力学, columnName=微纳尺度流动专刊, runingTitle=null, highlight=null, articleAbstract=

为实现nL/min量级超微液体流量的计量校准,开发了一种基于干涉法的活塞式液体超微流量标准装置。利用激光干涉测量技术,实现了对注射器活塞μm量级位移的精确捕捉;结合注射器内径与活塞位移的关系,建立了流量计算的数学模型,并利用该模型对装置各部分的不确定度进行了分析与评定。为测试装置性能,采用多种规格注射器对1~1000 nL/min区间内的超微流量进行了测试。实验结果显示:该装置能够识别超微流量的变化,具备良好的流量响应性能;注射泵校准所得误差均小于1%,装置扩展不确定度小于4%(包含因子k = 2)。此外,将质量法标准装置与干涉法标准装置进行比对实验,结果表明2套装置校准注射泵的误差一致;并通过计算归一化偏差,验证了干涉法装置的准确性及不确定度评定结果的有效性。

, authors=侯立凯1, 3, *, 武文泽1, 郑虹2, *, 朱腾飞2, 范旭1, 许肖杰2, 包福兵1, 3, authorsList=侯立凯, 武文泽, 郑虹, 朱腾飞, 范旭, 许肖杰, 包福兵, authorCompany=null, correspAuthors=侯立凯, 郑虹, authorNote=

侯立凯(1988—),男,山东济南人,博士,副教授。研究方向:微纳流体器件,微尺度计量技术,微流控技术。E-mail:

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侯立凯(1988—),男,山东济南人,博士,副教授。研究方向:微纳流体器件,微尺度计量技术,微流控技术。E-mail:

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侯立凯(1988—),男,山东济南人,博士,副教授。研究方向:微纳流体器件,微尺度计量技术,微流控技术。E-mail:

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Flowmetering for microfluidics[J]. Lab on a Chip, 2022, 22(19): 3603-3617. doi: 10.1039/d2lc00188h, articleTitle=null, refAbstract=null), Reference(id=1320177016779944548, tenantId=1146029695717560320, journalId=1301849854269554754, articleId=1320176370936820419, doi=null, pmid=null, pmcid=null, year=null, volume=null, issue=null, pageStart=null, pageEnd=null, url=null, language=null, rfNumber=2, rfOrder=1, authorNames=null, journalName=null, refType=null, unstructuredReference=刘兆利, 张鹏飞. 微反应器在化学化工领域中的应用[J]. 化工进展, 2016, 35(1): 10-17., articleTitle=null, refAbstract=null), Reference(id=1320177016842859109, tenantId=1146029695717560320, journalId=1301849854269554754, articleId=1320176370936820419, doi=null, pmid=null, pmcid=null, year=null, volume=null, issue=null, pageStart=null, pageEnd=null, url=null, language=null, rfNumber=2, rfOrder=2, authorNames=null, journalName=null, refType=null, unstructuredReference=Liu Zhaoli, Zhang Pengfei. Applications of microreactor in chemistry and chemical engineering[J]. Chemical Industry and Engineering Progress, 2016, 35(1): 10-17. doi: 10.16085/j.issn.1000-6613.2016.01.002, articleTitle=null, refAbstract=null), Reference(id=1320177016901579366, tenantId=1146029695717560320, journalId=1301849854269554754, articleId=1320176370936820419, doi=null, pmid=null, pmcid=null, year=null, volume=null, issue=null, pageStart=null, pageEnd=null, url=null, language=null, rfNumber=3, rfOrder=3, authorNames=null, journalName=null, refType=null, unstructuredReference=Haselberg R, de Jong G J, Somsen G W. Low-flow sheathless capillary electrophoresis-mass spectrometry for sensitive glycoform profiling of intact pharmaceutical proteins[J]. Analytical Chemistry, 2013, 85(4): 2289-2296. doi: 10.1021/ac303158f, articleTitle=null, refAbstract=null), Reference(id=1320177016960299623, tenantId=1146029695717560320, journalId=1301849854269554754, articleId=1320176370936820419, doi=null, pmid=null, pmcid=null, year=null, volume=null, issue=null, pageStart=null, pageEnd=null, url=null, language=null, rfNumber=4, rfOrder=4, authorNames=null, journalName=null, refType=null, unstructuredReference=Fan X, Hou L K, Wu W Z, et al. Study on a low-disturbance and anti-interference dual-mode micro thermal flow sensor for heat-sensitive liquid[J]. Measurement, 2026, 257: 118641. doi: 10.1016/j.measurement.2025.118641, articleTitle=null, refAbstract=null), Reference(id=1320177017052574312, tenantId=1146029695717560320, journalId=1301849854269554754, articleId=1320176370936820419, doi=null, pmid=null, pmcid=null, year=null, volume=null, issue=null, pageStart=null, pageEnd=null, url=null, language=null, rfNumber=5, rfOrder=5, authorNames=null, journalName=null, refType=null, unstructuredReference=MeDD II Consortium. Metrology for drug delivery[DB/OL]. [2025-12-23]. https://drugmetrology.com., articleTitle=null, refAbstract=null), Reference(id=1320177017111294569, tenantId=1146029695717560320, journalId=1301849854269554754, articleId=1320176370936820419, doi=null, pmid=null, pmcid=null, year=null, volume=null, issue=null, pageStart=null, pageEnd=null, url=null, language=null, rfNumber=6, rfOrder=6, authorNames=null, journalName=null, refType=null, unstructuredReference=Batista E, Furtado A, Pereira J, et al. New EMPIR project–metrology for drug delivery[J]. Flow Measurement and Instrumentation, 2020, 72: 101716. doi: 10.1016/j.flowmeasinst.2020.101716, articleTitle=null, refAbstract=null), Reference(id=1320177017190986346, tenantId=1146029695717560320, journalId=1301849854269554754, articleId=1320176370936820419, doi=null, pmid=null, pmcid=null, year=null, volume=null, issue=null, pageStart=null, pageEnd=null, url=null, language=null, rfNumber=7, rfOrder=7, authorNames=null, journalName=null, refType=null, unstructuredReference=Batista E, Sousa J A, Cardoso S, et al. Experimental testing for metrological traceability and accuracy of liquid microflows and microfluidics[J]. Flow Measurement and Instrumentation, 2020, 71: 101691. doi: 10.1016/j.flowmeasinst.2020.101691, articleTitle=null, refAbstract=null), Reference(id=1320177017262289515, tenantId=1146029695717560320, journalId=1301849854269554754, articleId=1320176370936820419, doi=null, pmid=null, pmcid=null, year=null, volume=null, issue=null, pageStart=null, pageEnd=null, url=null, language=null, rfNumber=8, rfOrder=8, authorNames=null, journalName=null, refType=null, unstructuredReference=T/CAIA YQ002—2016 液体微流量测试方法[S]., articleTitle=null, refAbstract=null), Reference(id=1320177017325204076, tenantId=1146029695717560320, journalId=1301849854269554754, articleId=1320176370936820419, doi=null, pmid=null, pmcid=null, year=null, volume=null, issue=null, pageStart=null, pageEnd=null, url=null, language=null, rfNumber=9, rfOrder=9, authorNames=null, journalName=null, refType=null, unstructuredReference=侯立凯, 范旭, 包福兵. 微小液体流量校准技术[J]. 化工进展, 2024, 43(2): 579-585., articleTitle=null, refAbstract=null), Reference(id=1320177017388118637, tenantId=1146029695717560320, journalId=1301849854269554754, articleId=1320176370936820419, doi=null, pmid=null, pmcid=null, year=null, volume=null, issue=null, pageStart=null, pageEnd=null, url=null, language=null, rfNumber=9, rfOrder=10, authorNames=null, journalName=null, refType=null, unstructuredReference=Hou Likai, Fan Xu, Bao Fubing. Calibration technique of micro-liquid flow[J]. Chemical Industry and Engineering Progress, 2024, 43(2): 579-585. doi: 10.16085/j.issn.1000-6613.2023-1355, articleTitle=null, refAbstract=null), Reference(id=1320177017459421806, tenantId=1146029695717560320, journalId=1301849854269554754, articleId=1320176370936820419, doi=null, pmid=null, pmcid=null, year=null, volume=null, issue=null, pageStart=null, pageEnd=null, url=null, language=null, rfNumber=10, rfOrder=11, authorNames=null, journalName=null, refType=null, unstructuredReference=蔡洁, 海宁, 林峰. 静态质量法水流量标准装置校准流量计不确定度分析的讨论[J]. 工业计量, 2013, 23(4): 60-63., articleTitle=null, refAbstract=null), Reference(id=1320177017530724975, tenantId=1146029695717560320, journalId=1301849854269554754, articleId=1320176370936820419, doi=null, pmid=null, pmcid=null, year=null, volume=null, issue=null, pageStart=null, pageEnd=null, url=null, language=null, rfNumber=10, rfOrder=12, authorNames=null, journalName=null, refType=null, unstructuredReference=Cai Jie, Hai Ning, Lin Feng. Discussion on uncertainty analysis of calibration flowmeter of static mass method water flow standard device[J]. Industrial Measurement, 2013, 23(4): 60-63. doi: 10.3969/j.issn.1002-1183.2013.04.021, articleTitle=null, refAbstract=null), Reference(id=1320177017593639536, tenantId=1146029695717560320, journalId=1301849854269554754, articleId=1320176370936820419, doi=null, pmid=null, pmcid=null, year=null, volume=null, issue=null, pageStart=null, pageEnd=null, url=null, language=null, rfNumber=11, rfOrder=13, authorNames=null, journalName=null, refType=null, unstructuredReference=杨潇萍. 静态质量法与动态质量法流量标准装置的比较[J]. 油气田地面工程, 2015, 34(4): 60-61., articleTitle=null, refAbstract=null), Reference(id=1320177017656554097, tenantId=1146029695717560320, journalId=1301849854269554754, articleId=1320176370936820419, doi=null, pmid=null, pmcid=null, year=null, volume=null, issue=null, pageStart=null, pageEnd=null, url=null, language=null, rfNumber=11, rfOrder=14, authorNames=null, journalName=null, refType=null, unstructuredReference=Yang Xiaoping. Comparison of flow standard devices between static mass method and dynamic mass method[J]. Oil-Gas Field Surface Engineering, 2015, 34(4): 60-61., articleTitle=null, refAbstract=null), Reference(id=1320177017715274354, tenantId=1146029695717560320, journalId=1301849854269554754, articleId=1320176370936820419, doi=null, pmid=null, pmcid=null, year=null, volume=null, issue=null, pageStart=null, pageEnd=null, url=null, language=null, rfNumber=12, rfOrder=15, authorNames=null, journalName=null, refType=null, unstructuredReference=Bissig H, Petter H T, Lucas P, et al. Primary standards for measuring flow rates from 100 nL/min to 1 mL/min: gravimetric principle[J]. Biomedical Engineering/Biomedizi-nische Technik, 2015, 60(4): 301-316. doi: 10.1515/bmt-2014-0145, articleTitle=null, refAbstract=null), Reference(id=1320177017773994611, tenantId=1146029695717560320, journalId=1301849854269554754, articleId=1320176370936820419, doi=null, pmid=null, pmcid=null, year=null, volume=null, issue=null, pageStart=null, pageEnd=null, url=null, language=null, rfNumber=13, rfOrder=16, authorNames=null, journalName=null, refType=null, unstructuredReference=Mills C, Batista E, Bissig H, et al. Calibration methods for flow rates down to 5 nL/min and validation methodology[J]. Biomedical Engineering/Biomedizinische Technik, 2023, 68(1): 13-27. doi: 10.1515/bmt-2022-0049, articleTitle=null, refAbstract=null), Reference(id=1320177017845297780, tenantId=1146029695717560320, journalId=1301849854269554754, articleId=1320176370936820419, doi=null, pmid=null, pmcid=null, year=null, volume=null, issue=null, pageStart=null, pageEnd=null, url=null, language=null, rfNumber=14, rfOrder=17, authorNames=null, journalName=null, refType=null, unstructuredReference=周兵, 张宏魁. 静态容积法水表自动检定装置[J]. 计量技术, 2008, 52(10): 41-44. doi: 10.3969/j.issn.1000-0771.2008.10.013, articleTitle=null, refAbstract=null), Reference(id=1320177017908212341, tenantId=1146029695717560320, journalId=1301849854269554754, articleId=1320176370936820419, doi=null, pmid=null, pmcid=null, year=null, volume=null, issue=null, pageStart=null, pageEnd=null, url=null, language=null, rfNumber=15, rfOrder=18, authorNames=null, journalName=null, refType=null, unstructuredReference=赵建亮, 祝新伟, 何爱珍. 动态容积法水表校准装置的研究[J]. 计量技术, 2004, 48(6): 19-21., articleTitle=null, refAbstract=null), Reference(id=1320177017983709814, tenantId=1146029695717560320, journalId=1301849854269554754, articleId=1320176370936820419, doi=null, pmid=null, pmcid=null, year=null, volume=null, issue=null, pageStart=null, pageEnd=null, url=null, language=null, rfNumber=15, rfOrder=19, authorNames=null, journalName=null, refType=null, unstructuredReference=Zhao Jianliang, Zhu Xinwei, He Aizhen. Research on calibration device of dynamic volumetric water meter[J]. Measurement Technique, 2004, 48(6): 19-21. doi: 10.3969/j.issn.1000-0771.2004.06.007, articleTitle=null, refAbstract=null), Reference(id=1320177019623682679, tenantId=1146029695717560320, journalId=1301849854269554754, articleId=1320176370936820419, doi=null, pmid=null, pmcid=null, year=null, volume=null, issue=null, pageStart=null, pageEnd=null, url=null, language=null, rfNumber=16, rfOrder=20, authorNames=null, journalName=null, refType=null, unstructuredReference=Ogheard F, Cassette P, Boudaoud A W. Development of an optical measurement method for “sampled” micro-volumes and nano-flow rates[J]. Flow Measurement and Instrumen-tation, 2020, 73: 101746. doi: 10.1016/j.flowmeasinst.2020.101746, articleTitle=null, refAbstract=null), Reference(id=1320177019694985848, tenantId=1146029695717560320, journalId=1301849854269554754, articleId=1320176370936820419, doi=null, pmid=null, pmcid=null, year=null, volume=null, issue=null, pageStart=null, pageEnd=null, url=null, language=null, rfNumber=17, rfOrder=21, authorNames=null, journalName=null, refType=null, unstructuredReference=Batista E, Sousa J A, Álvares M, et al. Development of an experimental setup for micro flow measurement using the front tracking method[J]. Measurement: Sensors, 2021, 18: 100152. doi: 10.1016/j.measen.2021.100152, articleTitle=null, refAbstract=null), Reference(id=1320177019762094713, tenantId=1146029695717560320, journalId=1301849854269554754, articleId=1320176370936820419, doi=null, pmid=null, pmcid=null, year=null, volume=null, issue=null, pageStart=null, pageEnd=null, url=null, language=null, rfNumber=18, rfOrder=22, authorNames=null, journalName=null, refType=null, unstructuredReference=Batista E, Godinho I, Martins R F, et al. Development of an experimental setup for microflow measurement using interferometry[J]. Flow Measurement and Instrumentation, 2020, 75: 101789. doi: 10.1016/j.flowmeasinst.2020.101789, articleTitle=null, refAbstract=null), Reference(id=1320177019850175098, tenantId=1146029695717560320, journalId=1301849854269554754, articleId=1320176370936820419, doi=null, pmid=null, pmcid=null, year=null, volume=null, issue=null, pageStart=null, pageEnd=null, url=null, language=null, rfNumber=19, rfOrder=23, authorNames=null, journalName=null, refType=null, unstructuredReference=Batista E, Álvares M, Martins R F, et al. Measurement of internal diameters of capillaries and glass syringes using gravimetric and optical methods for microflow applications[J]. Biomedical Engineering/Biomedizinische Technik, 2022, 68(1): 29-38. doi: 10.1515/bmt-2022-0033, articleTitle=null, refAbstract=null), Reference(id=1320177019917283963, tenantId=1146029695717560320, journalId=1301849854269554754, articleId=1320176370936820419, doi=null, pmid=null, pmcid=null, year=null, volume=null, issue=null, pageStart=null, pageEnd=null, url=null, language=null, rfNumber=20, rfOrder=24, authorNames=null, journalName=null, refType=null, unstructuredReference=JJF 1117—2010 计量比对[S]., articleTitle=null, refAbstract=null)], funds=null, companyList=[AuthorCompany(id=1320177010979222037, tenantId=1146029695717560320, journalId=1301849854269554754, articleId=1320176370936820419, xref=1, ext=[AuthorCompanyExt(id=1320177010987610646, tenantId=1146029695717560320, journalId=1301849854269554754, articleId=1320176370936820419, companyId=1320177010979222037, language=EN, country=null, province=null, city=null, postcode=null, companyName=null, departmentName=null, remark=1College 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Calibration results of syringe pump

, figureFileSmall=null, figureFileBig=null, tableContent=
设置流量Q'/(nL·min−1)测得流量Q/(nL·min−1)流量误差/(nL·min−1)相对误差/%U(Q)/(nL·min−1) $ \dfrac{U(Q)}{Q} $/%
11.01−0.01−0.990.021.98
109.930.070.700.393.93
5049.850.150.301.903.81
250248.621.380.565.962.40
500503.81−3.81−0.769.861.96
750748.831.170.1613.691.83
10001001.01−1.01−0.1017.821.78
), ArticleFig(id=1320177016175964764, tenantId=1146029695717560320, journalId=1301849854269554754, articleId=1320176370936820419, language=CN, label=表1, caption=

注射泵校准结果

, figureFileSmall=null, figureFileBig=null, tableContent=
设置流量Q'/(nL·min−1)测得流量Q/(nL·min−1)流量误差/(nL·min−1)相对误差/%U(Q)/(nL·min−1) $ \dfrac{U(Q)}{Q} $/%
11.01−0.01−0.990.021.98
109.930.070.700.393.93
5049.850.150.301.903.81
250248.621.380.565.962.40
500503.81−3.81−0.769.861.96
750748.831.170.1613.691.83
10001001.01−1.01−0.1017.821.78
), ArticleFig(id=1320177016243073629, tenantId=1146029695717560320, journalId=1301849854269554754, articleId=1320176370936820419, language=EN, label=Table 2, caption=

Uncertainty calculation of the device at 10 nL/min

, figureFileSmall=null, figureFileBig=null, tableContent=
影响因素测量值灵敏度系数不确定度灵敏度系数 × 不确定度
d0.14 mm2.31 × 10−3 mm2/s1.22 × 10−3 mm2.83 × 10−6 μL/s
r3.258 mm2.04 × 10−4 mm2/s0.004 mm8.67 × 10−7 μL/s
t3600 s9.42 × 10−8 mm3/s20.01 s9.24 × 10−10 μL/s
nrep1.36 × 10−6 μL/s11.36 × 10−6 μL/s1.36 × 10−6 μL/s
最终计算得到:uc(Q) = 0.20 nL/minU(Q) = 0.39 nL/min $\dfrac{U(Q)}{Q} $ = 3.93 %
), ArticleFig(id=1320177016310182494, tenantId=1146029695717560320, journalId=1301849854269554754, articleId=1320176370936820419, language=CN, label=表2, caption=

10 nL/min流量下装置不确定度计算

, figureFileSmall=null, figureFileBig=null, tableContent=
影响因素测量值灵敏度系数不确定度灵敏度系数 × 不确定度
d0.14 mm2.31 × 10−3 mm2/s1.22 × 10−3 mm2.83 × 10−6 μL/s
r3.258 mm2.04 × 10−4 mm2/s0.004 mm8.67 × 10−7 μL/s
t3600 s9.42 × 10−8 mm3/s20.01 s9.24 × 10−10 μL/s
nrep1.36 × 10−6 μL/s11.36 × 10−6 μL/s1.36 × 10−6 μL/s
最终计算得到:uc(Q) = 0.20 nL/minU(Q) = 0.39 nL/min $\dfrac{U(Q)}{Q} $ = 3.93 %
), ArticleFig(id=1320177016373097055, tenantId=1146029695717560320, journalId=1301849854269554754, articleId=1320176370936820419, language=EN, label=Table 3, caption=

Percentage contribution of uncertainty factors under different flow conditions

, figureFileSmall=null, figureFileBig=null, tableContent=
流量/(nL·min−1)使用注射器规格/μL各影响因素对装置不确定度贡献占比/%
drtnrep
110040.5232.640.0126.82
1050055.9617.140.0226.88
5059.0518.060.0222.86
250500048.144.650.0247.18
50060.725.860.0233.40
75068.266.590.0225.13
100072.787.030.0220.17
), ArticleFig(id=1320177016444400224, tenantId=1146029695717560320, journalId=1301849854269554754, articleId=1320176370936820419, language=CN, label=表3, caption=

各流量点下影响因素不确定度贡献的占比

, figureFileSmall=null, figureFileBig=null, tableContent=
流量/(nL·min−1)使用注射器规格/μL各影响因素对装置不确定度贡献占比/%
drtnrep
110040.5232.640.0126.82
1050055.9617.140.0226.88
5059.0518.060.0222.86
250500048.144.650.0247.18
50060.725.860.0233.40
75068.266.590.0225.13
100072.787.030.0220.17
), ArticleFig(id=1320177016511509089, tenantId=1146029695717560320, journalId=1301849854269554754, articleId=1320176370936820419, language=EN, label=Table 4, caption=

Standard device comparison results

, figureFileSmall=null, figureFileBig=null, tableContent=
设置流量Q'/
(nL·min−1)
干涉法质量法 $ |E\mathrm{_n}| $
相对误差/% $\dfrac{U(Q)}{Q} $/%相对误差/% $\dfrac{U(Q)}{Q} $/%
2500.552.402.183.940.35
500−0.761.96−2.462.960.48
7500.161.830.631.250.21
1000−0.101.78−1.341.950.47
), ArticleFig(id=1320177016574423650, tenantId=1146029695717560320, journalId=1301849854269554754, articleId=1320176370936820419, language=CN, label=表4, caption=

标准装置比对结果

, figureFileSmall=null, figureFileBig=null, tableContent=
设置流量Q'/
(nL·min−1)
干涉法质量法 $ |E\mathrm{_n}| $
相对误差/% $\dfrac{U(Q)}{Q} $/%相对误差/% $\dfrac{U(Q)}{Q} $/%
2500.552.402.183.940.35
500−0.761.96−2.462.960.48
7500.161.830.631.250.21
1000−0.101.78−1.341.950.47
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基于干涉法的活塞式液体超微流量标准装置研究
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侯立凯 1, 3, * , 武文泽 1 , 郑虹 2, * , 朱腾飞 2 , 范旭 1 , 许肖杰 2 , 包福兵 1, 3
实验流体力学 | 微纳尺度流动专刊 2026,40(4): 46-53
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实验流体力学 |微纳尺度流动专刊 2026 , 40 (4) : 46 -53
基于干涉法的活塞式液体超微流量标准装置研究
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侯立凯(1988—),男,山东济南人,博士,副教授。研究方向:微纳流体器件,微尺度计量技术,微流控技术。E-mail:

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侯立凯(1988—),男,山东济南人,博士,副教授。研究方向:微纳流体器件,微尺度计量技术,微流控技术。E-mail:

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侯立凯1, 3, * , 武文泽1, 郑虹2, * , 朱腾飞2, 范旭1, 许肖杰2, 包福兵1, 3
作者信息
  • 1中国计量大学 计量测试与仪器学院,杭州 310018
  • 2杭州市质量计量科学研究院,杭州 310019
  • 3中国计量大学 浙江省流量计量技术研究重点实验室,杭州 310018
通讯作者:
作者简介:

侯立凯(1988—),男,山东济南人,博士,副教授。研究方向:微纳流体器件,微尺度计量技术,微流控技术。E-mail:

Study on a piston-type liquid ultra-microflow standard device based on the interference method
Likai Hou1, 3, * , Wenze Wu1, Hong Zheng2, * , Tengfei Zhu2, Xu Fan1, Xiaojie Xu2, Fubing Bao1, 3
Affiliations
  • 1College of Metrology Measurement and Instrument, China Jiliang University, Hangzhou 310018, China
  • 2Hangzhou Institute of Quality and Metrology, Hangzhou 310019, China
  • 3Zhejiang Key Laboratory of Flow Measurement Technology, China Jiliang University, Hangzhou 310018, China
出版时间: 2026-08-25 doi: 10.11729/syltlx20250120
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为实现nL/min量级超微液体流量的计量校准,开发了一种基于干涉法的活塞式液体超微流量标准装置。利用激光干涉测量技术,实现了对注射器活塞μm量级位移的精确捕捉;结合注射器内径与活塞位移的关系,建立了流量计算的数学模型,并利用该模型对装置各部分的不确定度进行了分析与评定。为测试装置性能,采用多种规格注射器对1~1000 nL/min区间内的超微流量进行了测试。实验结果显示:该装置能够识别超微流量的变化,具备良好的流量响应性能;注射泵校准所得误差均小于1%,装置扩展不确定度小于4%(包含因子k = 2)。此外,将质量法标准装置与干涉法标准装置进行比对实验,结果表明2套装置校准注射泵的误差一致;并通过计算归一化偏差,验证了干涉法装置的准确性及不确定度评定结果的有效性。

液体超微流量  /  标准装置  /  干涉法  /  活塞式  /  不确定度

To achieve metrological calibration of nL/min-level liquid ultra-microflow, a piston-type liquid ultra-microflow standard device based on the interference method has been developed. This device employs laser interference measurement technology to ensure precise capture of the syringe piston’s micrometer-level displacement. By establishing a flow calculation model based on the syringe's inner diameter and piston displacement, the uncertainty of each component in the device is analyzed and evaluated. The study used syringes of various specifications to test ultra-microflows in the range of 1–1000 nL/min. Experimental results demonstrate that the device can detect microscopic changes in ultra-microflow, exhibiting excellent flow response capability. Calibration errors for the syringe pump were below 1%, with an expanded uncertainty of less than 4% (k = 2). Finally, comparative experiments between gravimetric and interference method standard devices demonstrated consistent error trends in syringe pump calibration. Further calculation of normalized deviation validated the accuracy of the interference method device and the validity of its uncertainty assessment results.

liquid ultra-microflow  /  standard device  /  interference method  /  piston-type  /  uncertainty
侯立凯, 武文泽, 郑虹, 朱腾飞, 范旭, 许肖杰, 包福兵. 基于干涉法的活塞式液体超微流量标准装置研究. 实验流体力学, 2026 , 40 (4) : 46 -53 . DOI: 10.11729/syltlx20250120
Likai Hou, Wenze Wu, Hong Zheng, Tengfei Zhu, Xu Fan, Xiaojie Xu, Fubing Bao. Study on a piston-type liquid ultra-microflow standard device based on the interference method[J]. Journal of Experiments in Fluid Mechanics, 2026 , 40 (4) : 46 -53 . DOI: 10.11729/syltlx20250120
随着现代工业制造、生物医疗、化学合成等领域技术向微型化、精准化快速发展,nL/min至μL/min量级的液体超微流量精密注射泵与流量计的应用日益广泛,相应的流量溯源需求也越来越受到重视[1-4]。2012年和2019年,欧洲计量研究组织先后资助了2期药物输送计量项目,对100 nL/min以下的液体流量校准技术进行了广泛研究[5-7]。我国分析测试协会发布的《液体微流量测试方法》(T/CAIA YQ002—2016)采用质量法作为核心测试手段,但受极低流量下液体蒸发效应的影响,该方法仅适用于100 nL/min及以上量级的超微液体流量测定[8],难以满足更低流量区间的精准校准需求。因此,开发一套可实现100 nL/min以下液体超微流量校准的标准装置,对保障多学科领域基础研究的准确性和工业应用的可靠性具有重要意义。
液体超微流量标准装置[9]按原理可分为质量法和体积法2类。质量法利用高精度天平,通过测量流体质量随时间的变化来确定液体流量,瑞士国家计量学研究所(METAS)、葡萄牙质量研究所(IPQ)、英国贸易和工业部(DTI)等多家机构[10-11]采用该方法对超微流量进行了校准。然而,即使采取恒温控制及防蒸发措施,质量法在校准低至100 nL/min的流量时仍有困难,且装置的不确定度随流速降低而增大[12-13]。体积法[14-15]则通过液体的运动信息或体积变化确定单位时间内的体积流量,主要借助图像处理和光学技术,并逐渐发展出用于超微流量测量的界面追踪法和干涉法。界面追踪法利用图像处理获取已知内径的玻璃毛细管内气液界面的位移,从而推算体积流量。吕贝克应用技术大学(University of Applied Sciences Lübeck)和法国气动和热工业技术中心(CETIAT)分别使用界面追踪法对nL/min~μL/min的流量进行了校准[16-17],最低可校准的流量为16.67 nL/min,扩展不确定度为7%(包含因子k = 2)。IPQ的体积与流量实验室则利用干涉仪测量注射泵推块的位移,并设计了一套基于干涉法的超微流量标准装置,最低可校准16.67 nL/min的超微流量,扩展不确定度为15.2%(k = 2)[18]。干涉法能够避免液体蒸发带来的不利影响,具有更高的准确性,但在极低流量下,其装置的不确定度仍然较高。
针对我国液体超微流量校准下限偏高、高精度装置匮乏的现状,本文搭建了一套基于干涉法的活塞式液体超微流量标准装置。该装置依托自主开发的条纹计数算法,通过计算非完整周期相对于完整周期的占比,实现非完整周期条纹的精准识别与计数,分辨率可达nm量级,进而达成对活塞位移的μm量级高精度测量;同时,引入多规格注射器构建分级测量体系,确保各流量校准下活塞具有充足的位移量,最终将装置校准下限大幅降至1 nL/min,且该流量下扩展不确定度仅为2.46%(k = 2),可为我国超微流量计量领域提供高精度、高可靠性的技术支撑。
图1为活塞式液体超微流量标准装置的总体结构设计图。该装置主要由干涉系统、相机(华腾威视,HT–USB130M)、注射泵(Harvard Pump 11 Pico Plus Elite)及玻璃注射器(上海玻璃鸽工贸有限公司,5 mL、500 μL、100 μL)组成。其中,干涉系统包含He–Ne激光器(上海华城精准光电科技有限公司)、分束镜、三棱镜(2块)与双凸透镜。He–Ne激光器输出波长为632.8 nm,其高波长精度可有效降低因波长波动引起的活塞位移测量误差;三棱镜能显著提升系统抗外界环境干扰的能力,并增强光路稳定性;相机则用于精准捕捉干涉条纹的动态变化。三棱镜2固定于注射泵推块上,推块移动时带动三棱镜2移动,从而改变三棱镜2与三棱镜1之间的光程差。图2为相机捕获的等倾干涉条纹图像,其光强分布直接反映空间光程的变化规律。随着三棱镜2水平移动,干涉条纹不断从中心产生新圆环,且亮度由中心向外逐渐增强(如图2所示)。根据干涉原理,条纹每吞吐1个圆环,对应的活塞位移为激光波长的一半。因此,通过统计圆环的吞吐数量即可确定活塞的实际位移。在已知注射器内径r、活塞位移d及测试时间t的条件下,可构建活塞式超微流量标准装置的流量(Q)数学模型:
$ Q = \frac{\pi d{r}^{2}}{4t} $
为实现等倾干涉条纹数量的自动计数与活塞位移的精准计算,开发了基于Python的图像处理程序。该程序分为干涉图像采集、信号处理和活塞位移输出3个阶段。三棱镜1与三棱镜2之间光程差的动态变化会直接影响等倾干涉条纹的光强分布(表现为条纹亮度值的周期性演变),因此可提取图2中红色区域内每帧图像的像素强度均值,将其转化为连续的光强时域曲线。通过解析该曲线的峰值或谷值数量,即可精确统计圆环的吞吐数量,最终实现活塞位移的量化表征。采集干涉图像得到的原始像素强度曲线如图3(a)所示(1000 nL/min流量下记录30 s),受注射泵螺杆步进振动及环境干扰的影响,曲线波动剧烈。经信号处理(滤波、去噪)后,得到如图3(b)所示的平滑曲线,其峰值与谷值清晰可见,有效消除了装置运行振动带来的数据干扰。最后,利用式(2)可计算注射器活塞的位移:
$ d = N\times \frac{\lambda }{2}\times \left(1 + \frac{{m}_{2}}{{m}_{1}}\right) $
式中:N为测量时间内的完整周期数(相邻2个波峰之间为一个周期);λ为激光波长;m1为所有完整周期对应的相机总帧数;m2为第1个峰值之前和最后1个峰值之后的帧数之和。该公式通过引入非完整周期帧数补偿,能精准捕捉测量起始或终止阶段未形成完整周期的条纹信号,通过提取该部分的帧数特征并建立量化补偿模型,将传统整数周期计数法难以覆盖的微小位移分量纳入计算,有效消除了因周期截断导致的测量偏差,进一步提升了干涉系统的测量准确性。
为量化激光干涉系统测量μm量级位移的不确定度,采用该系统结合Python数据处理程序,对5 μm的标准长度(CL–SXD80–AC,德州创莱光电设备有限公司)进行多组测量,获得干涉系统的标准不确定度uA为0.85%。因活塞位移与标准长度同属μm量级,且测量条件一致,故将uA作为干涉系统测量活塞位移的不确定度,纳入装置整体不确定度评估。注射器活塞位移引入的不确定度u(d)计算方式如下:
$ u(d)_{ }=u_{\mathrm{A}}d $
其灵敏度系数cd为:
$ c_d = \frac{\partial Q}{\partial d} = \frac{\pi {r}^{2}}{4t} $
使用内径千分尺(315–03–110/375–03–110,青海量具刃具集团公司)分别测量容积为5 mL与500 μL的玻璃注射器内径各10次,取平均值作为注射器的有效内径,结果分别为10.316和3.258 mm。内径重复测量引入的标准不确定度urep为:
$ u\mathrm{_{rep}}=\frac{M_{\mathrm{r}}}{\sqrt{10}} $
式中:Mr为每个注射器内径重复测量的标准差。
内径千分尺的扩展不确定度Ucalliper = 0.006 mm(k = 2),则内径千分尺引入的标准不确定度ucalliper为:
$ {u}_{\text{calliper}} = \frac{{U}_{\text{calliper}}}{2} $
注射器内径r引入的总不确定度为:
$ u(r)=\sqrt{u_{\mathrm{rep}}^2+u_{\text{calliper}}^2} $
容积为100 μL的注射器因内径过小无法采用内径千分尺测量,故采用内部重力法[19]标定其内径,IPQ实验室已验证该方法与内径千分尺法的测量一致性。100 μL注射器经10次重复测量取平均,有效内径为1.458 mm,综合天平、卡尺及测量重复性的不确定度,其内径标准不确定度为0.005 mm。
上述3种规格注射器内径的灵敏度系数cr为:
$ c_r = \frac{\partial Q}{\partial r} = \frac{\pi dr}{2t} $
为保证实验时间的溯源性,由计时器(YS–528,深圳市弈圣科技有限公司)记录注射器活塞的运动时间,该计时器的扩展不确定度Uchron为0.02 s。检测时间t按正态分布考虑,时间引入的不确定度为:
$ u(t) = \frac{{U}_{\text{chron}}}{2} $
其灵敏度系数ct为:
$ c_t = \frac{\partial Q}{\partial t} = -\frac{\pi d{r}^{2}}{4{t}^{2}} $
为评估温度波动、流体黏度变化、系统压力波动等潜在外部因素对流量测量的综合影响,在每个流量点下连续进行30次测量,通过计算30组流量数据的标准差(MQ),得到由测量重复性引入的标准不确定度u(nrep) :
$ u(\mathrm{\mathit{n}_{rep}})=\frac{M_Q}{\sqrt{30}} $
式中:nrep为重复测量次数。
综合分析体积流量的数学模型与上述各变量的不确定度,可推导出流量标准装置的组合标准不确定度uc(Q)为:
$ u_{\mathrm{c}}(Q)=\sqrt{c_d^2u^2(d)+c_r^2u^2(r)+c_t^2u^2(t)+u^2(\mathrm{\mathit{n}_{rep}})} $
为满足实际测量结果的可靠性需求,取包含因子k = 2(对应约95%的置信水平),计算得到装置的扩展不确定度U(Q):
$ U(Q)=ku_{\mathrm{c}}(Q) $
通过上述分析方法,可量化各因素的不确定度,并比较各分量的大小,明确各影响因素对合成标准不确定度的贡献。
为测试装置性能,采用Harvard泵在7种不同流量条件下开展实验。注射器选型根据流量范围进行匹配:250~1000 nL/min流量使用5 mL的注射器,50和10 nL/min流量使用500 μL的注射器,1 nL/min流量点单独使用100 μL的注射器。实验装置实物图如图4所示,实验全程环境温度控制在(24 ± 1) ℃。
为确保每组流量数据的准确性,各流量下均持续记录60 min,每2 min采集1个流量数据,按式(1)计算30组数据的平均值作为有效流量。如图5(a)所示,测得的流量呈现良好的一致性,未出现明显的异常点,能较为准确地反映真实流量的动态波动情况。Harvard注射泵在7个设定流量点的测量误差分析结果如图5(b)所示。当采用5 mL注射器测量250~1000 nL/min流量时,误差呈现明显规律:流量越大,误差与波动幅度越小;流量越小,误差与波动幅度越大。具体而言,流量为1000 nL/min时注射泵误差仅为−0.10%,当流量降至250 nL/min时,误差增至0.55%。这一现象符合注射泵的普遍特性:在小流量条件下,泵的机械运动精度(如螺杆微小步进的准确性)及流体流动稳定性(如黏滞阻力变化)等因素的影响被放大,导致输出稳定性下降,进而使注射泵的输出误差增大且波动更为显著。当流量进一步降低时,通过选用小容积注射器匹配极低流量,可确保低流量下活塞位移仍具备可测量性,从而保障流量测量结果的可靠性。以1 nL/min流量为例,2 min时长对应的活塞位移为μm量级(1.2024 μm),充分保障了低流量区间测量的可靠性。
采用第2节所述的不确定度分析模型,对7个流量点的不确定度展开计算,结果如表1所示。由表1可知:所有流量点的相对扩展不确定度U(Q)/Q均小于4%(k = 2)。为定量明确各不确定度分量对组合标准不确定度的贡献占比,表2以10 nL/min流量点为例,详细拆解了不同影响因素引入的不确定度。各流量点下各影响因素的贡献占比如表3所示。分析表2与3的数据可知,注射器活塞位移测量引入的不确定度及实验重复性引入的不确定度是影响装置组合标准不确定度的主导分量。后续可通过优化干涉测量系统的位移不确定度评定方法,进一步降低装置的整体不确定度水平。从表3反映的实验重复性不确定度变化规律来看:在采用同规格注射器的条件下,随着流量降低,由环境温度波动、流体黏度变化及系统压力波动等外部因素引起的不确定度呈逐渐增大趋势;而当流量降至50 nL/min时,引入多规格注射器分级测量体系可大幅削弱上述外部因素对装置不确定度的影响。上述实验数据验证了本文所提超微流量校准方案的科学性与合理性。
为进一步验证本文干涉法液体超微流量标准装置的测量准确性及不确定度评定结果的合理性,引入质量法标准装置,对Harvard泵开展比对校准实验。质量法与干涉法校准注射泵的总体装置如图6所示:实验所用注射器经普通毛细管与玻璃毛细管串联,最终连接至油封容器,通过实时测量油封容器内液体单位时间内增加的质量实现流量溯源。实验选用微量电子天平(XP2U,梅特勒)作为质量测量核心设备,该天平最大称量值为2.1 g,可读性达0.1 μg,其精度水平能够有效捕捉nL/min量级流量对应的微小质量变化,满足超微流量比对实验的测量需求。为消除系统误差,实验前需执行排气操作,排除注射器内腔及所有连接管路中的残留空气,避免气泡对质量测量造成干扰;同时,实验环境条件与3.1节干涉法装置性能测试保持一致。
考虑到现有质量法标准装置的测量下限较高,仅能覆盖100 nL/min以上流量区间,为确保比对实验的有效性与数据可比性,本文在干涉法装置的1~1000 nL/min测量范围内,选取2种装置共同覆盖的流量点(250、500、750、1000 nL/min)开展比对实验。图7为2种装置对注射泵的校准结果。由图可知,2种装置的校准误差趋势一致,表明二者测量结果具有良好的一致性,可实现相互验证,这进一步证明了干涉法装置在超微流量测量中的可靠性。为量化评价比对结果的合理性,本文采用《计量比对》(JJF 1117—2010)[20]中规定的归一化偏差进行评价:
$ E_{\mathrm{n}}=\frac{Y_{ji}-Y_{\mathrm{r}i}}{ku_i} $
式中:En为归一化偏差;Yji为第j个装置在第i个测量点上的测量结果;Yri为第i个测量点上的参考值;ui为第i个测量点上Yji−Yri的标准不确定度;此处包含因子k = 2。
质量法装置与干涉法装置的计量比对结果见表4。由表4可知,|En| ≤ 1,表明2套标准装置的比对结果符合计量一致性要求,验证了干涉法装置的准确性和可靠性。由此可见,该干涉法装置可实现nL/min量级超微液体流量的计量校准。
本文针对nL/min量级液体超微流量溯源困难的问题,开发了一套以激光干涉测量为核心的活塞式液体超微流量标准装置,为该量级流量的精准溯源提供了新的技术途径。主要研究结论如下:
1)通过激光干涉技术实现了注射器活塞μm量级位移的高精度捕捉;结合注射器内径、活塞位移与流量的关联数学模型,对各组成部分进行了不确定度分析,完成了系统的不确定度评定;构建了多规格注射器分级测量体系,可覆盖1~1000 nL/min的超微流量测量区间,装置扩展不确定度小于4%(k = 2)。
2)干涉法与质量法标准装置的比对实验表明,2套装置对注射泵的校准误差高度一致;归一化偏差En的计算结果进一步证实了干涉法装置测量结果的准确性和不确定度评定方法的合理性。
综上,本文开发的基于干涉法的活塞式液体超微流量标准装置,有效解决了nL/min量级液体超微流量的溯源难题,可为该领域的精准测量与校准提供可靠的技术支撑。

参考文献 引证文献
排序方式:
1
Cavaniol C, César W, Descroix S, et al. Flowmetering for microfluidics[J]. Lab on a Chip, 2022, 22(19): 3603-3617. doi: 10.1039/d2lc00188h
2
刘兆利, 张鹏飞. 微反应器在化学化工领域中的应用[J]. 化工进展, 2016, 35(1): 10-17.
Liu Zhaoli, Zhang Pengfei. Applications of microreactor in chemistry and chemical engineering[J]. Chemical Industry and Engineering Progress, 2016, 35(1): 10-17. doi: 10.16085/j.issn.1000-6613.2016.01.002
3
Haselberg R, de Jong G J, Somsen G W. Low-flow sheathless capillary electrophoresis-mass spectrometry for sensitive glycoform profiling of intact pharmaceutical proteins[J]. Analytical Chemistry, 2013, 85(4): 2289-2296. doi: 10.1021/ac303158f
4
Fan X, Hou L K, Wu W Z, et al. Study on a low-disturbance and anti-interference dual-mode micro thermal flow sensor for heat-sensitive liquid[J]. Measurement, 2026, 257: 118641. doi: 10.1016/j.measurement.2025.118641
5
MeDD II Consortium. Metrology for drug delivery[DB/OL]. [2025-12-23]. https://drugmetrology.com.
6
Batista E, Furtado A, Pereira J, et al. New EMPIR project–metrology for drug delivery[J]. Flow Measurement and Instrumentation, 2020, 72: 101716. doi: 10.1016/j.flowmeasinst.2020.101716
7
Batista E, Sousa J A, Cardoso S, et al. Experimental testing for metrological traceability and accuracy of liquid microflows and microfluidics[J]. Flow Measurement and Instrumentation, 2020, 71: 101691. doi: 10.1016/j.flowmeasinst.2020.101691
8
T/CAIA YQ002—2016 液体微流量测试方法[S].
9
侯立凯, 范旭, 包福兵. 微小液体流量校准技术[J]. 化工进展, 2024, 43(2): 579-585.
Hou Likai, Fan Xu, Bao Fubing. Calibration technique of micro-liquid flow[J]. Chemical Industry and Engineering Progress, 2024, 43(2): 579-585. doi: 10.16085/j.issn.1000-6613.2023-1355
10
蔡洁, 海宁, 林峰. 静态质量法水流量标准装置校准流量计不确定度分析的讨论[J]. 工业计量, 2013, 23(4): 60-63.
Cai Jie, Hai Ning, Lin Feng. Discussion on uncertainty analysis of calibration flowmeter of static mass method water flow standard device[J]. Industrial Measurement, 2013, 23(4): 60-63. doi: 10.3969/j.issn.1002-1183.2013.04.021
11
杨潇萍. 静态质量法与动态质量法流量标准装置的比较[J]. 油气田地面工程, 2015, 34(4): 60-61.
Yang Xiaoping. Comparison of flow standard devices between static mass method and dynamic mass method[J]. Oil-Gas Field Surface Engineering, 2015, 34(4): 60-61.
12
Bissig H, Petter H T, Lucas P, et al. Primary standards for measuring flow rates from 100 nL/min to 1 mL/min: gravimetric principle[J]. Biomedical Engineering/Biomedizi-nische Technik, 2015, 60(4): 301-316. doi: 10.1515/bmt-2014-0145
13
Mills C, Batista E, Bissig H, et al. Calibration methods for flow rates down to 5 nL/min and validation methodology[J]. Biomedical Engineering/Biomedizinische Technik, 2023, 68(1): 13-27. doi: 10.1515/bmt-2022-0049
14
周兵, 张宏魁. 静态容积法水表自动检定装置[J]. 计量技术, 2008, 52(10): 41-44. doi: 10.3969/j.issn.1000-0771.2008.10.013
15
赵建亮, 祝新伟, 何爱珍. 动态容积法水表校准装置的研究[J]. 计量技术, 2004, 48(6): 19-21.
Zhao Jianliang, Zhu Xinwei, He Aizhen. Research on calibration device of dynamic volumetric water meter[J]. Measurement Technique, 2004, 48(6): 19-21. doi: 10.3969/j.issn.1000-0771.2004.06.007
16
Ogheard F, Cassette P, Boudaoud A W. Development of an optical measurement method for “sampled” micro-volumes and nano-flow rates[J]. Flow Measurement and Instrumen-tation, 2020, 73: 101746. doi: 10.1016/j.flowmeasinst.2020.101746
17
Batista E, Sousa J A, Álvares M, et al. Development of an experimental setup for micro flow measurement using the front tracking method[J]. Measurement: Sensors, 2021, 18: 100152. doi: 10.1016/j.measen.2021.100152
18
Batista E, Godinho I, Martins R F, et al. Development of an experimental setup for microflow measurement using interferometry[J]. Flow Measurement and Instrumentation, 2020, 75: 101789. doi: 10.1016/j.flowmeasinst.2020.101789
19
Batista E, Álvares M, Martins R F, et al. Measurement of internal diameters of capillaries and glass syringes using gravimetric and optical methods for microflow applications[J]. Biomedical Engineering/Biomedizinische Technik, 2022, 68(1): 29-38. doi: 10.1515/bmt-2022-0033
20
JJF 1117—2010 计量比对[S].
2026年第40卷第4期
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doi: 10.11729/syltlx20250120
  • 接收时间:2025-12-23
  • 首发时间:2026-10-22
  • 出版时间:2026-08-25
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  • 收稿日期:2025-12-23
  • 修回日期:2026-01-22
  • 录用日期:2026-01-27
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    1中国计量大学 计量测试与仪器学院,杭州 310018
    2杭州市质量计量科学研究院,杭州 310019
    3中国计量大学 浙江省流量计量技术研究重点实验室,杭州 310018

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